Abstract: The present invention provides a heater temperature control circuit including a heater and a control circuit that controls a temperature of the heater, wherein the control circuit includes a bridge circuit in which a first circuit and a second circuit are connected in parallel, and an operational amplifier connected to the bridge circuit, wherein in the first circuit, the heater and a resistor are connected in series, and a midpoint of the first circuit is connected to one input portion of the operational amplifier, and an output value Vout from the second circuit is input to the other input portion of the operational amplifier, the output value Vout being obtained by multiplying a division ratio of a target resistance value Rh of the heater and a resistance value R1 of the resistor with a reference voltage Vref of the bridge circuit.

Abstract: The present invention provides a heater temperature control circuit including a heater and a control circuit that controls a temperature of the heater, wherein the control circuit includes a bridge circuit in which a first circuit and a second circuit are connected in parallel, and an operational amplifier connected to the bridge circuit, wherein in the first circuit, the heater and a resistor are connected in series, and a midpoint of the first circuit is connected to one input portion of the operational amplifier, and an output value Vout from the second circuit is input to the other input portion of the operational amplifier, the output value Vout being obtained by multiplying a division ratio of a target resistance value Rh of the heater and a resistance value R1 of the resistor with a reference voltage Vref of the bridge circuit.

Abstract: In order to provide a hydrogen sensor for measuring a hydrogen concentration with high sensitivity and excellent mass-productivity, the hydrogen sensor includes: at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate; a hydrogen reaction catalytic layer including a platinum film of platinum black formed on both sides of the first quartz vibrator; and a hydrogen non-reactive layer formed in the second quartz vibrator, wherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increasing by heat of combustion caused by oxidization of hydrogen by the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.

Abstract: In order to provide a hydrogen sensor for measuring a hydrogen concentration with high sensitivity and excellent mass-productivity, the hydrogen sensor includes: at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate; a hydrogen reaction catalytic layer including a platinum film of platinum black formed on both sides of the first quartz vibrator; and a hydrogen non-reactive layer formed in the second quartz vibrator, wherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increasing by heat of combustion caused by oxidization of hydrogen by the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.

Abstract: There is provided a semiconductor memory which allows a redundant memory cell to be disposed at the center while maintaining the continuity of layout units of direct peripheral circuits and allows the total yield of the memory cell and the direct peripheral circuits to be improved. The inventive semiconductor memory is a 64 M-bits or 256 M-bits DRAM using a hierarchical word line structure or a multi-division bit line structure and comprises a main row decoder region, a main word driver region, a column decoder region, a peripheral circuit/bonding pad region, a memory cell array, a sense amplifier region, a sub-word driver region, intersection regions and the like formed on one semiconductor chip.

Abstract: There is provided a semiconductor memory which allows a redundant memory cell to be disposed at the center while maintaining the continuity of layout units of direct peripheral circuits and allows the total yield of the memory cell and the direct peripheral circuits to be improved. The inventive semiconductor memory is a 64 M-bits or 256 M-bits DRAM using a hierarchical word line structure or a multi-division bit line structure and comprises a main row decoder region, a main word driver region, a column decoder region, a peripheral circuit/bonding pad region, a memory cell array, a sense amplifier region, a sub-word driver region, intersection regions and the like formed on one semiconductor chip.

Abstract: There is provided a semiconductor memory which allows a redundant memory cell to be disposed at the center while maintaining the continuity of layout units of direct peripheral circuits and allows the total yield of the memory cell and the direct peripheral circuits to be improved. The inventive semiconductor memory is a 64 M-bits or 256 M-bits DRAM using a hierarchical word line structure or a multi-division bit line structure and comprises a main row decoder region, a main word driver region, a column decoder region, a peripheral circuit/bonding pad region, a memory cell array, a sense amplifier region, a sub-word driver region, intersection regions and the like formed on one semiconductor chip.

Abstract: There is provided a semiconductor memory which allows a redundant memory cell to be disposed at the center while maintaining the continuity of layout units of direct peripheral circuits and allows the total yield of the memory cell and the direct peripheral circuits to be improved. The inventive semiconductor memory is a 64 M-bits or 256 M-bits DRAM using a hierarchical word line structure or a multi-division bit line structure and comprises a main row decoder region, a main word driver region, a column decoder region, a peripheral circuit/bonding pad region, a memory cell array, a sense amplifier region, a sub-word driver region, intersection regions and the like formed on one semiconductor chip.

Abstract: A particle analyzer system that reduces size and cost, wherein particles are introduced into a cell, then the particles are irradiate in the cell with a laser beam, then atomic emission of the particles generated by the irradiation of the laser beam is transmitted, then a spectrum is obtained of the photo emission so transmitted, and the spectrum of the photo emission is detected and the wavelength of the laser beam is, other than the wavelength of the emission of the particles, is used to provide a filter to block the intrusion of the wavelength of the laser beam in a stage proceeding the photo emission.

Abstract: An encoder device of the absolute position type for outputting a shift position or angle of rotation relative to the absolute position. The device comprises a code plate having first and second grid patterns wherein information is stored as 1 or 0 in a periodic manner at pitches slightly different from each other; first and second sensory arrays for detecting the first and second grid patterns; driving means for driving the sensors relative to the grid patterns and for obtaining an alternating signal from each array; and computation means for measuring the phase angle of the alternating signal from each array, and the phase angle difference therebetween and for calculating the position using such phase angles. Advantageously, the invention is suitable for miniaturization due to its simplicity, relaibility, and efficiency.

Abstract: A quartz thermometer adapted to measure the ambient temperature through detection of a change in the resonance frequency of a quartz resonator due to change in the temperature, wherein a quartz wafer of 0.02 to 0.2 mm thickness is cut from a region of a quartz within -30.degree. to -70.degree. in terms of rotation angle about the X axis of the quartz thereby to form a quart resonator within a range of between -15.degree. to +15.degree. in terms of angle of rotation about the Z' axis within the plane of the quartz wafer; and wherein thin metallic films are formed on the surfaces of the resonator to serve as exciting electrodes. The resonator and electrodes are produced by photolithography and anisotropic quartz etching processes. The resulting quartz thermometer has a large first order temperature coefficient of frequency.

Abstract: A pressure measuring apparatus comprising a diaphragm to which pressure to be measured is applied and a resilient vibrator connected to the diaphragm, which acts to produce a signal based on its natural frequency relative to the pressure, wherein the diaphragm comprises a peripheral circumferential portion, a central fixing portion and a non-planar intermediate portion therebetween, with the central portion being connected to the vibrator and having its edge disposed at a non-perpendicular angle with respect to the vibrator area to which it is connected. The apparatus eliminates adverse influences due to initial distortion, hysteresis of the diaphragm and produces accurate measurements.

Abstract: A pressure sensor which detects delicate changes in pressure as small as 0.01 .mu.m water column by detecting displacement or torque in a movable plate. The sensor comprises a fixed plate in which slits are formed, a movable plate on which pressure to be measured is impressed, a supporting member which supports the movable plate at two points on a straight line passing through its center of gravity so as to enable the movable plate to rotate thereabout, and a detecting means for detecting displacement or torque in the movable plate. The different pressures act on the movable plate to cause the rotation thereof and the displacement or torque so that such displacement corresponds to the pressure difference.

Abstract: Herein disclosed is a mechanical vibrating element which can be used as a resonator made operative to resonate in a predetermined frequency, a filter having a frequency selecting property or an optical deflector adapted to be mechanically dislocated in accordance with an input signal for deflecting an optical beam. The mechanical vibrating element according to the present invention is characterized in that a single insulating substrate constructs a frame and a moving portion supported by the frame, in that the moving portion is formed with a conductive pattern or a coil, and in that an electric current is fed to the conductor or the coil, while appling a magnetic field in the same direction as the plane direction of the insulating substrate, so that the moving portions may be mechanically vibrated.

Abstract: A force transducer is provided comprising a vibrator having a pair of plate-shaped vibrating pieces parallel with each other, coupling pieces for joining the respective ends of the vibrating pieces, and attachment portions connected to the coupling pieces, exciting means for causing the vibrator to resonate, and sensing means for detecting the vibrations of the vibrator. An input force to be converted is applied in the longitudinal direction of the vibrating pieces. This force transducer is capable of converting an industiral process variable such as force, pressure, difference pressure, weight or level into a proportional frequency signal at a high efficiency.

Abstract: A device which detects a displaced position by generating an ultrasonic signal in a magnetostrictive wire and measuring the propagation time of the signal generated. The device includes an exciting means to generate an ultrasonic signal in a magnetostrictive wire, first and second receiving means to receive the ultrasonic signal generated in the magnetostrictive wire by the exciting means, a means for changing the distance between the exciting means and each of the first and second receiving means in accordance with a mechanical displacement, and a circuit means for producing a signal representative to the time periods required for the generated ultrasonic signal to reach the first and second receiving means.

Abstract: An isolator circuit of the type designed to accept an input current and to generate a corresponding output current which is isolated from the input. The isolator circuit is formed with a core developing a flux in response to the input current and having a feedback winding for carrying the isolated output current. A magneto-sensitive element, such as a Hall effect element, responds to flux in the core, and an amplifier receives the output of the magneto-sensitive element and supplies a current to the feedback winding so as to cancel the flux produced in the core due to the input current. Improved frequency response is attained by means of a compensation winding disposed to respond to the difference between the flux produced by the input current and the flux produced by the output current.