Abstract: Inspection processing is performed. The inspection processing includes a first driving step of driving a piezoelectric element corresponding to an inspection target nozzle, a first detection step of detecting vibration that is generated in ink in a pressure chamber corresponding to the inspection target nozzle by the driving in the first driving step, a second driving step of driving together the piezoelectric element corresponding to the inspection target nozzle and a piezoelectric element corresponding to at least one nozzle of nozzles adjacent to the inspection target nozzle, and a second detection step of detecting vibration that is generated in the ink in the pressure chamber corresponding to the inspection target nozzle by the driving in the second driving step.

Abstract: A photomask blank for use in the manufacture of a photomask adapted to be applied with exposure light having a wavelength of 200 nm or less has a thin film on a transparent substrate. The thin film is made of a material containing a transition metal, silicon, and carbon and comprising silicon carbide and/or a transition metal carbide.

Abstract: A liquid ejecting apparatus includes: a liquid ejecting unit that ejects a liquid supplied through a liquid supply path from a nozzle; a maintenance unit that performs a maintenance operation of the liquid ejecting unit; and an ejection state detecting unit that is able to detect a state inside a pressure chamber communicating with the nozzle. The ejection state detecting unit detects a state inside the pressure chamber before the maintenance operation and at least one state inside the pressure chamber during the maintenance operation or after the maintenance operation, and is able to determine malfunction of at least one of the maintenance unit and function units arranged in the liquid supply path based on a change in a state inside the pressure chamber due to the maintenance operation.

Abstract: The invention relates to a cleaning liquid for semiconductor device substrates comprising the following components (A) to (D) and a method of cleaning semiconductor device substrates: (A) at least either one of a polycarboxylic acid and a hydroxycarboxylic acid; (B) a sulfonic acid type anionic surfactant; (C) a carboxylic acid type anionic surfactant; and (D) water.

Abstract: A liquid ejection device comprising a plurality of ejection parts for ejecting liquid in cavities, an inspection part for inspecting the ejection parts. The ejection parts are classified into a plurality of ranks according to a characteristic of each of the ejection parts.

Abstract: A droplet ejecting apparatus which includes a control unit which controls a recording operation in which dots are recorded on a medium by performing multipass recording in which recording of dots which are located in one main scanning line which goes along a main scanning direction is completed in a recording operation in the main scanning direction of N times (N is integer of 2 or greater), and a maintenance operation in which maintenance with respect to an ejecting unit is performed, in which the control unit performs a control so that at least recording operations in the main scanning direction of (N?1) times is performed between the previous maintenance operation and the subsequent maintenance operation when performing maintenance operations of a plurality of times.

Abstract: A liquid discharging apparatus includes: a recording head that includes M numbers of the discharging units; a drive unit that drives the discharging unit; a residual vibration detecting unit that detects residual vibration occurring in the discharging unit; and a determining unit that determines a state of discharge of the liquid in the discharging unit on the basis of a detection result. The determining unit is capable of performing the determination in two or more determination modes, and determines at least one of one or a plurality of target discharging units that is to be a target of the determination during a determination time period, and a drive discharging unit that the drive unit is to drive so as to determine the state of discharge of the liquid in the target discharging unit from the M numbers of discharging units depending on the determination mode.

Abstract: A liquid ejecting device including: an ejection unit that includes a piezoelectric element which is shifted according to a driving signal, and a nozzle that ejects a liquid which the shift of the piezoelectric element; a generating unit that generates the driving signal based on a designation signal; a supply unit that supplies the designation signal to the generating unit; a detecting unit that detects residual vibration generated in the ejection unit after the piezoelectric element is shifted according to the driving signal; and a determining unit that determines an ejection state of the liquid in the ejection unit based on the detection results of the detecting unit, in which the detecting unit detects the residual vibration during a detection period, and the supply unit supplies the designation signal to the generating unit during a period other than the detection period.

Abstract: A liquid discharging apparatus includes: a recording head that includes M numbers of the discharging units; a drive unit that drives the discharging unit; a residual vibration detecting unit that detects residual vibration occurring in the discharging unit; and a determining unit that determines a state of discharge of the liquid in the discharging unit on the basis of a detection result. The determining unit is capable of performing the determination in two or more determination modes, and determines at least one of one or a plurality of target discharging units that is to be a target of the determination during a determination time period, and a drive discharging unit that the drive unit is to drive so as to determine the state of discharge of the liquid in the target discharging unit from the M numbers of discharging units depending on the determination mode.

Abstract: An ink jet printer includes an ejection unit including a nozzle which ejects a liquid containing a pigment; a cavity which communicates with the nozzle; and a piezoelectric element which is provided in the cavity, and a driving signal generation unit which generates a driving signal allowing the piezoelectric element to be displaced such that the cavity expands or is contracted. The ink jet printer includes a detection unit that detects a cycle of a residual vibration waveform of the piezoelectric element which is generated by the driving signal being applied to the piezoelectric element and indicates a value according to change of the pressure inside of the cavity and a determination unit that determines the pigment is settled based on the cycle of the residual vibration waveform detected by the detection unit.

Abstract: A duplex LC communication light detecting adapter for forming two parallel optical transmission lines therein when a duplex LC connector is inserted so as to extract as a leak light a portion of communication light transmitting through the optical transmission lines, including an adapter main body that is opaque to light. The adapter main body includes a first space defined by a first wall and isolated from other spaces to arrange a first optical transmission line of the two optical transmission lines, a first light extraction hole for extracting the leak light from the first space, a second space defined by a second wall and isolated from other spaces to arrange a second optical transmission line of the two optical transmission lines, and a second light extraction hole for extracting the leak light from the second space.

Abstract: A duplex LC communication light detecting adapter includes an adapter main body to form two parallel optical transmission lines therein when a duplex LC connector is inserted, the adapter main body including a side in which a light extraction hole is formed, the light extraction hole being located at a vertex of a isosceles triangle having a base that is a line segment connecting centers of the two optical transmission lines in a cross section and opened in a direction perpendicular to the line segment, and a sleeve holder formed integrally with the adapter main body to hold a sleeve that houses a ferrule of the duplex LC connector. The sleeve holder includes an opening section that is opened toward the light extraction hole in a range of more than 30 degrees to less than 120 degrees relative to the line segment in a cross section.

Abstract: In a mask blank for manufacturing a transfer mask, the mask blank has a light-shielding film on a transparent substrate. The light-shielding film is made of a material containing tantalum as a main metal component and includes a highly oxidized layer which has an oxygen content of 60 at % or more and which is formed as a surface layer of the light-shielding film. The highly oxidized layer is placed on a side opposite to a transparent substrate side.

Abstract: The present invention is a reflective mask blank used to fabricate a reflective mask, which has a laminated structure of a multilayer reflective film, an absorber film and an etching mask film in this order on a substrate, wherein the etching mask film comprises a material containing chromium, the absorber film comprises a material containing tantalum, a highly oxidized layer is formed on the surface layer of the absorber film on the opposite side from the substrate, and a Ta 4f narrow spectrum of the highly oxidized layer when analyzed by X-ray photoelectron spectroscopy has a maximum peak at a binding energy of more than 23 eV.

Abstract: A liquid ejecting device ejects a liquid using a driving element driven through application of a drive signal. The liquid ejecting device comprises a detector electrically connected to a plurality of driving elements via a common electrical path. The detector detects electrical signals output from each of the plurality of driving elements.

Abstract: The present invention is a reflective mask blank used to fabricate a reflective mask, which has a laminated structure of a multilayer reflective film, an absorber film and an etching mask film in this order on a substrate, wherein the etching mask film comprises a material containing chromium, the absorber film comprises a material containing tantalum, a highly oxidized layer is formed on the surface layer of the absorber film on the opposite side from the substrate, and a Ta 4f narrow spectrum of the highly oxidized layer when analyzed by X-ray photoelectron spectroscopy has a maximum peak at a binding energy of more than 23 eV.

Abstract: There is provided a technique with which an abnormal discharge state in a discharge component can be determined on the basis of residual vibration. A printer includes a discharge component that discharges ink, a detector that detects residual vibration in the discharge component, and a tester that tests the discharge component on the basis of the change in the period of the residual vibration.

Abstract: An ink jet printer includes an ejection unit including a nozzle which ejects a liquid containing a pigment; a cavity which communicates with the nozzle; and a piezoelectric element which is provided in the cavity, and a driving signal generation unit which generates a driving signal allowing the piezoelectric element to be displaced such that the cavity expands or is contracted. The ink jet printer includes a detection unit that detects a cycle of a residual vibration waveform of the piezoelectric element which is generated by the driving signal being applied to the piezoelectric element and indicates a value according to change of the pressure inside of the cavity and a determination unit that determines the pigment is settled based on the cycle of the residual vibration waveform detected by the detection unit.

Abstract: The present invention is a mask blank used to fabricate a transfer mask, which has a laminated structure of a light shielding film and an etching mask film in this order on a transparent substrate, wherein the etching mask film comprises a material containing chromium, the light shielding film comprises a material containing tantalum, a highly oxidized layer is formed on the surface layer of the light shielding film on the opposite side from the transparent substrate, and a Ta 4 f narrow spectrum of the highly oxidized layer analyzed by X-ray photoelectron spectroscopy has a maximum peak at a binding energy of more than 23 eV.

Abstract: Provided is a mask blank having a structure including a thin film on a substrate, wherein the thin film is made of a material containing one or more elements selected from tantalum, tungsten, zirconium, hafnium, vanadium, niobium, nickel, titanium, palladium, molybdenum, and silicon, and wherein the normalized secondary ion intensity of at least one or more ions selected from a calcium fluoride ion, a magnesium fluoride ion, an aluminum fluoride ion, a calcium chloride ion, and a magnesium chloride ion is 2.0×10?4 or less when a surface of the thin film is measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS) under measurement conditions of a primary ion species of Bi3++, a primary accelerating voltage of 30 kV, and a primary ion current of 3.0 nA.