Abstract: A processing machine includes a chuck table, a chuck table cover having an opening through which a holding surface of the chuck table can protrude, a processing unit having a spindle, a spindle housing, and a mount portion arranged on a lower end portion of the spindle, the processing unit being configured to process a workpiece by a processing tool mounted on a lower part of the mount portion, a processing chamber construction cover that covers the chuck table and the mount portion. The processing machine further includes a processing tool cover that is secured to a lower end portion of the spindle housing and that has an upper wall and a side wall that extends downwardly from the upper wall. The processing tool cover is disposed inside the processing chamber construction cover and covers the processing tool from above and sides by the upper and side walls.

Abstract: A polishing apparatus includes a chuck table, a rotation mechanism that rotates the chuck table around a predetermined rotation axis, a polishing unit that has a spindle and in which a polishing pad for polishing the wafer sucked and held by the holding surface is mounted on a lower end part of the spindle, a slurry supply unit, and a cleaning unit that cleans the holding surface. The cleaning unit has a cleaning abrasive stone for removing the slurry that adheres to the holding surface through getting contact with the holding surface and a positioning unit that positions the cleaning abrasive stone to a cleaning position at which the cleaning abrasive stone gets contact with the holding surface and an evacuation position at which the cleaning abrasive stone is separate from the holding surface. Hardness of the cleaning abrasive stone is lower than the hardness of the holding surface.

Abstract: A magnetic detector includes permanent magnets that magnetize a wire rope W in the longitudinal direction, and a search coil that detects a change in the cross sectional area of the wire rope W magnetized by the permanent magnets. The magnetic detector is provided so as to surround a part of the wire rope W. Prior to inspection, the magnetic detector is moved back and forth at least three times across an inspection range of the wire rope W. After the magnetic detector is moved back and forth, the change in the cross sectional area, that is, damage to the wire rope W is inspected by using signals outputted from the search coil.

Abstract: A grinding apparatus has a hermetically sealed chamber defined by a portion of a holding surface which extends radially outwardly from a wafer, an outer wall surface of a first annular packing, a lower surface of a plate, and an inner wall surface of a second annular packing. A negative pressure is developed by suction forces applied from the holding surface, allowing the atmospheric pressure to press the plate toward the holding surface and causing the first annular packing to press an outer circumferential portion of the wafer against the holding surface. Since the outer circumferential portion of the wafer is pressed against the holding surface under the suction forces from the holding surface and the atmospheric pressure, the forces pressing the outer circumferential portion of the wafer against the holding surface are increased easily at a low cost without increasing the size and weight of the grinding apparatus.

Abstract: A tension measuring method installs a reel having a cylindrical coil forming part on a cable to be measured, forms a coil by winding a conductor around the coil forming part, measures a magnetic hysteresis loop of the cable by supplying a current to the coil to generate a magnetic field, and computes a tension of the cable using a parameter determined from the hysteresis loop. A magnetic field sensor and a magnetic flux sensor are provided inside a through hole in the coil forming part, and the cable is positioned inside the through hole. The magnetic field is varied so that the hysteresis loop includes a near-saturation magnetization region, to measure the hysteresis loop using the sensors. The parameter is selected from a magnetic flux or a magnetic flux density, a remanent magnetization, a coercivity, a magnetic permeability, and a hysteresis loss in the near-saturation magnetization region.

Abstract: A polishing apparatus includes a chuck table, a rotation mechanism that rotates the chuck table around a predetermined rotation axis, a polishing unit that has a spindle and in which a polishing pad for polishing the wafer sucked and held by the holding surface is mounted on a lower end part of the spindle, a slurry supply unit, and a cleaning unit that cleans the holding surface. The cleaning unit has a cleaning abrasive stone for removing the slurry that adheres to the holding surface through getting contact with the holding surface and a positioning unit that positions the cleaning abrasive stone to a cleaning position at which the cleaning abrasive stone gets contact with the holding surface and an evacuation position at which the cleaning abrasive stone is separate from the holding surface. Hardness of the cleaning abrasive stone is lower than the hardness of the holding surface.

Abstract: A processing apparatus includes a chuck table, a processing unit that has a spindle, a spindle housing, and a mount section fixed to a lower end portion of the spindle, a processing feeding mechanism that puts the processing unit into processing feeding, a processing chamber cover that has an opening penetrable by the mount section and that is able to cover the chuck table and the mount section, an extendable cover section having an annular lower connection section detachably connected to a peripheral portion of the opening, an annular upper connection section fixed to the spindle housing, and a tubular bellows section that connects the upper and lower connection sections and that is able to shrink and extend following movement of the processing unit, and a gas flow forming unit that forms a flow of gas from the upper connection section toward the lower connection section inside the bellows section.

Abstract: A processing machine includes a chuck table, a chuck table cover having an opening through which a holding surface of the chuck table can protrude, a processing unit having a spindle, a spindle housing, and a mount portion arranged on a lower end portion of the spindle, the processing unit being configured to process a workpiece by a processing tool mounted on a lower part of the mount portion, a processing chamber construction cover that covers the chuck table and the mount portion. The processing machine further includes a processing tool cover that is secured to a lower end portion of the spindle housing and that has an upper wall and a side wall that extends downwardly from the upper wall. The processing tool cover is disposed inside the processing chamber construction cover and covers the processing tool from above and sides by the upper and side walls.

Abstract: A tension measuring method installs a reel having a cylindrical coil forming part on a cable to be measured, forms a coil by winding a conductor around the coil forming part, measures a magnetic hysteresis loop of the cable by supplying a current to the coil to generate a magnetic field, and computes a tension of the cable using a parameter determined from the hysteresis loop. A magnetic field sensor and a magnetic flux sensor are provided inside a through hole in the coil forming part, and the cable is positioned inside the through hole. The magnetic field is varied so that the hysteresis loop includes a near-saturation magnetization region, to measure the hysteresis loop using the sensors. The parameter is selected from a magnetic flux or a magnetic flux density, a remanent magnetization, a coercivity, a magnetic permeability, and a hysteresis loss in the near-saturation magnetization region.

Abstract: A polishing apparatus for polishing a workpiece includes a chuck table having a holding surface for holding the workpiece placed on the holding surface under suction thereon, a polishing unit for polishing the workpiece held on the chuck table with a polishing pad while supplying a slurry to the workpiece, and a high-pressure steam ejecting unit having a nozzle for ejecting high-pressure steam to the holding surface of the chuck table. The high-pressure steam ejecting unit ejects high-pressure steam to swarf produced from polishing the workpiece and deposited on an outer circumferential portion of the holding surface for thereby removing the swarf from the holding surface.

Abstract: A magnetic detector includes permanent magnets that magnetize a wire rope W in the longitudinal direction, and a search coil that detects a change in the cross sectional area of the wire rope W magnetized by the permanent magnets. The magnetic detector is provided so as to surround a part of the wire rope W. Prior to inspection, the magnetic detector is moved back and forth at least three times across an inspection range of the wire rope W. After the magnetic detector is moved back and forth, the change in the cross sectional area, that is, damage to the wire rope W is inspected by using signals outputted from the search coil.

Abstract: A magnetic detector includes permanent magnets that magnetize a wire rope W in the longitudinal direction, and a search coil that detects a change in the cross sectional area of the wire rope W magnetized by the permanent magnets. The magnetic detector is provided so as to surround a part of the wire rope W. Prior to inspection, the magnetic detector is moved back and forth at least three times across an inspection range of the wire rope W. After the magnetic detector is moved back and forth, the change in the cross sectional area, that is, damage to the wire rope W is inspected by using signals outputted from the search coil.

Abstract: A damage evaluation apparatus, to evaluate damage to a tendon embedded in concrete. The apparatus includes a magnetizer for generating magnetic force, and a detector for detecting change in magnetism produced from a damaged area of the tendon when magnetized. The magnetizer includes a excitation coil; an iron core passing through a center hole of the excitation coil; a pair of columnar yokes connected to respective ends of the iron core and extending toward the concrete; and a pair of plate-shaped yokes connected to the pair of columnar yokes at a distal end thereof for forming magnetic poles having spread along the surface of the concrete. By passing an electric current through the excitation coil, a magnetic circuit is formed by the yoke shaft, the pair of columnar yokes, the pair of plate-shaped yokes, and the tendon over a range thereof situated between the pair of plate-shaped yokes.

Abstract: A grinding apparatus has a hermetically sealed chamber defined by a portion of a holding surface which extends radially outwardly from a wafer, an outer wall surface of a first annular packing, a lower surface of a plate, and an inner wall surface of a second annular packing. A negative pressure is developed by suction forces applied from the holding surface, allowing the atmospheric pressure to press the plate toward the holding surface and causing the first annular packing to press an outer circumferential portion of the wafer against the holding surface. Since the outer circumferential portion of the wafer is pressed against the holding surface under the suction forces from the holding surface and the atmospheric pressure, the forces pressing the outer circumferential portion of the wafer against the holding surface are increased easily at a low cost without increasing the size and weight of the grinding apparatus.

Abstract: A magnetic detector includes permanent magnets that magnetize a wire rope W in the longitudinal direction, and a search coil that detects a change in the cross sectional area of the wire rope W magnetized by the permanent magnets. The magnetic detector is provided so as to surround a part of the wire rope W. Prior to inspection, the magnetic detector is moved back and forth at least three times across an inspection range of the wire rope W. After the magnetic detector is moved back and forth, the change in the cross sectional area, that is, damage to the wire rope W is inspected by using signals outputted from the search coil.

Abstract: A damage evaluation apparatus, to evaluate damage to a tendon embedded in concrete. The apparatus includes a magnetizer for generating magnetic force, and a detector for detecting change in magnetism produced from a damaged area of the tendon when magnetized. The magnetizer includes a excitation coil; an iron core passing through a center hole of the excitation coil; a pair of columnar yokes connected to respective ends of the iron core and extending toward the concrete; and a pair of plate-shaped yokes connected to the pair of columnar yokes at a distal end thereof for forming magnetic poles having spread along the surface of the concrete. By passing an electric current through the excitation coil, a magnetic circuit is formed by the yoke shaft, the pair of columnar yokes, the pair of plate-shaped yokes, and the tendon over a range thereof situated between the pair of plate-shaped yokes.

Abstract: A projection video display device, which enlarges and projects an image from an image-displaying means, has a housing and a raisable/lowerable mirror and a power supply, a light source, and a lens unit inside the housing. The raisable/lowerable mirror covers a projection-light opening formed in the top surface of the housing and able to rotate with respect to the housing, and has a convex mirror on the inside surface thereof. The raisable/lowerable mirror covering the top surface of the housing forms a smoothly connected, smooth, convexly curved surface with no height difference between the edge of the raisable/lowerable mirror and the front edge of the opening, and a half-bowl-shaped concavity is formed on at least one side of the raisable/lowerable mirror in the direction of the axis of rotation thereof.

Abstract: Without increasing the size of a projection video display device that has a mirror that can be raised and lowered, this invention makes it easy to raise and lower said mirror. In order to do so, this projection video display device, which enlarges and projects an image from an image-displaying means, has a housing (10) and a raisable/lowerable mirror (30) wherein: a power supply, a light source, and a lens unit are accommodated inside the housing (10); said lens unit enlarges light from the light source after said light has been directed to the aforementioned image-displaying means; and the raisable/lowerable mirror (30) covers a projection-light opening (26) formed in the top surface of the housing (10), is provided so as to be able to rotate with respect to the housing (10), and has a convex mirror (110) on the inside surface thereof.