Patents by Inventor Tosiyuki Kobayashi

Tosiyuki Kobayashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal processing apparatus and thermal processing method
    Patent number: 7038173
    Abstract: A thermal processing apparatus, performing processing accompanied with heating on a substrate, having an upper lamp group directed toward a prescribed direction and a lower lamp group perpendicularly intersecting with the upper lamp group is provided with a lower reflector between the upper and lower lamp groups. The lower reflector is so provided as to reflect light from lamps, included in the lower lamp group, present on both end regions in relation to the direction of arrangement. Thus, the thermal processing apparatus can efficiently irradiate an auxiliary ring with reflected light from the lower lamp group and improve temperature uniformity when heating the substrate.
    Type: Grant
    Filed: February 3, 2003
    Date of Patent: May 2, 2006
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Mitsukazu Takahashi, Tosiyuki Kobayashi, Toshimitsu Funayoshi
  • Thermal processing apparatus and thermal processing method
    Publication number: 20030146200
    Abstract: A thermal processing apparatus, performing processing accompanied with heating on a substrate, having an upper lamp group directed toward a prescribed direction and a lower lamp group perpendicularly intersecting with the upper lamp group is provided with a lower reflector between the upper and lower lamp groups. The lower reflector is so provided as to reflect light from lamps, included in the lower lamp group, present on both end regions in relation to the direction of arrangement. Thus, the thermal processing apparatus can efficiently irradiate an auxiliary ring with reflected light from the lower lamp group and improve temperature uniformity when heating the substrate.
    Type: Application
    Filed: February 3, 2003
    Publication date: August 7, 2003
    Applicant: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Mitsukazu Takahashi, Tosiyuki Kobayashi, Toshimitsu Funayoshi