Patents by Inventor Toshitaka Miyata
Toshitaka Miyata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230307540Abstract: A semiconductor device comprises a transistor. The transistor includes: a gate insulating film formed on a semiconductor substrate; a gate electrode formed on the gate insulating film and containing germanium at least in an upper region of the electrode; a source region formed in the semiconductor substrate; and a drain region formed in the semiconductor substrate.Type: ApplicationFiled: August 30, 2022Publication date: September 28, 2023Applicant: Kioxia CorporationInventors: Tomoyuki FUNABASAMA, Toshitaka MIYATA
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Publication number: 20230088980Abstract: A semiconductor device includes a first region that contains a first conductive type impurity and is provided on a substrate, a second region that is provided in the first region and contains the first conductive type impurity at a higher concentration than the first region, a first structure that is provided on the substrate on one side of the second region in a first direction along the substrate and has a first sidewall at least on the second region side, a second structure that is provided on the substrate on the other side of the second region in the first direction and has a second sidewall at least on the second region side, and a contact that passes between the first and second sidewalls facing each other across the second region, extends to the second region, and is electrically connected to the second region.Type: ApplicationFiled: March 4, 2022Publication date: March 23, 2023Inventors: Shoji AOTA, Toshitaka MIYATA
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Publication number: 20210257446Abstract: According to a certain embodiment, the semiconductor device includes: a semiconductor region having a first conductivity type including a first surface; an insulating portion formed on the semiconductor region, and having a second surface moved backward in the depth direction of the semiconductor region more than the first surface; a first region disposed on the semiconductor region between a first portion and second portions of the insulating portion; a second region disposed on the semiconductor region between the first and second portions to be separated from the first region; a control electrode disposed above the first surface to be located between the first and second regions; a first electrode disposed on the first region so as to be contacted with the first region; and a first insulating film containing hafnium disposed on a side wall of the semiconductor region at a stepped portion between the first and second surfaces.Type: ApplicationFiled: September 4, 2020Publication date: August 19, 2021Applicant: KIOXIA CORPORATIONInventor: Toshitaka MIYATA
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Patent number: 9640629Abstract: According to one embodiment, a semiconductor device includes a substrate and a gate electrode. The gate electrode includes a first electrode formed on the substrate, the first electrode having a first conductive property, with a first insulating film between the first electrode and the substrate, and a second electrode formed on the substrate, the second electrode having a second conductive property different from the first conductive property, with a second insulating film between the second electrode and the substrate. The first electrode is formed in a rectangular shape having a hollow portion. A slit is formed in a side surface of the first electrode extending in a width direction of the gate electrode. The second electrode is formed in the slit and along the side surface of the first electrode that has the slit.Type: GrantFiled: August 31, 2016Date of Patent: May 2, 2017Assignee: KABUSHIKI KAISHA TOSHIBAInventor: Toshitaka Miyata
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Publication number: 20160240666Abstract: A device includes a first and a second semiconductor-layer. The second semiconductor-layer is on the first semiconductor-layer, and has a first and a second side-surface. A first gate-dielectric is on the first semiconductor-layer. A second gate-dielectric is on the first side-surface. A gate has a bottom surface facing the first semiconductor-layer, and a third side-surface facing the first side-surface. A first diffusion-layer of a first conductivity-type is in a region in the second semiconductor-layer on a side of the second side-surface, and forms a junction with a region in the second semiconductor-layer on a side of the first side-surface. A silicide is on the second side-surface. A source of the first conductivity-type is in the first semiconductor-layer on a side of the third side-surface. A drain layer of a second conductivity-type is in the first semiconductor-layer on a side of a fourth side-surface of the gate electrode.Type: ApplicationFiled: May 20, 2015Publication date: August 18, 2016Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Toshitaka MIYATA, Yoshiyuki KONDO
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Patent number: 9209286Abstract: According to one embodiment, the pair of semiconductor regions are provided respectively on a pair of side walls of the second semiconductor layer having the fin configuration to form tunnel junctions with the second semiconductor layer. The gate electrode is provided on two sides of the second semiconductor layer at the pair of side walls to oppose the tunnel junctions with the semiconductor regions interposed between the gate electrode and the tunnel junctions. The third semiconductor layer is separated from the second semiconductor layer and the semiconductor regions by the first semiconductor layer to be adjacent to the first semiconductor layer.Type: GrantFiled: November 12, 2013Date of Patent: December 8, 2015Assignee: KABUSHIKI KAISHA TOSHIBAInventor: Toshitaka Miyata
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Patent number: 9171951Abstract: According to one embodiment, a semiconductor device includes a drain region, a source region, a channel region, a first gate insulator film provided on the channel region, a second gate insulator film provided on the channel region to be adjacent to the first gate insulator film on the source region side of the first gate insulator film, a first gate electrode provided on the first gate insulator film, and a second gate electrode provided on the second gate insulator film. An electrical thickness of the second gate insulator film is less than an electrical thickness of the first gate insulator film. A portion of the first gate electrode is provided on the second gate insulator film. A work function of the second gate electrode is higher than a work function of the first gate electrode.Type: GrantFiled: July 16, 2014Date of Patent: October 27, 2015Assignee: KABUSHIKI KAISHA TOSHIBAInventor: Toshitaka Miyata
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Publication number: 20150263022Abstract: The peripheral transistor includes at least a first peripheral transistor and a second peripheral transistor. The first peripheral transistor and the second peripheral transistor each comprise: a first gate electrode formed on a gate insulating film; an inter-gate insulating film formed on a surface of the first gate electrode; a through-hole formed in the inter-gate insulating film; a connecting layer formed in the through-hole; and a second gate electrode formed on a surface of the inter-gate insulating film and connected to the first gate electrode via the connecting layer. The first gate electrode of the first peripheral transistor is configured by only a semiconductor layer of a first conductivity type. The first gate electrode of the second peripheral transistor comprises a first semiconductor layer of the first conductivity type and a second semiconductor layer of a second conductivity type aligned with the first semiconductor layer along a gate length direction.Type: ApplicationFiled: June 24, 2014Publication date: September 17, 2015Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Yukinori KOYAMA, Toshitaka Miyata
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Publication number: 20150263167Abstract: According to one embodiment, a semiconductor device includes a drain region, a source region, a channel region, a first gate insulator film provided on the channel region, a second gate insulator film provided on the channel region to be adjacent to the first gate insulator film on the source region side of the first gate insulator film, a first gate electrode provided on the first gate insulator film, and a second gate electrode provided on the second gate insulator film. An electrical thickness of the second gate insulator film is less than an electrical thickness of the first gate insulator film. A portion of the first gate electrode is provided on the second gate insulator film. A work function of the second gate electrode is higher than a work function of the first gate electrode.Type: ApplicationFiled: July 16, 2014Publication date: September 17, 2015Inventor: Toshitaka MIYATA
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Patent number: 9048267Abstract: A semiconductor device according to the present embodiment includes a semiconductor layer. A gate dielectric film is provided on a surface of the semiconductor layer. A gate electrode is provided on the semiconductor layer via the gate dielectric film. A drain layer of a first conductivity type is provided in a part of the semiconductor layer on a side of a first end of the gate electrode. A source layer of a second conductivity type is provided in a part of the semiconductor layer on a side of a second end of the gate electrode and below the gate electrode. The source layer has a substantially uniform impurity concentration at the part of the semiconductor layer below the gate electrode. Voltages of a same polarity are applied to the gate electrode and the drain layer.Type: GrantFiled: December 31, 2013Date of Patent: June 2, 2015Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Yoshiyuki Kondo, Masakazu Goto, Shigeru Kawanaka, Toshitaka Miyata
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Patent number: 9041056Abstract: According to one embodiment, a semiconductor device including: a substrate; a gate electrode formed above the substrate; a gate insulating film formed under the gate electrode; a channel layer formed under the gate insulating film by using a channel layer material; a source region and a drain region formed in the substrate so as to interpose the channel layer therebetween in a channel direction; and a source extension layer formed in the substrate between the channel layer and the source region so as to overlap a source-side end portion of the channel layer. The source extension layer forms a heterointerface with the channel layer. The heterointerface is a tunnel channel for carries.Type: GrantFiled: January 10, 2012Date of Patent: May 26, 2015Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Toshitaka Miyata, Kanna Adachi, Shigeru Kawanaka
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Patent number: 8993415Abstract: In a method, a gate dielectric film is formed on a semiconductor substrate. A gate electrode is formed on the gate dielectric film. Impurities of a first conduction-type are introduced into a drain-layer formation region. The impurities of the first conduction-type in the drain-layer formation region are activated by performing heat treatment. Single crystals of the semiconductor substrate in a source-layer formation region are amorphized by introducing inert impurities into the source-layer formation region. Impurities of a second conduction-type is introduced into the source-layer formation region. At least an amorphous semiconductor in the source-layer formation region is brought into a single crystal semiconductor and the impurities of the second conduction-type in the source-layer formation region is activated by irradiating the semiconductor substrate with microwaves.Type: GrantFiled: July 13, 2012Date of Patent: March 31, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Kiyotaka Miyano, Toshitaka Miyata
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Publication number: 20150076553Abstract: A semiconductor device according to the present embodiment includes a semiconductor layer. A gate dielectric film is provided on a surface of the semiconductor layer. A gate electrode is provided on the semiconductor layer via the gate dielectric film. A drain layer of a first conductivity type is provided in a part of the semiconductor layer on a side of a first end of the gate electrode. A source layer of a second conductivity type is provided in a part of the semiconductor layer on a side of a second end of the gate electrode and below the gate electrode. The source layer has a substantially uniform impurity concentration at the part of the semiconductor layer below the gate electrode. Voltages of a same polarity are applied to the gate electrode and the drain layer.Type: ApplicationFiled: December 31, 2013Publication date: March 19, 2015Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Yoshiyuki KONDO, Masakazu GOTO, Shigeru KAWANAKA, Toshitaka MIYATA
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Publication number: 20150060772Abstract: According to one embodiment, the pair of semiconductor regions are provided respectively on a pair of side walls of the second semiconductor layer having the fin configuration to form tunnel junctions with the second semiconductor layer. The gate electrode is provided on two sides of the second semiconductor layer at the pair of side walls to oppose the tunnel junctions with the semiconductor regions interposed between the gate electrode and the tunnel junctions. The third semiconductor layer is separated from the second semiconductor layer and the semiconductor regions by the first semiconductor layer to be adjacent to the first semiconductor layer.Type: ApplicationFiled: November 12, 2013Publication date: March 5, 2015Applicant: Kabushiki Kaisha ToshibaInventor: Toshitaka MIYATA
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Patent number: 8841191Abstract: In one embodiment, a semiconductor device includes a substrate, a gate insulator on the substrate, and a gate electrode on the gate insulator. The device further includes a source diffusion layer of a first conductivity type and a drain diffusion layer of a second conductivity type disposed on a surface of the substrate so as to sandwich the gate electrode. The device further includes a junction forming region disposed between the source diffusion layer and the drain diffusion layer so as to contact the source diffusion layer. The junction forming region includes a source extension layer of the first conductivity type, a pocket layer of the second conductivity type above the source extension layer, and a diffusion suppressing layer disposed between the source extension layer and the pocket layer and containing carbon so as to suppress diffusion of impurities between the source extension layer and the pocket layer.Type: GrantFiled: February 13, 2013Date of Patent: September 23, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Akira Hokazono, Yoshiyuki Kondo, Toshitaka Miyata
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Publication number: 20140175553Abstract: According to one embodiment, a MOS semiconductor device comprises a first gate insulating film formed on a region of part of a channel of a semiconductor substrate, in which a transistor is to be formed, a first gate electrode formed on the first gate insulating film, a second gate insulating film formed on remaining part of the channel, the second gate insulating film including an impurity added to the second gate insulating film to increase a threshold value of the channel immediately under the second gate insulating film, and a second gate electrode formed on the second gate insulating film.Type: ApplicationFiled: May 23, 2013Publication date: June 26, 2014Inventors: Toshitaka MIYATA, Masakazu GOTO, Akira HOKAZONO
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Publication number: 20140071742Abstract: According to one embodiment, a semiconductor memory device comprises a magnetoresistive element including a memory layer having a variable magnetization direction and made of a material which changes from ferromagnetism to paramagnetism when a voltage is applied, a reference layer having an invariable magnetization direction, and a tunnel barrier layer formed between the memory layer and the reference layer, a first interconnection electrically connected to one terminal of the magnetoresistive element, and a second interconnection electrically connected to the other terminal of the magnetoresistive element, and a third interconnection electrically insulated from the magnetoresistive element.Type: ApplicationFiled: March 15, 2013Publication date: March 13, 2014Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Toshitaka MIYATA, Jyunichi OZEKI
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Publication number: 20140054657Abstract: In one embodiment, a semiconductor device includes a substrate, a gate insulator on the substrate, and a gate electrode on the gate insulator. The device further includes a source diffusion layer of a first conductivity type and a drain diffusion layer of a second conductivity type disposed on a surface of the substrate so as to sandwich the gate electrode. The device further includes a junction forming region disposed between the source diffusion layer and the drain diffusion layer so as to contact the source diffusion layer. The junction forming region includes a source extension layer of the first conductivity type, a pocket layer of the second conductivity type above the source extension layer, and a diffusion suppressing layer disposed between the source extension layer and the pocket layer and containing carbon so as to suppress diffusion of impurities between the source extension layer and the pocket layer.Type: ApplicationFiled: February 13, 2013Publication date: February 27, 2014Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Akira HOKAZONO, Yoshiyuki KONDO, Toshitaka MIYATA
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Publication number: 20130075830Abstract: In a method, a gate dielectric film is formed on a semiconductor substrate. A gate electrode is formed on the gate dielectric film. Impurities of a first conduction-type are introduced into a drain-layer formation region. The impurities of the first conduction-type in the drain-layer formation region are activated by performing heat treatment. Single crystals of the semiconductor substrate in a source-layer formation region are amorphized by introducing inert impurities into the source-layer formation region. Impurities of a second conduction-type is introduced into the source-layer formation region. At least an amorphous semiconductor in the source-layer formation region is brought into a single crystal semiconductor and the impurities of the second conduction-type in the source-layer formation region is activated by irradiating the semiconductor substrate with microwaves.Type: ApplicationFiled: July 13, 2012Publication date: March 28, 2013Inventors: Kiyotaka MIYANO, Toshitaka MIYATA
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Publication number: 20130049122Abstract: In one embodiment, a semiconductor device includes a substrate, and a gate insulator disposed on the substrate. The device further includes a gate electrode including a first electrode layer which is disposed on an upper surface of the gate insulator and has a first work function, and a second electrode layer which is continuously disposed on the upper surface of the gate insulator and an upper surface of the first electrode layer and has a second work function that is different from the first work function, and sidewall insulators disposed on side surfaces of the gate electrode. A height of the upper surface of the first electrode layer is lower than a height of upper surfaces of the sidewall insulators.Type: ApplicationFiled: June 27, 2012Publication date: February 28, 2013Applicant: Kabushiki Kaisha ToshibaInventors: Toshitaka MIYATA, Nobutoshi Aoki