Abstract: Disclosed is a fluorine-containing polymer obtained by polymerizing a 1,6-diene-type ether compound represented by formula [1] and, for example, a (meth)acrylic acid compound represented by formula [2]. The fluorine-containing polymer shows high transparency, has a high glass transition point, and is soluble in a solvent and therefore has moldability. In the case where a (meth)acrylic unit has a reactive substituent, by utilizing the crosslinking reaction thereof, a thin film having high solvent resistance can be produced. In formulae [1] and [2], R1 and R2 each independently represent a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, which may be substituted, R3 represents a hydrogen atom, a fluorine atom, or a methyl group, and R4 represents a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, which may be substituted, or an aromatic group having 5 to 10 ring members, which may be substituted.

Abstract: Disclosed is a fluorine-containing polymer obtained by polymerizing a 1,6-diene-type ether compound represented by formula [1] and, for example, a (meth)acrylic acid compound represented by formula [2]. The fluorine-containing polymer shows high transparency, has a high glass transition point, and is soluble in a solvent and therefore has moldability. In the case where a (meth)acrylic unit has a reactive substituent, by utilizing the crosslinking reaction thereof, a thin film having high solvent resistance can be produced. In formulae [1] and [21, R1 and R2 each independently represent a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, which may be substituted, R3 represents a hydrogen atom, a fluorine atom, or a methyl group, and R4 represents a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, which may be substituted, or an aromatic group having 5 to 10 ring members, which may be substituted.

Abstract: A fluorine-containing polymer obtained using a 1,6-diene ether compound represented by formula [1] is a high-performance polymer exhibiting a low refractive index, high glass transition point, a high degree of transparency, and solubility in solvents. There are many potential uses, such as use as a coating material or bulk material. For example, said polymer could be effectively used in high-tech fields such as: optical materials such as low-reflection films and optical waveguide cladding; semiconductor materials such as pellicles and resists in semiconductor lithography; and protective film materials, insulating film materials, and water-repellent materials. (In the formula, R1 represents a C6-18 aryl group or a C1-12 alkyl group, which may be substituted.

Abstract: A gas at an extremely low temperature is jet-sprayed onto a warped concave surface of a wafer to correct this warped concave surface flat.

Abstract: The present invention relates to a film thickness measuring method measuring a film thickness of an element formation layer formed on a substrate and its object is to provide a film thickness measuring method which can measure a residual film thickness of a polishing object film in a polishing process at a high accuracy. In a fabrication method of a thin film magnetic head, alumina is coated over a dummy layer 54 and a bottom shielding layer 16 after forming the dummy layer 54 along with the bottom shielding layer 16 and a planarized layer 24 is formed by polishing the surface thereof using a CMP. Next, after forming a top shielding layer 32 over the bottom shielding layer 16, a planarized layer 38 is form by embedding alumina. A film thickness of an embedded 38 on the dummy layer 54 is measured by a non-contact optical film thickness measuring equipment and a film thickness of the top shielding layer 32 is measured based on the film thickness.

Abstract: A gas at an extremely low temperature is jet-sprayed onto a warped concave surface of a wafer to correct this warped concave surface flat.

Abstract: This invention relates to a polishing method for polishing a surface of a material to be polished and a fabrication method of a thin film magnetic head having a planarization process for planarizing the surface of the material to be polished by polishing, and an object thereof is to reduce variations of a residual film thickness on the surface of a material to be polished after polishing. An insulating film 14 is formed on an AlTiC substrate 12 and a bottom shielding layer 16 is formed thereover. After forming a coating layer 18 and etching a mask layer 22 as an etching mask, a protruding portion of the coating layer 18 at the bottom of the opening of the mask layer 22 is removed by a desired thickness. Since a protruding portion of the coating layer 18 on the periphery of the opening of the mask layer is suitably undercut, the protruding portion is shaved, thereby obtaining the coating layer 18 which is planarized as a whole.

Abstract: A polishing apparatus comprises a plurality of (three, for example) polishing portions and a cleaning portion. First, roughing is performed in a first polishing portion by a platen made of a hard grinder. The polishing surface of the platen is hard so that the wafer on the polishing surface exhibits no pattern dependence. Next, scratches and polishing distortion slightly generated on the wafer in the platen are removed (medium polishing) by a hard abrasive pad with a single-layered structure in a second polishing portion. Further, finishing is performed in a third polishing portion by an abrasive pad with a two-layered structure. At last, the contamination left by the micro scratches or slurry generated in the prior process is completely cleaned by a cleaning pad in the cleaning portion.

Abstract: An abrasive slurry contains an alumina grain, an inorganic salt, a water-soluble chelating agent, an abrasive oil and a hardly water-soluble chelate aluminum salt or chelate nickel salt. The alumina grain has an average particle diameter of from 0.05 to 1 &mgr;m in an amount of from 0.1 to 10% by weight. The inorganic salt is selected from the group consisting of water-soluble inorganic aluminum salt and nickel salt in an amount of from 0.1 to 3% by weight. The content of the water-soluble chelating agent is from 0.1 to 3% by weight. The content of the abrasive oil is from 0.1 to 10% by weight. The content of the hardly water-soluble chelate aluminum salt or chelate nickel salt is not more than 0.1% by weight. The abrasive slurry is used for abrading an insulation layer of a semiconductor integrated circuit and a magnetic thin film head while they are produced.

Abstract: A cleaning apparatus includes a cleaning tank for reserving cleaning fluid, an object to be cleaned being immersed in the cleaning fluid, a vibrator for vibrating the cleaning fluid in the cleaning tank, and two micro-vibration sources for minutely vibrating the object to be cleaned in two different directions.

Abstract: A cleaning apparatus includes a cleaning tank for reserving cleaning fluid, an object to be cleaned being immersed in the cleaning fluid, a vibrator for vibrating the cleaning fluid in the cleaning tank, and two micro-vibration sources for minutely vibrating the object to be cleaned in two different directions.

Abstract: A method for manufacturing a flying type magnetic head slider includes an ion etching step for shaping a surface of the slider facing to a magnetic information medium to form a predetermined pattern by using an ion etching method, a step of forming a protection layer of an organic material to cover at least one face of the slider on which at least one electromagnetic transducer element is formed, by injecting the organic material to the at least one face of the slider from a ink jet type printer head, and a step of removing the protection layer of the organic material. The protection layer forming step is executed before the ion etching step, whereas the protection layer removing step is executed after the ion etching step.

Abstract: Heptafluoroisobutenyl methyl ether having the following formula: ##STR1## is oxidized with ozone to produce perfluoro(2-methyl-1,2-epoxy-propyl) methyl ether. The resulting intermediate compound is allowed to react with an aromatic compound ArH to produce .alpha.,.alpha.-bis(trifluoromethyl)arylacetic acid methyl ester having the following formula: ##STR2## By hydrolysis, decarboxylation and further hydrolysis of the ester compound, .alpha.,.alpha.-bis(trifluoromethyl)arylacetic acid for use as raw materials for medicines, agricultural chemicals, liquid crystals, etc. or reagents for determining an optical purity can be obtained.

Abstract: The present invention is directed to stabilize the flying height at a constant level and prevent head crashes.Indented portions 104 and 105 are formed shorter than rail portions 101 and 102. Rear rail surfaces 113 and front rail surfaces 112 are formed at the slider 1 with middle rail surfaces 111 formed between them. The rear rail surfaces 113 and the front rail surfaces 112 each include a first surface (L1) whose surface width is determined by the entire width W01 or W02 of the rail portion 101 or 102 and a second surface (L3) whose surface width is gradually reduced starting from the surfaces width W01 or W02 of the first (L1) toward the surface width W11 or W12 of the middle rail surfaces 111. The requirements, i.e., L1.ltoreq.2.5% of L0 and L1<L2.ltoreq.15% of L0 are satisfied for the length L1 of the first surfaces (L1), the length L2, that includes the first surfaces (L1) and the second surfaces (L3) and the entire length L0 of the rail portions 101 and 102.

Abstract: .alpha.-(trifluoromethyl)arylacetic acid for use as raw materials for medicines, agricultural chemicals, liquid crystals etc. or reagents for determining an optical purity is readily obtained through very simple reaction steps, i.e. by reacting a perfluoro(2-methyl-1,2-epoxypropyl)ether compound obtainable by ozone, oxidation of a heptafluoroisobutenyl ether compound with an aromatic compound ArH to afford an .alpha.,.alpha.-bis(trifluoromethyl)arylacetic acid ester, followed by decarboxylation and hydrolysis of the resulting ester compound.

Abstract: The slider is provided with at least one rail portion which extends between the trailing end portion and the leading end portion on one surface of the slider body. At least one magnetic transducer is provided on a line extended from the rail portion toward the trailing end of the slider body. The rail portion is provided with indented rail portions formed along the two sides and the rail surface, excluding the indented rail portions, forms the air bearing surface. The indented rail portions are formed shorter than the rail portion so that the air bearing surface continues all the way to, at least, the trailing end portion of the slider body. The width of the air bearing surfaces, which are cut into by the indented rail portions, is maintained at approximately the same dimension over the entire length of the indented rail portions.

Abstract: A herein is a method of and an apparatus for electrostatically spray-coating a workpiece with electrically-conductive paint. The workpiece is first sprayed with the paint directly subjected to a high voltage from a rotatable atomizing type spray gun so as to electrostatically coat the work with the paint. Thereafter, cleaning liquid is supplied to a rotatable atomizing head through a line for washing after completion of the electrostatic spray coating process so as to clean the rotatable atomizing head. Further, after the rotatable atomizing head has been washed, the line is dried, and the next electrostatic spray coating process is carried out after the line has been dried. The spray gun includes an inner line as a path, for supplying the paint to the rotatable atomizing head, and an outer line as a path used for washing, for supplying the cleaning liquid used to wash the rotatable atomizing head.

Abstract: An apparatus for electrostatically spray-coating a workpiece with conductive paint which includes a color changeover valve mechanism for selectively supplying conductive paint, cleaning liquid and air. A flush valve mechanism is provided for selectively supplying the cleaning liquid and the air. A first directional control valve includes an outlet and inlets. The inlets are connected to feed lines extending from the color changeover valve mechanism and the flush valve mechanism, respectively. A block line is made of an insulating material and has a first end connected to the outlet of the first directional control valve. The block line includes a second end in communication with the first end. A second directional control valve is provided having outlets and an inlet. The inlet is connected to the second end of the block line. An intermediate reservoir is connected via a feed line to one of outlets of the second directional control valve.

Abstract: Disclosed herein is a line jointing structure suitable for use in an electrostatic spray painting apparatus. The line jointing structure is used to connect to a device, an insulating line serving as a path for transportation of electrically conductive paint to which a high voltage is applied. The line jointing structure basically comprises a jointing member having a connecting portion capable of being inserted into an end of the insulating line, a sleeve disposed to cover an outer peripheral surface of the line, a nut for pressing the sleeve toward the connecting portion so as to connect the line to the connecting portion, the nut being fixedly mounted on the jointing member, and insulating seals disposed at both ends of the nut.

Abstract: An electrostatic spray painting apparatus includes an electrically-insulated intermediate reservoir for storing therein conductive paint to which a high voltage is directly applied. In addition, the intermediate reservoir includes a cylinder, a piston reciprocatively and slidably disposed within the cylinder, and a fluid-flow straightening member protrudently formed in a part of a cylinder chamber used to be charged with the paint. The cylinder chamber is defined by the cylinder and the piston. An injection hole is defined near an outer peripheral edge of a cylinder wall so as to be connected to a paint and cleaning fluid feed source. A discharge hole is centrally defined in the cylinder wall so as to be connected to a spray gun, the discharge hole being used to discharge the paint and the cleaning liquid.