Abstract: A method to detect a defect on a lithographic sample includes the following steps: detection light and a detector having at least one sensor pixel are provided. Further, a detection pattern is provided causing a light structure of the detection light being structured at least along one dimension (1D, x). The detection pattern is aligned such that the detector is aligned normal to an extension (xy) of the light structure. Further, a complimentary pattern is provided having a 1D structure which is complimentary to that of the detection pattern. The sample is moved relative to the detection pattern while gathering the detection light on the detector. Further, a reference sample without defects or with negligible defects is provided. The reference sample also is moved relative to the detection pattern while gathering the detection light on the detector. A defect (s1 to s4) localization on the sample is decoded by correlation using the complementary pattern.

Abstract: For approximating imaging properties of an optical production system which images an object to imaging properties of an optical measurement system when imaging the object, which imaging properties arise from an adjustment displacement of at least one component (Mi) of the optical measurement system, the following procedure is carried out: A production transfer function of the imaging is determined by the production system as a target transfer function. The production transfer function depends on an illumination setting for an object illumination. This determination is implemented for a target illumination setting. Furthermore, a measurement transfer function of the imaging is determined by the measurement system as an actual transfer function. The measurement transfer function likewise depends on the illumination setting for the object illumination. This determination is also implemented for the target illumination setting.

Abstract: Methods and apparatuses for designing optical systems are provided. In this case, on a plurality of known optical systems, machine learning is carried out in order to train a computing device. After this training, the computing device can generate a design for an optical system on the basis of parameters describing desired properties of an optical system.

Abstract: A spectacle lens has a body containing at least one diffraction structure, which is made to extend in the body on a body surface. The diffraction structure is formed by a spatial modulation of the refractive index n(x, y) dependent on the location in the body surface. The spatial modulation of the refractive index n(x, y) in the body is continuous. The continuity of the spatial modulation of the refractive index n(x, y) in the body typically exists over a contiguous area B of the body surface, for the diameter D of which, defined as the supremum of the metric distance d(x, y) between two arbitrary points x, y arranged in the area of the body surface, with D:=sup{d(x, y): x, y ? B}, the following applies: D?1 mm, preferably D?10 mm, particularly preferably D?20 mm.

Abstract: An optical device comprises a light source and a detector, and also a sample holder, which is configured to fix an object in the optical path of light. A scanning optical unit is configured, for a multiplicity of scanning positions, in each case selectively to direct light incident from different angular ranges from the object onto the detector. On the basis of a three-dimensional light field represented by corresponding measurement data of the multiplicity of scanning positions, a spatially resolved imaging of the object is generated, said imaging comprising at least two images from different object planes of the object.

Abstract: Methods and apparatuses for designing optical systems are provided. In this case, on a plurality of known optical systems, machine learning is carried out in order to train a computing device. After this training, the computing device can generate a design for an optical system on the basis of parameters describing desired properties of an optical system.

Abstract: An imaging device includes at least one eyeglass lens to be worn in front of the eye and a display device arranged in the edge region of the eyeglass lens, said display device including an image generator and an imaging optics arranged between the image generator and the eyeglass lens. The image generator is the start point of an imaging beam path which generates the virtual image having an image distance on the basis of the output image and which penetrates into the eyeglass lens by means of the imaging optics via the edge region of the eyeglass lens. An outcoupling device for outcoupling the imaging beam path in the direction of the eye is provided in the eyeglass lens. The display device comprises a device for adjusting the image distance of the virtual image. The invention also relates to data eyeglasses comprising an imaging device.

Abstract: Catadioptric eyepiece system having an exit pupil, comprising a display having a surface disposed in an object plane; optics providing a beam path from the display to the exit pupil and being configured to image a portion of the object plane into an intermediate image formed in a curved intermediate image plane; wherein the optics comprise: a lens system of positive optical power comprising at least one lens, wherein the lens system is disposed in the beam path downstream of the display and upstream of the intermediate image; a concave first mirror disposed in the beam path downstream of the intermediate image and upstream of the exit pupil; and a first beam splitter disposed in the beam path between the lens system and the first mirror and between the first mirror and the exit pupil.

Abstract: An imaging device includes at least one eyeglass lens to be worn in front of the eye and a display device arranged in the edge region of the eyeglass lens, said display device including an image generator and an imaging optics arranged between the image generator and the eyeglass lens. The image generator is the start point of an imaging beam path which generates the virtual image having an image distance on the basis of the output image and which penetrates into the eyeglass lens by means of the imaging optics via the edge region of the eyeglass lens. An outcoupling device for outcoupling the imaging beam path in the direction of the eye is provided in the eyeglass lens. The display device comprises a device for adjusting the image distance of the virtual image. The invention also relates to data eyeglasses comprising an imaging device.

Abstract: An optical device comprises a light source and a detector, and also a sample holder, which is configured to fix an object in the optical path of light. A scanning optical unit is configured, for a multiplicity of scanning positions, in each case selectively to direct light incident from different angular ranges from the object onto the detector. On the basis of a three-dimensional light field represented by corresponding measurement data of the multiplicity of scanning positions, a spatially resolved imaging of the object is generated, said imaging comprising at least two images from different object planes of the object.

Abstract: The invention relates to a method for calibrating a digital optical imaging system, comprising at least one motorized or coded zoom system and an image sensor, to a method for correcting aberrations in such an imaging system, and to an optical imaging system which is configured to carry out the methods according to the invention. During the calibration method, a reference object is recorded in various zoom settings and the image is corrected pixel-wise with digital-optical means using a previously determined model. To this end, distortion correction coefficients and image stability correction coefficients are ascertained. The real total magnification of the system is ascertained from the corrected image. The model ascertained in the calibration process also serves for correcting aberrations during operation of the imaging system.

Abstract: The invention relates to a method for calibrating an optical instrument which comprises at least a motorized zoom system, an objective, an image sensor and an image processing unit. The method comprises the following steps: establishing calibration data DZRef of the zoom system with a reference objective and storing these in an internal memory of the zoom system; establishing calibration data DORef of the objective with a reference zoom system and storing these in an internal memory of the objective; reading the internal memories of the zoom system and of the objective and applying a digital-optical correction of an image acquired by an image sensor with the calibration data DZRef and DORef. The invention moreover relates to an optical instrument, in particular a digital microscope, to which the calibration method according to the invention can be applied.

Abstract: The invention relates to a method for calibrating a digital optical imaging system, comprising at least one motorized or coded zoom system and an image sensor, to a method for correcting aberrations in such an imaging system, and to an optical imaging system which is configured to carry out the methods according to the invention. During the calibration method, a reference object is recorded in various zoom settings and the image is corrected pixel-wise with digital-optical means using a previously determined model. To this end, distortion correction coefficients and image stability correction coefficients are ascertained. The real total magnification of the system is ascertained from the corrected image. The model ascertained in the calibration process also serves for correcting aberrations during operation of the imaging system.

Abstract: The invention relates to a method for calibrating an optical instrument which comprises at least a motorized zoom system, an objective, an image sensor and an image processing unit. The method comprises the following steps: establishing calibration data DZRef of the zoom system with a reference objective and storing these in an internal memory of the zoom system; establishing calibration data DORef of the objective with a reference zoom system and storing these in an internal memory of the objective; reading the internal memories of the zoom system and of the objective and applying a digital-optical correction of an image acquired by an image sensor with the calibration data DZRef and DORef. The invention moreover relates to an optical instrument, in particular a digital microscope, to which the calibration method according to the invention can be applied.