Abstract: A chemical liquid supply device has a pump provided with a pump chamber which is expanded and contracted by an elastically deformable bellows, and chemical liquid in a chemical liquid container flows into the pump chamber through a suction channel. The chemical liquid in the pump chamber is discharged through a discharge channel to a discharge nozzle. A looped circulation channel for returning the chemical liquid supplied from the pump chamber to the pump chamber is connected to the pump, and provided with an expanding and contracting portion. A filter for filtering the chemical liquid which is returned to the pump chamber is provided to the circulation channel. Since flow resistance of the filter is not applied to the pump when the chemical liquid is discharged from a discharge nozzle, it's possible to discharge a specific amount of chemical liquid from the discharge nozzle with a high degree of accuracy.

Abstract: A drive characteristic and durability of a liquid supply device having a flexible pump member such as a bellows are improved. A drive pump in the liquid supply device has a bellows as the pump member that is elastically deformed axially by a drive rod. A drive pump chamber and a communication chamber are formed by the bellows and the housing, and the communication chamber and the drive pump chamber are partitioned by the orifice member. At a drive operation time of the drive rod, the through hole is blocked by the valve member, and a liquid flows in between the communication chamber and the drive pump chamber via a communication gap formed between the orifice member and an inner circumferential face of the housing.

Abstract: A chemical liquid supply device has a pump provided with a pump chamber which is expanded and contracted by an elastically deformable bellows, and chemical liquid in a chemical liquid container flows into the pump chamber through a suction channel. The chemical liquid in the pump chamber is discharged through a discharge channel to a discharge nozzle. A looped circulation channel for returning the chemical liquid supplied from the pump chamber to the pump chamber is connected to the pump, and provided with an expanding and contracting portion. A filter for filtering the chemical liquid which is returned to the pump chamber is provided to the circulation channel. Since flow resistance of the filter is not applied to the pump when the chemical liquid is discharged from a discharge nozzle, it's possible to discharge a specific amount of chemical liquid from the discharge nozzle with a high degree of accuracy.

Abstract: A drive characteristic and durability of a liquid supply device having a flexible pump member such as a bellows are improved. A drive pump in the liquid supply device has a bellows as the pump member that is elastically deformed axially by a drive rod. A drive pump chamber and a communication chamber are formed by the bellows and the housing, and the communication chamber and the drive pump chamber are partitioned by the orifice member. At a drive operation time of the drive rod, the through hole is blocked by the valve member, and a liquid flows in between the communication chamber and the drive pump chamber via a communication gap formed between the orifice member and an inner circumferential face of the housing.