Abstract: A new spectral measurement technique is provided which enables measurement even if the light to be measured exists for a very short period. In one embodiment, a broadband pulsed light wave whose wavelength shifts temporally and continuously in a pulse interferes with a light wave to be measured. The intensity at each wavelength of the light wave to be measured is obtained using a Fourier transform of the output signal from a detector that has detected the intensity of the wave resulting from the interference. A laser beam from a laser source is converted to a supercontinuum wave by a nonlinear optical element, and a pulse extension element extends pulses of the supercontinuum wave, thus generating the broadband pulsed light wave.

Abstract: A new spectral measurement technique is provided which enables measurement even if the light to be measured exists for a very short period. In one embodiment, a broadband pulsed light wave whose wavelength shifts temporally and continuously in a pulse interferes with a light wave to be measured. The intensity at each wavelength of the light wave to be measured is obtained using a Fourier transform of the output signal from a detector that has detected the intensity of the wave resulting from the interference. A laser beam from a laser source is converted to a supercontinuum wave by a nonlinear optical element, and a pulse extension element extends pulses of the supercontinuum wave, thus generating the broadband pulsed light wave.

Abstract: [Object] The object of the invention is to present a new spectral measurement technique enabling a measurement even if light to be measured exists within a very short period. [Means for Solution] A broadband pulsed light wave L1 where wavelength shifts temporally and continuously in a pulse interferes with a light wave L0 to be measured. The intensity at each wavelength of the light wave L0 to measured is obtained by the Fourier transform of the output signal from a detector 5 that has detected the intensity of the wave resultant from the interference. A laser beam L2 from a laser source 1 is converted to a supercontinuum wave L3 by a nonlinear optical element 2. A pulse extension element 3 extends pulses of the supercontinuum wave L3, thus generating the broadband pulsed light wave L1.

Abstract: The laser driven lamp comprising: a main body having a columnar shape; a concave reflecting portion formed at a front side of the main body, the concave reflecting portion having a focal point at which the laser beam converges; a light exit window provided in front of the concave reflecting portion; a laser beam passing hole formed at a center of the main body, the laser beam passing hole penetrating the main body in an optical axial direction of the lamp; and a light entrance window provided at a rear side of the main body, the laser beam being incident to the light entrance window, the main body, the light exit window and the light entrance window constituting in combination a closed space, and the light emitting gas being enclosed in the closed space.

Abstract: The laser driven lamp comprising: a main body having a columnar shape; a concave reflecting portion formed at a front side of the main body, the concave reflecting portion having a focal point at which the laser beam converges; a light exit window provided in front of the concave reflecting portion; a laser beam passing hole formed at a center of the main body, the laser beam passing hole penetrating the main body in an optical axial direction of the lamp; and a light entrance window provided at a rear side of the main body, the laser beam being incident to the light entrance window, the main body, the light exit window and the light entrance window constituting in combination a closed space, and the light emitting gas being enclosed in the closed space.

Abstract: A light source device includes a laser oscillator for emitting a continuous laser beam and a pulsed laser beam. The laser oscillator has a resonator, at least one laser medium in the resonator, a first pumping unit for supplying light to the laser medium, and a second pumping unit for supplying another light to the laser medium. The light source device also includes a plasma vessel to receive the continuous laser beam and the pulsed laser beam from the laser oscillator, generate plasma, and emit light derived from the plasma. The light source device also includes a first electricity feeder for feeding electricity to the first pumping unit, a second electricity feeder for feeding electricity to the second pumping unit, and a controller for controlling the first and second electricity feeders such that the first pumping unit generates continuous light, and the second pumping unit generates pulsed light.

Abstract: An exhaust pipe that forms an exhaust flow channel includes a first flow channel member that forms part of the exhaust flow channel, and a second flow channel member connected in series with the first flow channel member, and forms part of the exhaust flow channel. A downstream-side end of the first flow channel member is inserted into an upstream-side end of the second flow channel member. A communication channel that communicates between an inside and an outside of the exhaust pipe is formed between an outer surface of an insertion part of the first flow channel member and an inner surface of an insertion-receiving part of the second flow channel member. The insertion-receiving part is arranged to face higher than a horizontal direction.

Abstract: An exhaust pipe that forms an exhaust flow channel includes a first flow channel member that forms part of the exhaust flow channel, and a second flow channel member connected in series with the first flow channel member, and forms part of the exhaust flow channel. A downstream-side end of the first flow channel member is inserted into an upstream-side end of the second flow channel member. A communication channel that communicates between an inside and an outside of the exhaust pipe is formed between an outer surface of an insertion part of the first flow channel member and an inner surface of an insertion-receiving part of the second flow channel member. The insertion-receiving part is arranged to face higher than a horizontal direction.

Abstract: A high pressure discharge lamp has a sealing portion that is made of glass and a sealing metal piece. In a method of manufacturing the high pressure discharge lamp, the sealing metal piece is irradiated with laser beam whose pulse width is 1×10?9 seconds or less, so as to carry out a surface treatment of the sealing metal piece. The sealing metal piece may have a groove that is 120 to 600 nm in depth and 450 to 1,200 nm in width.

Abstract: A light source device wherein the high-temperature plasma state after the start of the lighting is maintained stably and the light emission can be maintained stably and a decrease of the lighting life cycle by means of a heating of the light emission tube is suppressed comprises a light emission tube, in which a light emitting means is enclosed, and a pulsed laser oscillator part emitting a pulsed laser beam towards said light emission tube, wherein a continuous-wave laser oscillator part is provided emitting a continuous-wave laser beam towards said light emission tube.

Abstract: A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.

Abstract: In a light source device provided with a light emission tube in which a light emitting element is enclosed and at least one laser oscillator part for radiating a laser beam towards said light emission tube, for focusing a beam within a light emission tube with a large solid angle and for preventing that the beam with a high energy density impinges upon the wall of the light emission tube, the light emission tube has a tube wall, part of which is made to function as a focusing means, or the light emission tube has a focusing means at the inner surface thereof.

Abstract: An exposure device for producing semiconductors and liquid crystals has an optical system capable of effectively using light generated without making a hole in a lamp discharge vessel when high energy laser light is supplied to it for emitting light, such as ultraviolet light. The exposure device has a light source for emitting ultraviolet light, a laser device for emitting laser light, an elliptical reflector for reflecting ultraviolet light emitted from the light source, and an optical system for directing light reflected by the elliptical reflector to an article to be treated via optical elements including a collimator lens and an integrator lens, and a beam splitter having a wavelength selecting ability provided in the optical path for light reflected by the elliptical reflector to allow laser light to be incident on the light source from and opening side of the elliptical reflector.

Abstract: An laser driven light source comprises a bulb that encloses a discharge medium, a laser beam unit for emitting a laser beam, wherein the laser beam is focused in the bulb for generating a discharge, and a beam shield element that is provided in the bulb to shield peripheral devices from the laser beam, which passes through the discharge generated in the bulb.

Abstract: A high pressure discharge lamp has a sealing portion that is made of glass and a sealing metal piece. In a method of manufacturing the high pressure discharge lamp, the sealing metal piece is irradiated with laser beam whose pulse width is 1×10?9 seconds or less, so as to carry out a surface treatment of the sealing metal piece. The sealing metal piece may have a groove that is 120 to 600 nm in depth and 450 to 1,200 nm in width.

Abstract: In a light source device provided with a light emission tube in which a light emitting element is enclosed and at least one laser oscillator part for radiating a laser beam towards said light emission tube, for focusing a beam within a light emission tube with a large solid angle and for preventing that the beam with a high energy density impinges upon the wall of the light emission tube, the light emission tube has a tube wall, part of which is made to function as a focusing means, or the light emission tube has a focusing means at the inner surface thereof.

Abstract: A light source device wherein the high-temperature plasma state after the start of the lighting is maintained stably and the light emission can be maintained stably and a decrease of the lighting life cycle by means of a heating of the light emission tube is suppressed comprises a light emission tube, in which a light emitting means is enclosed, and a pulsed laser oscillator part emitting a pulsed laser beam towards said light emission tube, wherein a continuous-wave laser oscillator part is provided emitting a continuous-wave laser beam towards said light emission tube.

Abstract: An laser driven light source comprises a bulb that encloses a discharge medium, a laser beam unit for emitting a laser beam, wherein the laser beam is focused in the bulb for generating a discharge, and a beam shield element that is provided in the bulb to shield peripheral devices from the laser beam, which passes through the discharge generated in the bulb.

Abstract: A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.

Abstract: An exposure device for producing semiconductors and liquid crystals has an optical system capable of effectively using light generated without making a hole in a lamp discharge vessel when high energy laser light is supplied to it for emitting light, such as ultraviolet light. The exposure device has a light source for emitting ultraviolet light, a laser device for emitting laser light, an elliptical reflector for reflecting ultraviolet light emitted from the light source, and an optical system for directing light reflected by the elliptical reflector to an article to be treated via optical elements including a collimator lens and an integrator lens, and a beam splitter having a wavelength selecting ability provided in the optical path for light reflected by the elliptical reflector to allow laser light to be incident on the light source from and opening side of the elliptical reflector.