Abstract: Disclosed herein are an evolved gas analyzer and a method for analyzing evolved gas, the apparatus cooling a sample holder in a short time without using excessive cooling performance and without providing the entire apparatus in an excessively large size, thereby enhancing analysis work efficiency. The apparatus 200 includes: a sample holder 20 holding a sample S; a heating unit 10 receiving the sample holder therein, and evolving a gas component G by heating the sample; a detecting means 110 detecting the gas component; a sample holder supporting unit 204L movably supporting the sample holder to move the sample holder to predetermined outer and inner positions of the heating unit; and a cooling unit 30 provided at an outside of the heating unit, and cooling the sample holder by being in direct or indirect contact with the sample holder, when the sample holder is moved to a discharging position.

Abstract: Disclosed herein is a method for analyzing evolved gas and an evolved gas analyzer, the method correcting detection sensitivity differences in analysis devices, day-to-day variations thereof, thereby quantifying a measurement target with high accuracy. The method for analyzing evolved gas of the apparatus including: a sample holder; a heating unit evolving a gas component; an ion source generating ions by ionizing the gas component; a mass spectrometer detecting the gas component; and a gas channel through which mixed gas flows, the method including: operating a discharged flow rate controlling process of controlling a flow rate of the mixed gas discharged to outside; operating a sample holder cooling process of cooling the sample holder by bringing the sample holder into contact with a cooling unit; and operating a correction process including: correcting a mass spectrum position; calculating a sensitivity correction factor; and calculating a heating correction factor.

Abstract: A sample holder for X-ray analysis is provided with: a first annular member; a second annular member configured to be inserted and fitted into the first annular member in a state where a first film is sandwiched between the first annular member and the second annular member while the first film is being stretched to cover a lower opening portion of the second annular member; and a third annular member configured to be inserted and fitted into the second annular member in a state where a second film is sandwiched between the second annular member and the third annular member while the second film is being stretched to cover a lower opening portion of the third annular member. The first film and the second film are configured to hold a sample for X-ray analysis by sandwiching the sample between the first film and the second film.

Abstract: Disclosed herein are an evolved gas analyzer and a method for analyzing evolved gas, the apparatus cooling a sample holder in a short time without using excessive cooling performance and without providing the entire apparatus in an excessively large size, thereby enhancing analysis work efficiency. The apparatus 200 includes: a sample holder 20 holding a sample S; a heating unit 10 receiving the sample holder therein, and evolving a gas component G by heating the sample; a detecting means 110 detecting the gas component; a sample holder supporting unit 204L movably supporting the sample holder to move the sample holder to predetermined outer and inner positions of the heating unit; and a cooling unit 30 provided at an outside of the heating unit, and cooling the sample holder by being in direct or indirect contact with the sample holder, when the sample holder is moved to a discharging position.

Abstract: Disclosed herein is a method for analyzing evolved gas and an evolved gas analyzer, the method correcting detection sensitivity differences in analysis devices, day-to-day variations thereof, thereby quantifying a measurement target with high accuracy. The method for analyzing evolved gas of the apparatus including: a sample holder; a heating unit evolving a gas component; an ion source generating ions by ionizing the gas component; a mass spectrometer detecting the gas component; and a gas channel through which mixed gas flows, the method including: operating a discharged flow rate controlling process of controlling a flow rate of the mixed gas discharged to outside; operating a sample holder cooling process of cooling the sample holder by bringing the sample holder into contact with a cooling unit; and operating a correction process including: correcting a mass spectrum position; calculating a sensitivity correction factor; and calculating a heating correction factor.

Abstract: An X-ray fluorescence spectrometer includes: a sample stage configured to place a sample thereon; an X-ray source configured to irradiate the sample with primary X-rays; a detector, which is configured to detect fluorescent X-rays produced from the sample irradiated with the primary X-rays, and which includes an X-ray incident window formed by a window material through which fluorescent X-rays is transmittable; and a gas blowing mechanism configured to blow a gas to at least one of an outer surface of the X-ray incident window and the sample stage.

Abstract: A sample holder for X-ray analysis is provided with: a first annular member; a second annular member configured to be inserted and fitted into the first annular member in a state where a first film is sandwiched between the first annular member and the second annular member while the first film is being stretched to cover a lower opening portion of the second annular member; and a third annular member configured to be inserted and fitted into the second annular member in a state where a second film is sandwiched between the second annular member and the third annular member while the second film is being stretched to cover a lower opening portion of the third annular member. The first film and the second film are configured to hold a sample for X-ray analysis by sandwiching the sample between the first film and the second film.

Abstract: An X-ray fluorescence spectrometer includes: a sample stage configured to place a sample thereon; an X-ray source configured to irradiate the sample with primary X-rays; a detector, which is configured to detect fluorescent X-rays produced from the sample irradiated with the primary X-rays, and which includes an X-ray incident window formed by a window material through which fluorescent X-rays is transmittable; and a gas blowing mechanism configured to blow a gas to at least one of an outer surface of the X-ray incident window and the sample stage.

Abstract: A thermal analysis apparatus possesses has a cylindrical furnace tube axially inserted in a cylindrical heating furnace, and a pair of sample holders extending axially inside the furnace tube. The furnace tube is supported by two axially spaced groups of butting members, each group having three or more butting members that are disposed in circumferentially spaced-apart relationship on the outside of the furnace tube and that butt against the furnace tube to restrain positional deviation thereof in a radial direction while permitting expansion and contraction thereof in the axial direction during heating of the furnace tube by the heating furnace.

Abstract: A thermal analysis apparatus possesses a support base, a heating furnace which is approximately like a cylinder, and whose inside can be raised in its temperature, till a predetermined heating temperature, a heating furnace fixation part fixing the heating furnace to the support base, a furnace tube which is approximately like the cylinder, inserted through the heating furnace while having an interstice, and has been fixed in its base end part to the support base by a fixation member, a fixation means which makes the furnace tube capable of expanding or contracting in an axial direction, and positioning-fixes it in a radial direction, a sample holding means which holds a sample in an inside of a heating part of the furnace tube, that is a range capable of being heated by the heating furnace, and a temperature measurement means measuring a temperature change of the sample.

Abstract: The object of the present invention is to provide a wafer support mechanism for a sample stage that does not require a special drive source for attaching and detaching a wafer to be provided within a sample chamber so as to eliminate problems with lining up drive portions occurring as a result of the drive source being provided outside so as to provide a stable and reliable mechanism that is not restricted by problems regarding environment.