Abstract: A thin plate storage transport system including a pressure container for containing a thin plate provided with a container main body for containing one or a plurality of thin plates, a lid body attached by covering the container main body, and a seal for airtightly isolating a containing space formed inside from an outside environment when the container main body is closed and covered by the lid body; and a pressure supply device for setting a pressure inside the containing space at a set pressure higher than an outside pressure by supplying a pressure into the containing space of the pressure container for containing a thin plate. As a result, the inside of the containing space can be kept at high cleanliness for a long time.

Abstract: To provide a glass substrate storage case capable of preventing quality deterioration of a glass substrate, a glass substrate transfer apparatus automatically transferring a glass substrate from the glass substrate storage case to another case; a glass substrate management apparatus managing glass substrates individually, a glass substrate distribution method for trading a glass substrate while storing the glass substrate in a specialized glass substrate storage case, a sealing member improving a sealing effect, and a sealing structure using the sealing member.

Abstract: A registration system for registering a target registration object with respect to a predetermined reference position by using a registration mark formed on the target registration object includes the intensity measurement step of receiving a mark image for a predetermined period of time by a storage type sensor while an area of the target registration object which includes the mark is illuminated, the storage type sensor having elements whose positional relationship is known with respect to the mark image, the process of obtaining a center position of the mark image on the storage type sensor in a positioning direction in accordance with outputs from the elements of the storage type sensor obtained in the intensity measurement step, the distance calculation step of calculating a distance between the reference position and the center position obtained by the process, and the moving step of moving the target registration object by a distance corresponding to the distance obtained in the distance calculation st

Abstract: A robot hand and a robot using it are provided. The robot hand has a finger-tip tactile sensor device, a palm tactile sensor device, and a tip contact force detecting device. Among them, the finger-tip tactile sensor device 10 has an elastic cap 14, in which a cavity 15 is formed with an opening 17a at a base end. The cavity is filled up with an incompressible fluid. A pressure detector 16 is inserted into the opening 17a of the cavity 17, and a holding member 18 holds the elastic cap 14 and the pressure detector 16. The holding member 18 is swingably mounted on a finger 1 of robot hand through a joint 2. When the elastic cap 14 contacts with an object, the contact pressure is detected through the incompressible fluid by the pressure detector 16.

Abstract: An optical fiber sensor, which has a detector section connected in a single optical path made of an optical-fiber cable and having a light-modulating element and an optical element connected in series. The light-modulating element has its birefringence degree changed in accordance with the physical quantity to be sensed, thereby to modulate the polarization state of the physical quantity. The optical element converts the polarization state of the physical quantity into the intensity of light. The sensor further comprises two light sources, which apply two light beams having different wavelengths .lambda..sub.1 and .lambda..sub.2 to one end of the optical path. The intensities P.sub.1 and P.sub.2 of the beams of the wavelengths .lambda..sub.1 and .lambda..sub.2, both emitted from the other end of the optical path, are detected. The intensities .lambda..sub.1 and .lambda..sub.