Patents by Inventor Toshiyuki Hosoi

Toshiyuki Hosoi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma treatment apparatus and electrode used for the same
    Publication number: 20010014374
    Abstract: An electrode used for plasma treatment includes a conductive support and an insulator provided on the upper surface of the support. The upper surface of the support is divided into a first portion upon which a semiconductor substrate to be treated is mounted, and a second portion around the first portion. The insulator covers at least a part of the second portion of the upper surface of the support.
    Type: Application
    Filed: February 8, 2001
    Publication date: August 16, 2001
    Inventors: Nobuhisa Kumamoto, Takahiro Arakawa, Hiroshi Oka, Toshiyuki Hosoi