Abstract: Proposed are an X-ray inspection apparatus and a method of inspection with X-rays in which foreign objects in even a sample in which bending, sagging, or curving may occur can be inspected accurately. The X-ray inspection apparatus includes an X-ray source (2) which irradiates a sample with an X-ray, an X-ray detection unit (3) that is installed on a side opposite to the X-ray source with respect to the sample and detects the X-ray that passed through the sample, and a sample support mechanism (14) that supports the sample, wherein the sample is flexible and has a shape of a film, and the sample support mechanism has a support body (4) through which the X-ray is capable of passing and which is in close contact with and supports at least a portion of the sample, that is disposed between the X-ray source and the X-ray detection unit.

Abstract: Proposed are an X-ray inspection apparatus and a method of inspection with X-rays in which even in a sample having coated portion and uncoated portion of the cathode material, the inspection of foreign objects in the both portions can be simultaneously performed under the same conditions. The X-ray inspection apparatus includes an X-ray source (2) that irradiates the sample (S) with X-rays (X1), an X-ray detection unit (3) which is installed at a side opposite to the X-ray source with respect to the sample and detects the X-rays that passed through the sample, and a filter (4) installed between the X-ray source and the X-ray detection unit, wherein the sample has a region with a large amount of X-ray absorption and a region with a small amount of X-ray absorption.

Abstract: An inspection method of a membrane electrode assembly includes a first process of acquiring an X-ray transmission image of the membrane electrode assembly, a second process of identifying a luminance-reduced region having a luminance lower than a luminance of a surrounding region in the X-ray transmission image acquired in the first process, a third process of correcting the luminance of the luminance-reduced region identified in the second process, in accordance with a planar size of the luminance-reduced region, based on a correlation between a planar size of a foreign matter in the membrane electrode assembly and change in luminance due to diffraction of X-rays, and a fourth process of finding a thickness of the foreign matter in the membrane electrode assembly based on the luminance corrected in the third process.

Abstract: A method of inspecting a membrane-electrode assembly includes obtaining an X-ray transmission image by applying X-rays to the membrane-electrode assembly, and determining whether a foreign matter having a size equal to or larger than a predetermined value is included in the membrane-electrode assembly, according to a brightness reduction amount in each pixel of the X-ray transmission image obtained, while referring to a correlative relationship between the size of the foreign matter measured in a planar direction of the membrane-electrode assembly, and the brightness reduction amount in the X-ray transmission image.

Abstract: An inspection method of a membrane electrode assembly includes a first process of acquiring an X-ray transmission image of the membrane electrode assembly, a second process of identifying a luminance-reduced region having a luminance lower than a luminance of a surrounding region in the X-ray transmission image acquired in the first process, a third process of correcting the luminance of the luminance-reduced region identified in the second process, in accordance with a planar size of the luminance-reduced region, based on a correlation between a planar size of a foreign matter in the membrane electrode assembly and change in luminance due to diffraction of X-rays, and a fourth process of finding a thickness of the foreign matter in the membrane electrode assembly based on the luminance corrected in the third process.

Abstract: A method of inspecting a membrane-electrode assembly includes obtaining an X-ray transmission image by applying X-rays to the membrane-electrode assembly, and determining whether a foreign matter having a size equal to or larger than a predetermined value is included in the membrane-electrode assembly, according to a brightness reduction amount in each pixel of the X-ray transmission image obtained, while referring to a correlative relationship between the size of the foreign matter measured in a planar direction of the membrane-electrode assembly, and the brightness reduction amount in the X-ray transmission image.

Abstract: An X-ray transmission inspection apparatus capable of easily performing the adjustment by a standard sample is provided. The apparatus is provided with an X-ray source; an X-ray detector; a standard sample moving mechanism configured to move a standard sample placed in a different position from that of a sample; and an arrangement changing mechanism configured to be in a such a manner that the X-ray source and the X-ray detector, and the sample and the standard sample are movable relative to each other, and configured to change an arrangement state from one arrangement state in which the X-ray source and the X-ray detector face the sample to the other arrangement state in which the X-ray source and the X-ray detector face the standard sample that is moved by the standard sample moving mechanism.

Abstract: An X-ray transmission inspection apparatus capable of easily performing the adjustment by a standard sample is provided. The apparatus is provided with an X-ray source; an X-ray detector; a standard sample moving mechanism configured to move a standard sample placed in a different position from that of a sample; and an arrangement changing mechanism configured to be in a such a manner that the X-ray source and the X-ray detector, and the sample and the standard sample are movable relative to each other, and configured to change an arrangement state from one arrangement state in which the X-ray source and the X-ray detector face the sample to the other arrangement state in which the X-ray source and the X-ray detector face the standard sample that is moved by the standard sample moving mechanism.

Abstract: An X-ray fluorescence analyzer includes: a sample stage having a mounting surface on which a sample on which a sample is mounted is mounted; an X-ray source configured to irradiate the sample with primary X-rays and disposed immediately above an irradiation position of the sample; a detector configured to detect fluorescent X-rays emitted from the sample irradiated with the primary X-rays; and a shielding container configured to accommodate the sample stage, the X-ray source, and the detector and includes: a sample chamber configured to accommodate the sample stage; and a door provided at a top of the sample chamber and configured to open and close at least a front half of the sample chamber, wherein the X-ray source and the detector are disposed at a rear half of the sample chamber.

Abstract: An X-ray fluorescence analyzer includes: a sample stage; an X-ray source; a detector; an X stage; a Y stage; a ? stage; and a shielding container, wherein the irradiation position with primary X-rays is set at an offset position from a movement center of the X stage and the Y stage, wherein an irradiation area that is irradiatable with the primary X-rays is set to a selected segmented area from among segmented areas that are defined by segmenting the surface of the sample into four parts with a virtual segment lines in the X direction and the Y direction passing through the movement center, and wherein the ? stage is configured to switch the selected segmented area into any one of the segmented areas by rotating the sample stage by every 90 degrees.

Abstract: An X-ray fluorescence analyzer includes: a measurement device having: an X-ray source that emits an X-ray; an irradiation area restricting member that restricts an area of a measurement sample to be irradiated with the X-ray as a primary X-ray; and a detector that detects a secondary X-ray generated from the measurement sample. The analyzer further includes: a sample stage that holds and moves the measurement sample between a measurement position at which the measurement sample is irradiated with the primary X-ray to detect the secondary X-ray by the detector and a first retracted position at which the measurement sample is retracted from the measurement position; and a calibration sample moving mechanism that holds a calibration sample for calibrating the measurement device and moves the calibration sample between the measurement position and a second retracted position at which the calibration sample is retracted from the measurement position.

Abstract: An X-ray fluorescence analyzer includes: a sample stage having a mounting surface on which a sample on which a sample is mounted is mounted; an X-ray source configured to irradiate the sample with primary X-rays and disposed immediately above an irradiation position of the sample; a detector configured to detect fluorescent X-rays emitted from the sample irradiated with the primary X-rays; and a shielding container configured to accommodate the sample stage, the X-ray source, and the detector and includes: a sample chamber configured to accommodate the sample stage; and a door provided at a top of the sample chamber and configured to open and close at least a front half of the sample chamber, wherein the X-ray source and the detector are disposed at a rear half of the sample chamber.

Abstract: An X-ray fluorescence analyzer includes: a sample stage; an X-ray source; a detector; an X stage; a Y stage; a ? stage; and a shielding container, wherein the irradiation position with primary X-rays is set at an offset position from a movement center of the X stage and the Y stage, wherein an irradiation area that is irradiatable with the primary X-rays is set to a selected segmented area from among segmented areas that are defined by segmenting the surface of the sample into four parts with a virtual segment lines in the X direction and the Y direction passing through the movement center, and wherein the ? stage is configured to switch the selected segmented area into any one of the segmented areas by rotating the sample stage by every 90 degrees.

Abstract: An X-ray fluorescence analyzer includes: a measurement device having: an X-ray source that emits an X-ray; an irradiation area restricting member that restricts an area of a measurement sample to be irradiated with the X-ray as a primary X-ray; and a detector that detects a secondary X-ray generated from the measurement sample. The analyzer further includes: a sample stage that holds and moves the measurement sample between a measurement position at which the measurement sample is irradiated with the primary X-ray to detect the secondary X-ray by the detector and a first retracted position at which the measurement sample is retracted from the measurement position; and a calibration sample moving mechanism that holds a calibration sample for calibrating the measurement device and moves the calibration sample between the measurement position and a second retracted position at which the calibration sample is retracted from the measurement position.

Abstract: An X-ray analysis apparatus including: a radiation source configured to irradiate an irradiation point on a sample with radiation; an X-ray detector configured to detect a characteristic X-ray emitted from the sample, and output a signal including energy information about the characteristic X-ray; an analyzer configured to analyze the signal; a sample stage configured to allow placement of the sample thereon; a shifting mechanism being capable of relatively shifting the sample on the sample stage and the radiation source and the X-ray detector with respect to each other; a height measuring mechanism being capable of measuring the height of the irradiation point on the sample; and a controller configured to control the shifting mechanism on the basis of the measured height of the irradiation point on the sample and adjust the distance of the sample with respect to the radiation source and the X-ray detector is used.

Abstract: An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information on the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a sample stage on which the sample is placed, a moving mechanism which moves the sample on the sample stage, the X-ray tube, and the X-ray detector relative to each other, a height measuring mechanism which measures a maximum height of the sample, and a control unit which adjusts the distance between the sample and the X-ray tube and the distance between the sample and the X-ray detector by controlling the moving mechanism on the basis of the measured maximum height of the sample, are included.

Abstract: An X-ray analysis apparatus including: a radiation source configured to irradiate an irradiation point on a sample with radiation; an X-ray detector configured to detect a characteristic X-ray emitted from the sample, and output a signal including energy information about the characteristic X-ray; an analyzer configured to analyze the signal; a sample stage configured to allow placement of the sample thereon; a shifting mechanism being capable of relatively shifting the sample on the sample stage and the radiation source and the X-ray detector with respect to each other; a height measuring mechanism being capable of measuring the height of the irradiation point on the sample; and a controller configured to control the shifting mechanism on the basis of the measured height of the irradiation point on the sample and adjust the distance of the sample with respect to the radiation source and the X-ray detector is used.

Abstract: An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information on the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a sample stage on which the sample is placed, a moving mechanism which moves the sample on the sample stage, the X-ray tube, and the X-ray detector relative to each other, a height measuring mechanism which measures a maximum height of the sample, and a control unit which adjusts the distance between the sample and the X-ray tube and the distance between the sample and the X-ray detector by controlling the moving mechanism on the basis of the measured maximum height of the sample, are included.