Abstract: The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG. 4A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate.

Abstract: An attempt is made to prevent an adequate recording power detection lag from being generated according to data from a defective area at trial writing, by detecting a defective area portion based on a fluctuation of return light when a trial write recording mark is formed, recording it in another portion under the same conditions as the detected portion, and using the information on the recorded area instead of the area in which the defective area was detected at reproduction of the trial writing.

Abstract: A linear actuator comprises a piston which is provided in an actuator body and which is displaceable under a pressure fluid, a slide table which is integrally connected to the piston and which is linearly displaceable, a rod which is engaged with the slide table and which has a shaft section inserted into an engagement hole of the piston, end blocks which are connected to ends of the actuator body, and stoppers which are provided on end surfaces of the end blocks and which adjust a displacement amount of the slide table.

Abstract: A linear actuator comprises a piston which is provided in an actuator body and which is displaceable under a pressure fluid, a slide table which is integrally connected to the piston and which is linearly displaceable, a rod which is engaged with the slide table and which has a shaft section inserted into an engagement hole of the piston, end blocks which are connected to ends of the actuator body, and stoppers which are provided on end surfaces of the end blocks and which adjust a displacement amount of the slide table.

Abstract: An attempt is made to prevent an adequate recording power detection lag from being generated according to data from a defective area at trial writing, by detecting a defective area portion based on a fluctuation of return light when a trial write recording mark is formed, recording it in another portion under the same conditions as the detected portion, and using the information on the recorded area instead of the area in which the defective area was detected at reproduction of the trial writing.

Abstract: Piston rods are coupled to respective pistons movably disposed respective cylinder chambers defined in a cylinder body. The piston rods have distal ends connected to an end plate mounted on a slide table which is mounted for movement along a guide rail. When the piston rods are displaced by the pistons, the slide table is also displaced axially of the cylinder body. When the slide table is positioned at either end of its stroke, a load is applied by the weight of a workpiece supported on the slide table and the weight of the slide table itself to the cylinder body through the guide rail. The slide table is thus prevented from being unduly flexed under the load. The length of the slide table can be set to a desired length irrespective of an increase in the displacement of the slide table. Even if the displacement of the slide table is increased, the slide table is not flexed and hence remains highly rigid against flexure.