Patents by Inventor Toshiyuki Iwaki

Toshiyuki Iwaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor integrated circuit device and method of manufacturing the same
    Patent number: 6576509
    Abstract: In forming a plug 21 of a polycrystalline silicon film in a contact hole 19 to which a bit line BL is connected, the upper surface of the plug 21 is retracted downward from the upper edge of the contact hole 19, and a plug 22 of a laminate of a TiN film 26 and a W film 27 is formed on the plug 21. Then, the W film deposited on the contact hole 19 is patterned to form a bit line BL having a width narrower than the diameter of the contact hole 19. Here, the W film 27 constituting part of the plug 22 in the contact hole 19 is etched, but the TiN film 26 constituting another part of the plug 22 is not almost etched.
    Type: Grant
    Filed: August 16, 2000
    Date of Patent: June 10, 2003
    Assignees: Hitachi Ltd., Hitachi ULSI Engineering Systems Co., Ltd.
    Inventors: Shigeya Toyokawa, Takashi Hashimoto, Kenichi Kuroda, Shoji Yoshida, Toshiyuki Iwaki, Masamichi Matsuoka