Abstract: A dehumidifier element is produced by alternately laminating corrugated paper and flat liner paper, both papers being of low density and composed of inorganic fiber such as ceramic fiber, to form a honeycomb matrix having many small channels penetrating through opposite surfaces. The formed matrix is fired with hot air to remove organic substances contained in the sheets, or the sheets may be fired before the lamination. The matrix is impregnated with water glass after the laminating process, or the sheets are impregnated before the laminating process. In either case, the formed matrix is soaked in an aqueous solution of aluminum sulphate or magnesium sulphate to form a silicate hydrogel on the papers and in the apertures between fibers of the papers. The shaped matrix and the metal silicate hydrogel are washed and dried to obtain a dehumidifying element having physical strength. The metal sulphate solution is cooled to precipitate and remove sodium sulphate from the solution.

Abstract: An element for adsorbing one or more active gases in an inert gas to obtain an inert gas such as air containing an inert gas such as air containing an ultra-low concentration active gas such as water vapor. The element is produced by laminating low density papers composed of inorganic fiber to form a matrix in the form of a gas adsorbing element having numerous small channels penetrating through opposite surfaces, impregnating the matrix with water glass in which synthesized zeolite powder is dispersed, and soaking the matrix in aqueous solution of aluminum salts, magnesium salts or calcium salts, and so on, to form metal silicate hydrogel on the paper and in the apertures between fibers of papers, and washing and drying the matrix and the metal silicate hydrogel to obtain the element. The main constituent of the element being synthesized zeolite and metal silicate aerogel deposited on the inorganic fiber matrix.

Abstract: The invention relates to a humidity exchanger element comprising of a matrix formed by laminating single-faced corrugated sheets and an active silica-alumina aerogel just synthesized and adhered on said sheets and on the gap between the fibers of said sheets; the main constituents of said sheet being an inorganic fiber selected from the group consisting of ceramic fiber, glass fiber, slag fiber, carbon fiber and mixtures of them, the thickness of said sheet being in the range of 0.18-0.25 mm, the wave length of said corrugated sheet being in the range of 2.5-4.2 mm, and the wave height of said corrugated sheet being in the range of 1.5-2.3 mm; and the composition of said aerogel being 97-85% of silicon dioxide and 3-15% of aluminum oxide.

Abstract: An improved method and apparatus are presented for supporting and/or conveying a plate by means of flow of fluid without physical contact. By providing a flat surface extending perpendicularly from the opening of a fluid delivery pipe and providing a suction pipe around the flat surface, static pressure of fluid becomes negative at the gap between the flat surface and a plate near the flat surface, to support and/or convey the plate beneath the flat surface without physical contact. The fluid delivered into the gap between the flat surface and plate is inhaled into the suction pipe and recirculated, to prevent the disturbance of the surrounding atmosphere by the fluid, the attachment of dust onto the plate and the introduction of dust into the fluid. This method is effective for handling of plates, such as semi-conductor wafers and magnetic discs, which should not be marred or stained by physical contact with a hand or a gripper.