Patents by Inventor Toshiyuki Ohhashi

Toshiyuki Ohhashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of determining the position of electron beam irradiation and device used in such method
    Patent number: 5081354
    Abstract: A method of positioning electron-beam irradiation and a device used in such method comprising the steps of irradiating a desired portion of a specimen with an electron beam, forming an image of the electron beam which penetrates the specimen on a fluorescent screen, and positioning the electron beam irradiation to the above-mentioned specimen on the basis of the image of the specimen on the fluorescent screen obtained by scanning an electron beam over a range wider than the spot size of the electron beam on the surface of the specimen.
    Type: Grant
    Filed: December 12, 1989
    Date of Patent: January 14, 1992
    Assignee: Hitachi, Ltd.
    Inventors: Toshiyuki Ohhashi, Kazuo Shii, Hiroyuki Kobayashi