Abstract: An inertia detecting transducer having a reliable detection element. The element is kept to be free from deposition of gas and organic substance generated from resin adhesive. A first case of the transducer has an opening and a circuit component mounted thereon, and is provided with an external electrode and a first connection electrode. A second case includes a detection element mounted inside thereof, and an opening of the case is sealed with a sealing plate. The second case is further provided with a second connection electrode. The second case is attached to the first case so that the former covers the opening of the latter. The second connection electrode and the first connection electrode are electrically coupled. In the above-described configuration of the present invention, if an inertia detecting transducer gets a partial damage, either one of the detection element and the circuit component remaining intact can be re-utilzed.

Abstract: The present invention presents an angular velocity sensor having a self diagnosis function. An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity. The angular velocity sensor also includes a detection means for detecting the angular velocity of the sensor element. The angular velocity sensor obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.

Abstract: The present invention aims to improve detection characteristics of an angular velocity sensor using a tuning fork vibrator made of a single crystalline piezoelectric material such as quartz. In order to achieve this object, the present invention directly bonds two vibrators (20) and (30) in the thickness direction for an integral structure so that the vibrators have a crystal axis that generate piezoelectric phenomena in inverse polarities in their width directions. Tuning fork vibrator (10) has two tuning fork arms (10a) and (10b) and tuning fork base (10c). Detection electrodes (6), (7), (5), and (8) are disposed on an inner face and outer face of both tuning fork arms (10a) and (10b). Drive electrodes (1) and (2) are disposed on both tunings fork arms (10a) and (10b) against detection electrodes (5), (6), (7), and (8) for canceling capacitive coupling from a drive section to detecting section.

Abstract: An angular rate sensor comprises a determination circuit (30) for inputting an output signal of a full-wave rectifier circuit (22) and an output signal after amplified by a charge amplifier (25), and making a determination of abnormality, and an output clamping circuit (32) activated by an output signal of the determination circuit (30), if it makes a determination of abnormality, for clamping an output signal of a sensor output terminal at a level close to a power supply voltage or a grounding voltage.

Abstract: An angular rate sensor is capable of restraining an output voltage of the sensor from being offset by suppressing a current flowing in and out of a common terminal so as to prevent it from flowing in and out of a side of a reference voltage generator. The angular rate sensor is provided with a buffer between a reference voltage generator and a support pin, which serves as a common terminal for a vibration exciter, a detector for detecting a level of vibrations, and a detector for detecting a Coriolis' force. A current flowing in and out of the support pin is prevented from flowing in and out of a side of the reference voltage generator.

Abstract: An object of the present invention is to provide an automatic compensation sensor that can eliminate an exclusive input terminal for the compensation mode signal. To achieve this object, the present invention comprises a sensor body (1), a signal output terminal (5) for outputting signals from the sensor body (1), and a controller for compensating the output signal from this signal output terminal (5).

Abstract: The present invention aims to present an angular velocity sensor having a self diagnosis function.

Abstract: The present invention aims to present an angular velocity sensor having a self diagnosis function. An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity and detection means for detecting the angular velocity of the sensor element and obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.

Abstract: The present invention aims to present an angular velocity sensor having a self diagnosis function.An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity and detection means for detecting the angular velocity of the sensor element and obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.

Abstract: The present invention aims to present an angular velocity sensor having a self diagnosis function.An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity and detection means for detecting the angular velocity of the sensor element and obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.