Abstract: The present invention provides a technology capable of inhibiting, in a vacuum processing apparatus that conveys a plurality of substrate holders along a conveying path formed to have a projected shape on a vertical surface, the projected shape being a continuous ring shape, dust from being generated during conveyance of a substrate holder. The present invention includes, in a vacuum chamber 2, an anti-sag member 35 assembled to a first drive unit 36 provided on an outer side with respect to a conveying direction of the conveying path, the vacuum chamber 2 including a conveying path formed to have a projected shape on the vertical surface, the projected shape being a continuous ring shape, a single vacuum atmosphere being formed in the vacuum chamber 2.

Abstract: The present invention provides a technology capable of inhibiting, in a vacuum processing apparatus that conveys a plurality of substrate holders along a conveying path formed to have a projected shape on a vertical surface, the projected shape being a continuous ring shape, dust from being generated during conveyance of a substrate holder. The present invention includes, in a vacuum chamber 2, an anti-sag member 35 assembled to a first drive unit 36 provided on an outer side with respect to a conveying direction of the conveying path, the vacuum chamber 2 including a conveying path formed to have a projected shape on the vertical surface, the projected shape being a continuous ring shape, a single vacuum atmosphere being formed in the vacuum chamber 2.

Abstract: A vacuum apparatus, which conveys a large-sized substrate and saves space, is provided. The vacuum apparatus of the present invention comprises pluralities of lower rollers, pressing rollers and pressing mechanisms. Since the substrate is sandwiched by the lower rollers and the pressing rollers at a position between the conveying roller and the conveying roller, the substrate does not fall down. The substrate contacts the pressing rollers and pushes the pressing roller back, and is sandwiched between the pressing roller and the lower roller, so that the substrate is not damaged when sandwiched.

Abstract: A vacuum apparatus, which conveys a large-sized substrate and saves space, is provided. The vacuum apparatus of the present invention comprises pluralities of lower rollers, pressing rollers and pressing mechanisms. Since the substrate is sandwiched by the lower rollers and the pressing rollers at a position between the conveying roller and the conveying roller, the substrate does not fall down. The substrate contacts the pressing rollers and pushes the pressing roller back, and is sandwiched between the pressing roller and the lower roller, so that the substrate is not damaged when sandwiched.