Abstract: A damping body for packaging includes, between an abutment adapted to abut against a precision substrate storage container upon packaging and an outer peripheral wall rising from an outer peripheral edge of a bottom part having the abutment, an outer peripheral bottom formed at a position distanced more from the abutment than is the precision substrate storage container, and a stepped part formed between the outer peripheral bottom and the abutment. Consequently, in the event of an impact from the outside, the stepped part collapses, so that the abutment favorably moves with respect to the outer peripheral bottom and thus can efficiently absorb the impact. This can prevent large impacts from instantaneously being exerted on the precision substrate storage container and efficiently damp drop impacts.

Abstract: A damping body for packaging includes, between an abutment adapted to abut against a precision substrate storage container upon packaging and an outer peripheral wall rising from an outer peripheral edge of a bottom part having the abutment, an outer peripheral bottom formed at a position distanced more from the abutment than is the precision substrate storage container, and a stepped part formed between the outer peripheral bottom and the abutment. Consequently, in the event of an impact from the outside, the stepped part collapses, so that the abutment favorably moves with respect to the outer peripheral bottom and thus can efficiently absorb the impact. This can prevent large impacts from instantaneously being exerted on the precision substrate storage container and efficiently damp drop impacts.

Abstract: A substrate storage container which includes: a front-opening box type container body for storing a multiple number of substrates in alignment therein; a door for opening and closing the open front of the container body in a sealing manner; and inner-pressure adjustment devices attached to the mounting ports in the container body and the door for adjusting the pressure inside the container body closed with the door. The inner-pressure adjustment device is configured of an elastic attachment cylinder, a filter support structure fitted into, and protected by, the attachment cylinder and a multiple number of filters held inside the filter support structure. Since the inner-pressure adjustment device can be set by mounting an attachment cylinder of a simple structure by use of elastic deformation to the attachment hole, which is provided for the container body and/or the door, there is no need of forming screw holes which need time and effort.

Abstract: A wafer storage container includes an outer peripheral portion located outside an outer peripheral edge of a wafer, and a placing portion which extends from a position lower than an uppermost surface of the outer peripheral portion to a radial inside of the wafer and on which the wafer is placed at a position lower than the uppermost surface of the outer peripheral portion. The placing portion includes a first inclined surface which descends toward the radial inside of the wafer and can be brought into contact with only the outer peripheral edge of the wafer when the wafer is placed and a second inclined surface which is on a rear side of the first inclined surface, ascends toward the radial inside of the wafer, and can be brought into contact with only the outer peripheral edge of a lower wafer when a plurality of wafer storage containers are stacked.

Abstract: A wafer storage container includes an outer peripheral portion located outside an outer peripheral edge of a wafer, and a placing portion which extends from a position lower than an uppermost surface of the outer peripheral portion to a radial inside of the wafer and on which the wafer is placed at a position lower than the uppermost surface of the outer peripheral portion. The placing portion includes a first inclined surface which descends toward the radial inside of the wafer and can be brought into contact with only the outer peripheral edge of the wafer when the wafer is placed and a second inclined surface which is on a rear side of the first inclined surface, ascends toward the radial inside of the wafer, and can be brought into contact with only the outer peripheral edge of a lower wafer when a plurality of wafer storage containers are stacked.

Abstract: A seal member for a substrate storage container disposed between an opening end portion of a container body and a cover, which container body and cover form the container and which container body has the opening end portion and stores substrates, is disclosed. The seal member comprises a base body section formed of a first material and a covering section formed of a second material and covering at least a part of the base body section, wherein the covering section includes a seal forming portion for forming a seal in contact with one of the container body and the cover.

Abstract: A presser member (1) of the present invention is formed of different materials for the contacting part (5) to press-hold the precision substrates (15) and for the parts other than the contacting part (5). The presser member (1) is shaped from a thermoplastic elastomer for a rectangular frame part, and the contacting part (5) has a pair of structuring parts (4) provided in such a fashion as to inwardly extend from each of a pair of oppositely facing sides. A second contacting part (11) is formed in the extension peripheral part extending via a supporting part (10). The other parts are shaped from a thermoplastic resin. The aforementioned contacting part (5) is provided with grooves of a V-shaped cross section with inclinations changed in the middle for receiving the peripheries of precision substrates (15), and V-grooves for press-holding the peripheries of precision substrates are provided in resilient pieces (12) separated and protruding in a comb teeth-like fashion to form the second contacting part (11).

Abstract: A substrate storage container which includes: a front-opening box type container body for storing a multiple number of substrates in alignment therein; a door for opening and closing the open front of the container body in a sealing manner; and inner-pressure adjustment devices attached to the mounting ports in the container body and the door for adjusting the pressure inside the container body closed with the door. The inner-pressure adjustment device is configured of an elastic attachment cylinder, a filter support structure fitted into, and protected by, the attachment cylinder and a multiple number of filters held inside the filter support structure. Since the inner-pressure adjustment device can be set by mounting an attachment cylinder of a simple structure by use of elastic deformation to the attachment hole, which is provided for the container body and/or the door, there is no need of forming screw holes which need time and effort.

Abstract: The presser member (1) of the present invention is shaped from different materials for the contacting part (5) to press-hold the precision substrates (15) and for the parts excepting the said contacting part (5). The presser member (1) is shaped from a thermoplastic elastomer for a rectangular frame part, a contacting part (5) formed in a pair of structuring parts (4) provided in such a fashion as to inwardly extend from each of a pair of oppositely facing two sides and a second contacting part (11) formed in the extension peripheral part extending via a supporting part (10), the other parts being shaped from a thermoplastic resin.

Abstract: A seal member (10) for a substrate storage container (20) disposed between an opening end portion of a container body (20a) and a cover (20b), which container body and cover form the container and which container body has the opening end portion and stores substrates, is disclosed. The seal member comprises a base body section (11) formed of a first material and a covering section (12) formed of a second material and covering at least a part of the base body section, wherein the covering section includes a seal forming portion for forming a seal in contact with one of the container body and the cover.

Abstract: A support device for a wafer shipping container, to constrain the flexure of a multiple number of backgrind-processed wafers when the wafers are stored in alignment in the wafer shipping container. For this support device, stoppers are projected inwards from the front and rear sides of a container body as a part of the wafer shipping container. The support device is comprised of: a pair of opposing walls, which are positioned on the bottom side of the container body and inserted into, and fixed by, the stoppers; a pair of connecting bars across the spacing between the paired opposing walls; a multiple number of partitioning supporters arranged with a predetermined pitch in the longitudinal direction of the paired connecting bars. The wafers are inserted and held between adjoining partitioning supporters, whereby they are prevented from flexing.

Abstract: A support device for a wafer shipping container, to constrain the flexure of a multiple number of backgrind-processed wafers when the wafers are stored in alignment in the wafer shipping container. For this support device, stoppers are projected inwards from the front and rear sides of a container body as a part of the wafer shipping container. The support device is comprised of: a pair of opposing walls, which are positioned on the bottom side of the container body and inserted into, and fixed by, the stoppers; a pair of connecting bars across the spacing between the paired opposing walls; a multiple number of partitioning supporters arranged with a predetermined pitch in the longitudinal direction of the paired connecting bars. The wafers are inserted and held between adjoining partitioning supporters, whereby they are prevented from flexing.

Abstract: Proposed is a box container suitable for holding and transporting a plural number of sheet-like bodies such as lead frames for semiconductor devices such as ICs. The box container consists of three parts including (a) an inner box member to hold the sheet bodies, (b) a box tray member into which the inner box member is inserted and (c) a covering member to be engaged with the box tray member.

Abstract: A wafer basket which is provided with a new type of locking and unlocking device for locking the top lid to the main body of the outer box and unlocking the same, wherein it is possible to unlock it by merely pressing a part of the locking and unlocking device inwardly; furthermore, the top lid and the bottom of the main body are shaped such that they fit and engage with each other.

Abstract: A wafer basket having a detachable wafer press means on the back face of the top lid, which resilient press strips are bent and capable of temporarily changing the bent angles in response to external shocks such that the free end of each press strip at which each strip presses on the wafer stays immobile with respect to the edge of the wafer.

Abstract: A container of substantially rectangular cross section is formed of synthetic resin and comprises a container body and a lid member to be detachably mounted to the container body. The container body is provided with longitudinal and lateral side walls and a bottom wall and is capable of being molded as a single piece and thereafter foldable into a container. A locking device for locking the container body and the lid member is located on an outer surface of a side wall of the container body and on a corresponding inner surface of a side wall of the lid. The locking member comprises projections extending outwardly from outer surfaces of the lateral side walls of the container body and corresponding recesses extending inwardly from inner surfaces of the lateral side walls of the lid member.

Abstract: The holder tray for compact disc of the invention has a disc-engagement structure capable of holding a disc mounted thereon very reliably still with little resistance against demounting of the disc therefrom. The disc-engagement structure has a center pushing part raised above the center opening and connected with a plurality of radially arranged connecting pieces each in a cranked confuguration connecting the central pushing part and the periphery of the center opening, the riser parts collectively forming a cylindrical surface to contact with the inner periphery of the center hole of a compact disc mounted thereon. Further, a plurality of radially arranged flap pieces extend from the center pushing part each in a cantilever-like manner and each between two connecting pieces and, when the pushing part is pushed down, the free ends of the flap pieces are raised so as to push up the disc facilitating demounting thereof.