Abstract: Disclosed herein is a method that includes forming a gate trench in a semiconductor substrate, forming a gate insulating film on an inner wall of the gate trench, forming a gate electrode in the gate trench via the gate insulating film, ashing a top surface of the gate electrode to form a first insulating film, and forming a gate cap insulating film embedded in the gate trench to cover the first insulating film.

Abstract: Disclosed herein is an apparatus that includes a semiconductor substrate having source/drain regions and a gate trench located between the source/drain regions; and a gate electrode embedded in the gate trench via a gate insulating film. The gate electrode includes a first polycrystalline silicon film located at a bottom of the gate trench and a metal film stacked on the first polycrystalline silicon film. The first polycrystalline silicon film is doped with boron.

Abstract: An apparatus includes: a semiconductor substrate; an isolation region in the semiconductor substrate, the isolation region including an isolation trench filled with an insulating material therein; a plurality of island-shaped active regions in the semiconductor substrate surrounded by the isolation region; and a buried word-line having a bottom, the buried word-line at least passing across the isolation region between the plurality of active regions; wherein the isolation trench includes upper, middle and lower portions, each of the upper and lower portions has a substantially flat surface and the middle portion has a bulged surface.

Abstract: An apparatus includes: a semiconductor substrate; an isolation region in the semiconductor substrate, the isolation region including an isolation trench filled with an insulating material therein; a plurality of island-shaped active regions in the semiconductor substrate surrounded by the isolation region; and a buried word-line having a bottom, the buried word-line at least passing across the isolation region between the plurality of active regions; wherein the isolation trench includes upper, middle and lower portions, each of the upper and lower portions has a substantially flat surface and the middle portion has a bulged surface.

Abstract: An apparatus includes a semiconductor substrate; a line-shaped trench in the semiconductor substrate, an inner wall of the line-shaped trench being covered with an insulating film; a first conductive member including first and second line-shaped portions, the first line-shaped portion filling a lower portion of the line-shaped trench; and line-shaped second and third conductive members extending along the inner wall of the line-shaped trench and facing each other, the line-shaped second and third conductive members having a void therebetween; wherein the second line-shaped portion of the first conductive member protrudes from a central portion of the first line-shaped portion to fill the void.

Abstract: Disclosed herein is a method that includes forming a gate trench in a semiconductor substrate, forming a gate insulating film on an inner wall of the gate trench, forming a gate electrode in the gate trench via the gate insulating film, ashing a top surface of the gate electrode to form a first insulating film, and for a gate cap insulating film embedded in the gate trench to cover the first insulating film.

Abstract: A semiconductor memory device includes a memory cell region; a memory mat end region; a memory mat including the memory cell region and the memory mat region; a plurality of first silicon regions arranged in the memory cell region; a second silicon region arranged in the memory mat end region; a first conductive layer provided in the memory cell region and the memory mat end region; and wherein upper surface position of the second silicon region in the memory mat end region is higher than the upper surface position of the first silicon region in the memory cell region; and wherein the upper surface position of the first conductive layer in the memory mat end region is higher than the upper surface position of the first conductive layer in the memory cell region.

Abstract: A semiconductor memory device includes a memory cell region; a memory mat end region; a memory mat including the memory cell region and the memory mat region; a plurality of first silicon regions arranged in the memory cell region; a second silicon region arranged in the memory mat end region; a first conductive layer provided in the memory cell region and the memory mat end region; and wherein upper surface position of the second silicon region in the memory mat end region is higher than the upper surface position of the first silicon region in the memory cell region; and wherein the upper surface position of the first conductive layer in the memory mat end region is higher than the upper surface position of the first conductive layer in the memory cell region.

Abstract: In a first method for manufacturing a semiconductor device, an opening is formed in a substrate. A tungsten film is formed on the substrate so as to fill up inside the opening, and then the tungsten film is annealed. The tungsten film is etched back so that the tungsten film remains inside the opening. In a second method for manufacturing a semiconductor device, a laminate body comprising a tungsten film and an insulating film on the tungsten film is formed on a substrate. The laminate body is annealed, and then the laminate body is etched back.