Abstract: The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG. 4A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate.

Abstract: The purpose of the present invention is to provide a substrate inspection device that increases the flatness of a substrate during inspection, and improves the detection sensitivity of foreign matter. Therefore, the present invention is a substrate inspection device provided with a turntable on which a substrate to be inspected is mounted, and a clamp mechanism that holds the substrate on the turntable. The substrate inspection device is characterized in that the clamp mechanism has an abutting part that moves in an in-plane direction of the substrate and presses the substrate. Preferably, the abutting part contacts or separates from an outer peripheral side surface of the substrate by rotating centered on a rotational axis in an out-of-plane direction of the substrate.

Abstract: The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG. 4A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate.

Abstract: A lead frame includes an outer frame. The outer frame includes: an upper surface; a lower surface that is opposite to the upper surface; a side surface between the upper surface and the lower surface; a first recess that is formed to extend from the upper surface to the side surface; a second recess that is formed to extend from the lower surface to the side surface; and a curved surface that is positioned between the side surface and a side wall of the first recess or between the side surface and a side wall of the second recess.

Abstract: A lead frame includes an outer frame. The outer frame includes: an upper surface; a lower surface that is opposite to the upper surface; a side surface between the upper surface and the lower surface; a first recess that is formed to extend from the upper surface to the side surface; a second recess that is formed to extend from the lower surface to the side surface; and a curved surface that is positioned between the side surface and a side wall of the first recess or between the side surface and a side wall of the second recess.

Abstract: Selection of sensors requires the knowledge of individual sensors mounted on a target machine and the knowledge of mechanical features of the machine. In the past, experts having mechanical knowledge selected the sensors. The present invention involves analyzing sensor data at e of machine failure, extracting features from the sensor data regarding each failure cause, and comparing the extracted features so as to clarify the difference between the sensor data about the failure causes and present an operator with the clarified difference thereby to support sensor selection. The invention makes it possible to select more simply than before the sensors considered effective for classifying failure causes. For example, the sensors deemed effective for classifying failure causes without mechanical knowledge can be selected.

Abstract: A state monitoring system enabling a sign of abnormality of equipment to be detected is disclosed, which includes: a storage unit to be stored with normal models obtained by analyzing, per series of manipulations, time-series learning data of sensor outputs indicated by respective units of processing equipment when normally finishing processing a raw material through the series of manipulations according to a default sequence; and a processing unit to diagnose a state of the processing equipment on the occasion of processing a specified raw material, upon an input of time-series evaluation data of the sensor output indicated by each of the units of the processing equipment on the occasion of finishing processing the specified raw material through the series of manipulations, on the basis of a comparison between the inputted data and the normal model.

Abstract: The information processing apparatus includes a receiving unit for receiving from a transmission-side information processing apparatus data extracted from a set of data of a plurality of attributes acquired in time series from a monitoring target and a reception data processing unit for setting, when a set of the received data includes a value-unfilled attribute, a value being latest among known values of the attribute included in previously received time-series sets of data, as a value of the value-unfilled attribute.

Abstract: Selection of sensors requires the knowledge of individual sensors mounted on a target machine and the knowledge of mechanical features of the machine. In the past, experts having mechanical knowledge selected the sensors. The present invention involves analyzing sensor data at e of machine failure, extracting features from the sensor data regarding each failure cause, and comparing the extracted features so as to clarify the difference between the sensor data about the failure causes and present an operator with the clarified difference thereby to support sensor selection. The invention makes it possible to select more simply than before the sensors considered effective for classifying failure causes. For example, the sensors deemed effective for classifying failure causes without mechanical knowledge can be selected.

Abstract: Among the multiple OES data wavelengths, an analysis device identifies the wavelength of light emissions from a substance contained in the plasma from among multiple light emission wavelengths within the chamber by way of the steps of: measuring the light emission within the chamber during etching processing of the semiconductor wafer; finding the time-based fluctuation due to changes over time on each wavelength in the measured intensity of the light emissions in the chamber; comparing the time-based fluctuations in the wavelength of the light emitted from the pre-specified substance; and by using the comparison results, identifying the wavelength of the light emitted from the substance caused by light emission within the chamber.

Abstract: The invention provides a plasma processing apparatus aimed at suppressing the corrosion caused by reactive gas and heavy-metal contamination caused by plasma damage of components constituting the high-frequency electrode and gas supply unit. The plasma processing apparatus comprises a processing chamber 1 for subjecting a processing substrate 4 to plasma processing, gas supply means 17, 16 and 11 for feeding gas to the processing chamber 1, and an antenna electrode 10 for supplying high-frequency radiation for discharging the gas to generate plasma, wherein the gas supply means includes a gas shower plate 11 having gas discharge holes on the surface exposed to plasma, and a portion of or a whole surface of the conductor 10 exposed to gas constituting the antenna-electrode side of the gas supply means is subjected to ceramic spraying containing no heavy metal to form a protecting film 12.

Abstract: Among the multiple OES data wavelengths, an analysis device identifies the wavelength of light emissions from a substance contained in the plasma from among multiple light emission wavelengths within the chamber by way of the steps of: measuring the light emission within the chamber during etching processing of the semiconductor wafer; finding the time-based fluctuation due to changes over time on each wavelength in the measured intensity of the light emissions in the chamber; comparing the time-based fluctuations in the wavelength of the light emitted from the pre-specified substance; and by using the comparison results, identifying the wavelength of the light emitted from the substance caused by light emission within the chamber.

Abstract: The present invention provides a driving force control unit for a vehicle having an accelerator opening degree detecting unit for detecting accelerator opening degree, a driving condition detecting unit for detecting engine driving condition, a driving force setting unit for setting a driving force indication value according to a plurality of different driving force characteristics based on the accelerator opening degree and the engine driving condition, a selector for selecting a driving force characteristic from the plural of different driving force characteristics by manipulation. The driving force setting unit setting the driving force indication value according to the selected driving force characteristic.

Abstract: In a sliding door apparatus, a first entrance is opened and closed by a first door, and a second entrance that faces the first entrance is opened and closed by a second door. Imaging means that captures images across a space between the first entrance and the second entrance is disposed beside the space. An image processing and determining portion determines presence or absence of an obstruction inside the space based on image data from the imaging means.

Abstract: The present invention provides a vehicle display device which allows a driver to instantaneously grasp driving force information. A meter_ECU displays a driving force display image which displays driving force information of a vehicle on an MID, displays an acceleration-torque line (driving force characteristic line) L corresponding to the currently selected mode M and, at the same time, changes a power level which is indicated in a power display region P set within the acceleration-torque line L interlockingly with an accelerator operation of a driver. Due to such a constitution, the vehicle display device allows the driver to instantaneously grasp the driving force information.

Abstract: The present invention provides a vehicle display device which can display fuel consumption information of a vehicle in a useful and optimum mode for a driver. A meter_EUC calculates an instantaneous fuel consumption of a vehicle based on a mileage and a fuel injection quantity within a set time, calculates an average fuel consumption of the vehicle based on respective cumulative values of the mileage and the fuel injection quantity repeatedly calculated for every set time, and displays the deviation of the instantaneous fuel consumption with respect to the average fuel consumption as fuel consumption information on a fuel consumption meter. The display on the fuel consumption meter is performed by swinging a pointer with respect to a neutral position.

Abstract: The driving force control unit for a vehicle comprises a plurality of control modes for controlling a driving force, each of control modes having each driving force characteristic, a vehicle driving condition detecting unit for detecting a vehicle driving condition, a selector for selecting one control mode from the control modes, a temporary selector for changing the current mode to other mode, and a driving force indication value setting unit for setting a driving force indication value according to the vehicle driving condition and the driving force characteristic corresponding to the selected mode by the selector or the temporary selector.

Abstract: The driving force control unit comprises a plurality of control modes for controlling a driving force, each of control modes having each driving force characteristic; a vehicle driving condition detecting unit for detecting a vehicle driving condition; a selector for selecting one control mode from the plurality of control modes; a driving force setting unit for setting a driving force indication value according to the driving force characteristic selected by the selector based on the vehicle driving condition; and a shift lever position detector for detecting a shift lever position of a transmission. The control mode includes a reverse control mode having a reverse driving force characteristic suitable for traveling the vehicle in reverse direction. The driving force setting unit changes the control mode to the reverse control mode when the shift lever is detected in a position of a reverse range, and sets the driving force indication value according to the reverse driving force characteristic.

Abstract: A plasma processing apparatus includes a vacuum vessel with a sample stage having a mounting surface disposed in a process chamber, and a plate having substantially uniform thickness and electric power applied thereto constituting a ceiling of the chamber. The plate is disposed opposite to and substantially parallel with the sample stage so as to cover the whole area of the stage mounting surface and has a through-hole therein. An optical transmitter with a diameter larger than a diameter of the though-hole is disposed inside of the vacuum vessel and has an end face at a position above and spaced a small distance a back surface of the plate so as to receive light from the chamber via the through-hole. The optical transmitter is independently detachable with respect to the back surface of the plate.

Abstract: A process for producing a packaged pasta product storable at room temperature. The pasta noodles are boiled for a predetermined period of time. Optionally, a pH adjusting agent and an anti-bonding agent may be added to the boiled pasta. The pasta is hot pressed into the container with high temperature and high pressure steam. The hot pressing step may include confining the pasta within a chamber, injecting steam and opening the chamber. This hot pressing step may be repeated several times. The boiled or steamed pasta is packaged into an individual serve container, preferably within a clean booth environment. The container may be flushed with an inert gas and sealed with an oxygen impermeable film.