Patents by Inventor Toshiyuki Kawahara

Toshiyuki Kawahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reflective mask blank for EUV lithography
    Patent number: 11982935
    Abstract: A reflective mask blank for EUV lithography includes a substrate and, formed on or above the substrate in the following order, a reflective layer for reflecting EUV light, a protective layer for the reflective layer, an absorption layer for absorbing EUV light, and a hard mask layer. The protective layer contains ruthenium (Ru), the absorption layer contains tantalum (Ta), the hard mask layer contains chromium (Cr) and at least one of nitrogen (N) and oxygen (O), and the hard mask layer has a film density of from 3.00 g/cm3 to 5.40 g/cm3.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: May 14, 2024
    Assignee: AGC INC.
    Inventors: Hirotomo Kawahara, Hiroshi Hanekawa, Toshiyuki Uno, Masafumi Akita
  • Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same
    Patent number: 11953822
    Abstract: The present invention relates to a reflective mask blank for EUV lithography, including: a substrate, a multilayer reflective film reflecting EUV light, and a phase shift film shifting a phase of the EUV light, in which the substrate, the multilayer reflective film, and the phase shift film are formed in this order, the phase shift film includes a layer 1 including ruthenium (Ru) and nitrogen (N), and the layer 1 has an absolute value of a film stress of 1,000 MPa or less.
    Type: Grant
    Filed: May 18, 2023
    Date of Patent: April 9, 2024
    Assignee: AGC INC.
    Inventors: Hirotomo Kawahara, Daijiro Akagi, Hiroaki Iwaoka, Toshiyuki Uno, Michinori Suehara, Keishi Tsukiyama
  • Sheet for portable information terminal
    Patent number: D705362
    Type: Grant
    Filed: March 20, 2012
    Date of Patent: May 20, 2014
    Assignee: Sony Computer Entertainment Inc.
    Inventors: Satoshi Satake, Toshiyuki Kawahara, Daikichi Watanabe, Tetsugoro Ihara
  • Sheet for portable information terminal
    Patent number: D709960
    Type: Grant
    Filed: March 20, 2012
    Date of Patent: July 29, 2014
    Assignee: Sony Computer Entertainment Inc.
    Inventors: Satoshi Satake, Toshiyuki Kawahara, Daikichi Watanabe, Tetsugoro Ihara