Patents by Inventor Toshiyuki Makiya
Toshiyuki Makiya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7479619Abstract: The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.Type: GrantFiled: July 17, 2006Date of Patent: January 20, 2009Assignee: Tokyo Electron LimitedInventors: Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Tomohisa Shimazu, Kazuhide Hasebe, Hiroyuki Yamamoto, Yukimasa Saito, Kenichi Yamaga
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Patent number: 7144823Abstract: The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.Type: GrantFiled: September 27, 2002Date of Patent: December 5, 2006Assignee: Tokyo Electron LimitedInventors: Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Tomohisa Shimazu, Kazuhide Hasebe, Hiroyuki Yamamoto, Yukimasa Saito, Kenichi Yamaga
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Patent number: 7141765Abstract: A antireflective film 50 is formed on a thermocouple 42 arranged in a processing vessel 1 of a heat treatment apparatus in order to improve the transient response characteristics of the thermocouple 42. In a typical embodiment, the thermocouple 42 is made by connecting a platinum wire 43A and a platinum-rhodium alloy wire 43B, and the antireflective film 50 is composed by stacking a silicon nitride layer 50C, silicon layer 50B and a silicon nitride layer 50A in that order.Type: GrantFiled: March 20, 2002Date of Patent: November 28, 2006Assignee: Tokyo Electron LimitedInventors: Toshiyuki Makiya, Takanori Saito, Karuki Eickmann, Sanjeev Kaushal, Anthony Dip, David L. O'meara
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Publication number: 20060258170Abstract: The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.Type: ApplicationFiled: July 17, 2006Publication date: November 16, 2006Inventors: Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Tomohisa Shimazu, Kazuhide Hasebe, Hiroyuki Yamamoto, Yukimasa Saito, Kenichi Yamaga
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Publication number: 20050028738Abstract: The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.Type: ApplicationFiled: September 27, 2002Publication date: February 10, 2005Inventors: Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Tomohisa Shimazu, Kazuhide Hasebe, Hiroyuki Yamamoto, Yukimasa Saito, Kenichi Yamaga
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Publication number: 20040115585Abstract: A antireflective film 50 is formed on a thermocouple 42 arranged in a processing vessel 1 of a heat treatment apparatus in order to improve the transient response characteristics of the thermocouple 42. In a typical embodiment, the thermocouple 42 is made by connecting a platinum wire 43A and a platinum-rhodium alloy wire 43B, and the antireflective film 50 is composed by stacking a silicon nitride layer 50C, silicon layer 50B and a silicon nitride layer 50A in that order.Type: ApplicationFiled: September 29, 2003Publication date: June 17, 2004Inventors: Toshiyuki Makiya, Takanori Saito, Karuki Eickmann, Sanjeev Kaushai, Anthony Dip, David L. O'meara
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Patent number: 6515264Abstract: A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.Type: GrantFiled: June 14, 2002Date of Patent: February 4, 2003Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Shigeru Yamamura, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
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Publication number: 20020162835Abstract: A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.Type: ApplicationFiled: June 14, 2002Publication date: November 7, 2002Applicant: TOSHIBA CERAMICS CO., LTDInventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Shigeru Yamamura, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
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Patent number: 6444940Abstract: The heat treatment apparatus has the reaction vessel and the holding tool contained in the reaction vessel for holding a plurality of objects to be processed. The lower end of the reaction vessel is closed by the cover and the insulating unit is installed between the cover and the holding tool. On the top of the insulating unit, the heating unit having a heating resistor composed of a carbon material of high-purity sealed in a quartz plate is installed. Heat insulators are installed under the heating unit. The insulating unit is fixed to the cover, and the revolving shaft for rotating the holding tool passes in the center of the insulating unit, and the electric feeding line member for feeding electric power to the heating unit is arranged outside of the insulating unit.Type: GrantFiled: July 30, 2001Date of Patent: September 3, 2002Assignee: Tokyo Electron LimitedInventors: Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
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Patent number: 6407371Abstract: A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.Type: GrantFiled: December 1, 1999Date of Patent: June 18, 2002Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Shigeru Yamamura, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
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Patent number: 6204488Abstract: A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.Type: GrantFiled: November 30, 1999Date of Patent: March 20, 2001Assignees: Toshiba Ceramics Co., Ltd, Tokyo Electron LimitedInventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Sunao Seko, Hideyuki Yokoyama, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
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Patent number: 6043468Abstract: A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.Type: GrantFiled: July 31, 1998Date of Patent: March 28, 2000Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Eiichi Toya, Masahiko Ichishima, Tomio Konn, Tomohiro Nagata, Shigeru Yamamura, Norihiko Saito, Kouji Teraoka, Takeshi Inaba, Hiroyuki Honma, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya