Patents by Inventor Toshiya Umeki
Toshiya Umeki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11043401Abstract: A ceramic heater includes an RF plate having a placement surface on which a wafer is to be placed, and made of a ceramic sintered body in which an RF electrode is embedded; and a heater plate made of a ceramic sintered body in which a heater is embedded, the RF plate and the heater plate being joined with a space interposed therebetween on a side opposite to the placement surface. The relationship among a minimum height H (mm) of the space in a direction perpendicular to the placement surface, a proportion A of a total area of portions where the RF plate and the heater plate are joined, with respect to an area of a plane along the placement surface that is defined by an outer edge of the placement surface, and a distance D (mm) between the RF electrode and the heater, satisfies H/A?1000 and H/A+(D?H)/(1?A)?14.Type: GrantFiled: March 30, 2018Date of Patent: June 22, 2021Assignee: NGK SPARK PLUG CO., LTD.Inventors: Toshiya Umeki, Tetsuo Kitabayashi
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Patent number: 11004715Abstract: A substrate supporting device having a feeder structure that enables a large number of electrodes to be successfully supplied with power. A ceramic heater 100 includes a base 10 having an upper surface as a support surface on which a substrate is supported, electrodes 20 embedded in the base 10, a base-supporting member 30 that is mounted on a lower surface of the base 10 and that is formed of a heat insulating material, and feeder rods 40 that extend through respective through-holes 35 formed in a circumferential wall 34 of the base-supporting member 30 and extending in the vertical direction and that are electrically connected to the electrodes 20.Type: GrantFiled: February 6, 2017Date of Patent: May 11, 2021Assignee: NGK SPARK PLUG CO., LTD.Inventors: Noriaki Tokusho, Shunichi Sasaki, Tomohiro Ishino, Hisanori Aoyama, Makoto Hino, Kenichi Fukazawa, Atsushi Tsuchida, Toshiya Umeki
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Patent number: 10879089Abstract: Disclosed is a ceramic heater, which includes: a disc-shaped ceramic substrate with top and bottom surfaces; and a planar electrode and first and second heating resistors embedded in the ceramic substrate in this order from top to bottom. In top view, the first heating resistor has: a planer first resistive portion arranged inside a first imaginary circle defined by an outermost circumferential contour of the planer electrode; a linear or strip-shaped second resistive portion arranged outward of the first resistive portion in a radial direction of the ceramic substrate and extending along a circumferential direction of the ceramic substrate; and a connecting portion connecting the first and second resistive portions to each other; and the second heating resistor is arranged inside a second imaginary circle defined by an innermost circumferential contour of the second resistive portion.Type: GrantFiled: April 26, 2019Date of Patent: December 29, 2020Assignee: NGK SPARK PLUG CO., LTD.Inventor: Toshiya Umeki
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Publication number: 20190341279Abstract: Disclosed is a ceramic heater, which includes: a disc-shaped ceramic substrate with top and bottom surfaces; and a planar electrode and first and second heating resistors embedded in the ceramic substrate in this order from top to bottom. In top view, the first heating resistor has: a planer first resistive portion arranged inside a first imaginary circle defined by an outermost circumferential contour of the planer electrode; a linear or strip-shaped second resistive portion arranged outward of the first resistive portion in a radial direction of the ceramic substrate and extending along a circumferential direction of the ceramic substrate; and a connecting portion connecting the first and second resistive portions to each other; and the second heating resistor is arranged inside a second imaginary circle defined by an innermost circumferential contour of the second resistive portion.Type: ApplicationFiled: April 26, 2019Publication date: November 7, 2019Inventor: Toshiya UMEKI
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Publication number: 20180308722Abstract: A ceramic heater includes an RF plate having a placement surface on which a wafer is to be placed, and made of a ceramic sintered body in which an RF electrode is embedded; and a heater plate made of a ceramic sintered body in which a heater is embedded, the RF plate and the heater plate being joined with a space interposed therebetween on a side opposite to the placement surface. The relationship among a minimum height H (mm) of the space in a direction perpendicular to the placement surface, a proportion A of a total area of portions where the RF plate and the heater plate are joined, with respect to an area of a plane along the placement surface that is defined by an outer edge of the placement surface, and a distance D (mm) between the RF electrode and the heater, satisfies H/A?1000 and H/A+(D?H)/(1?A)?14.Type: ApplicationFiled: March 30, 2018Publication date: October 25, 2018Inventors: Toshiya UMEKI, Tetsuo KITABAYASHI
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Publication number: 20180204754Abstract: A substrate supporting device having a feeder structure that enables a large number of electrodes to be successfully supplied with power. A ceramic heater 100 includes a base 10 having an upper surface as a support surface on which a substrate is supported, electrodes 20 embedded in the base 10, a base-supporting member 30 that is mounted on a lower surface of the base 10 and that is formed of a heat insulating material, and feeder rods 40 that extend through respective through-holes 35 formed in a circumferential wall 34 of the base-supporting member 30 and extending in the vertical direction and that are electrically connected to the electrodes 20.Type: ApplicationFiled: February 6, 2017Publication date: July 19, 2018Applicant: NGK SPARK PLUG CO., LTD.Inventors: Noriaki TOKUSHO, Shunichi SASAKI, Tomohiro ISHINO, Hisanori AOYAMA, Makoto HINO, Kenichi FUKAZAWA, Atsushi TSUCHIDA, Toshiya UMEKI
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Publication number: 20120273133Abstract: An object of this invention is to provide a surface protective film which is capable of suppressing the entry of a corrosive gas as compared with conventional surface protective films. A surface protective film according to this invention is a film which contains yttria (Y2O3) as a main component and also contains cerium. Since the surface protective film contains cerium, defects such as micropores in the film are reduced, thereby enabling suppression of the entry of a corrosive gas.Type: ApplicationFiled: November 9, 2010Publication date: November 1, 2012Inventors: Tadahiro Ohmi, Toshiya Umeki, Isao Akutsu
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Publication number: 20080032115Abstract: A corrosion-resistant member used in a corrosive environment includes a substrate, and a ceramic sprayed film, which covers a part or all of the substrate surface and has relative density of 80% or greater. Maximum diameter of voids existing in the ceramic sprayed film surface is 25 ?m or less. This corrosion-resistant member is obtained by using Y2O3 as a material having a bulk density of at least 1.5 g/cm3 and dried to a moisture content of 1 mass percent or less and spraying plasma on the substrate with an output power of 40 to 110 kW by a spraying device including two anode torches.Type: ApplicationFiled: September 30, 2005Publication date: February 7, 2008Applicant: NIHON CERATEC CO., LTD.Inventors: Toshiya Umeki, Makoto Sakamaki, Hiromichi Otaki