Abstract: The vacuum dryer includes: a first half chamber having a first opening, and a drying table on which a workpiece is fixed and positioned at a drying phase; a second half chamber having a second opening and coupled with the first half chamber to form a hermetic chamber; a first moving device that moves the second half chamber relative to the first half chamber between a separated position and a coupled position; a first volume adjusting body disposed in the second half chamber and having a shape that does not collide with the workpiece and the drying table when the drying table is positioned at the drying phase and the second half chamber is located at the coupled position; and a vacuum pump.

Abstract: The present invention provides a cleaning machine capable of selecting a spray head independently of a rotational phase of a nozzle. The cleaning machine includes a slide, a pump, a main valve, a nozzle switching valve, a compressed air source, a swivel joint, a motor, and a nozzle block. The nozzle switching valve has an inflow chamber, a first chamber, a second chamber, a stem, a conical first valve element abuttable against the first valve seat, a conical second valve element abuttable against the second valve seat, a piston, and a spring. The swivel joint has a swivel housing, a swivel shaft, a first nozzle flow path and a second nozzle flow path. The nozzle block has a first nozzle connected to the first nozzle flow path and a second nozzle connected to the second nozzle flow path.

Abstract: A compact cleaning apparatus including a robot with a narrow range of motion is provided. The cleaning apparatus includes: a cleaning chamber; a cleaning station; a drying station; a separation wall; a single axis robot including a column arranged adjacent to a side surface, a linear guide extending vertically, and a vertical moving saddle movable vertically; an arm portion including a first rotation saddle rotatable about a second axis extending vertically, a first arm swingable about a third axis extending horizontally and extending orthogonal to the third axis, a second arm rotatable about a fourth axis orthogonal to the third axis, a second rotation saddle rotatable about a fifth axis orthogonal to the fourth axis, a third rotation saddle rotatable about a sixth axis orthogonal to the fifth axis; and a hand for gripping a workpiece.

Abstract: Provided is a cleaning apparatus for cleaning a portion where a seating pad contacts or a hole into which a pin is inserted when a workpiece is placed. The cleaning apparatus for cleaning a workpiece having a placing portion and a reference hole, including: a table plate, a seating pad on which the workpiece is placed at the placing portion, a first nozzle that ejects a cleaning fluid, a pin inserted into the reference hole, and a second nozzle that ejects the cleaning fluid toward inside of the reference hole.

Abstract: Provided is a cleaning method of reducing the power consumption. The cleaning method including: generating a jet of a cleaning liquid from a nozzle; moving the nozzle so that the jet collides with a target portion of a workpiece; acquiring a current position of the nozzle; determining whether the current position is within a target region corresponding to the target portion; ejecting the jet having an ejection pressure of a first pressure when the current position is within the target region; and ejecting the jet having the ejection pressure lower than the first pressure when the current position is other than the target region.

Abstract: Clamping an axially extending workpiece along a center axis and cleaning a shaft portion and an end to clean and dry the workpiece in a short period of time. A cleaning apparatus for cleaning the workpiece, including a cleaning chamber having a first side wall and a second side wall, a cleaning station including a cleaning axis, a cleaning nozzle, a first clamping device arranged on the first side wall, a second clamping device arranged on the second side wall, and a drying station including a drying axis, a drying nozzle, a second clamping device arranged on the second side wall, and a turn table having two regions arranged in a 180 degree rotational symmetry. The turn table arranges one of the two regions is arranged in the cleaning station, and the other in the drying station.

Abstract: The vacuum dryer includes: a first half chamber having a first opening, and a drying table on which a workpiece is fixed and positioned at a drying phase; a second half chamber having a second opening and coupled with the first half chamber to form a hermetic chamber; a first moving device that moves the second half chamber relative to the first half chamber between a separated position and a coupled position; a first volume adjusting body disposed in the second half chamber and having a shape that does not collide with the workpiece and the drying table when the drying table is positioned at the drying phase and the second half chamber is located at the coupled position; and a vacuum pump.

Abstract: The present disclosure provides a cleaning machine, including: a cleaning chamber; a turn table having a plurality of areas arranged around a rotary axis, configured to turn one area of the plurality of areas to the cleaning station and another area to the transport station, each of the plurality of areas having: a cleaning tank including a closable opening, a rotating device arranged at the cleaning tank, and a cleaning table on which the object is placed, and which is arranged on the rotating device and rotatably arranged in the cleaning tank; a nozzle moving device arranged in the cleaning station; a cleaning nozzle arranged on the nozzle moving device; a shutter arranged in the cleaning station and closing the closable opening; and a shutter moving device configured to move the shutter toward the closable opening.

Abstract: A feeding device includes a feed base that is horizontally installed, a first driving source and a second driving source, a first saddle, a second saddle, a first propeller shaft, a second propeller shaft, a first transmission device, a second transmission device, and a holding device. The first saddle rotates about a first axis that goes along a vertical direction. The second saddle is disposed at the first saddle. The second saddle rotates about a second axis. The second axis goes along a horizontal direction. The first propeller shaft transmits a torque from the first driving source. The second propeller shaft transmits a torque from the second driving source. The first transmission device transmits a rotation of the first propeller shaft to the first saddle. The second transmission device transmits a rotation of the second propeller shaft to the second saddle. The holding device holds the object.

Abstract: Provided is a cleaning method of reducing the power consumption. The cleaning method including: generating a jet of a cleaning liquid from a nozzle; moving the nozzle so that the jet collides with a target portion of a workpiece; acquiring a current position of the nozzle; determining whether the current position is within a target region corresponding to the target portion; ejecting the jet having an ejection pressure of a first pressure when the current position is within the target region; and ejecting the jet having the ejection pressure lower than the first pressure when the current position is other than the target region.

Abstract: A compact versatile cell-type cleaning device and cell-type drying device is provided. A cleaning apparatus includes: a cover having a loading port formed on a wall surface of a cleaning chamber, and an unloading port formed on a wall surface of a drying chamber; a partition plate having an intermediate transfer port for dividing into the cleaning chamber and the drying chamber; an intermediate door that opens and closes the intermediate transfer port; a turntable disposed inside the drying chamber and having a first gripping device that grips an object, and a moving device having a gripping device that grips the object through a loading port, cleans the object inside the cleaning chamber while gripping the object, and moves the object to the turntable.

Abstract: Provided is a cleaning apparatus for cleaning a portion where a seating pad contacts or a hole into which a pin is inserted when a workpiece is placed. The cleaning apparatus for cleaning a workpiece having a placing portion and a reference hole, including: a table plate, a seating pad on which the workpiece is placed at the placing portion, a first nozzle that ejects a cleaning fluid, a pin inserted into the reference hole, and a second nozzle that ejects the cleaning fluid toward inside of the reference hole.

Abstract: The present disclosure provides a cleaning machine that simplifies the structure around a turn table. The cleaning machine (10) of the present disclosure comprises a cleaning table (31), a rotation mechanism (40), and a first flow path (5a˜5e). The rotation mechanism includes a motor (42), a first bevel gear (44), a reducer (50) having an output shaft (52) and an input shaft (51), a second bevel gear (56), a first swivel housing (60) inserted into the input shaft (51), a first swivel shaft (61) arranged inside the first swivel housing, and a first flange (62). The first flow path includes a first annular path (63a˜63e), a first upstream flow path (64a˜64e), and a first downstream flow path (65a˜65e) arranged inside the first swivel shaft and connected to the first upstream flow path via the first annular path.

Abstract: A dryer for increasing the dryness by fixing the inside of a bowl-shaped workpiece toward a rotating table side is provided. A dryer for drying an object includes a rotatable hollow cylindrical rotation shaft, a center shaft supported inside of the rotation shaft via a bearing and does not rotate, the center shaft having an inner blow passage therein extending along the center shaft, a rotation plate fixed to the first end of the rotation shaft; an inner fixed nozzle extending along the first end of the rotation shaft from the center shaft, a jig disposed on the rotation plate for fixing the object, a drive motor for rotating the rotation shaft, and a blower connected to the inner blow passage.

Abstract: A foreign object inspection device determines the position and the shape of foreign objects remaining on a workpiece. The foreign object inspection device for inspecting foreign objects at inspection spots of a workpiece includes a nozzle including a suction port that sucks a foreign object, an exhauster, and a suction channel connecting the nozzle to the exhauster, and a detector installed on the suction channel to detect foreign object information about the shape of the foreign object sucked through the suction port.

Abstract: The nozzle deflection measuring device includes: a nozzle that rotates about a rotation axis, and includes a cylindrical shaft body extending along the rotation axis, and a spout located at a distal end portion of the shaft body a tank-shaped container having an insertion opening, the insertion opening having a radius larger than a sum of a radius of the shaft body and a maximum allowable deflection amount of the nozzle, a folded back portion arranged entire circumference of the insertion opening and extending inward of the container, and a discharge port; a moving mechanism that moves the nozzle relative to the container; and a non-contact deflection measuring meter arranged outside of the container and in the vicinity of the insertion opening, and measures a deflection of the nozzle inserted through the insertion opening in a state where the spout is disposed inside the container.

Abstract: The present disclosure provides a cleaning machine that simplifies the structure around a turn table. The cleaning machine (10) of the present disclosure comprises a cleaning table (31), a rotation mechanism (40), and a first flow path (5a˜5e). The rotation mechanism includes a motor (42), a first bevel gear (44), a reducer (50) having an output shaft (52) and an input shaft (51), a second bevel gear (56), a first swivel housing (60) inserted into the input shaft (51), a first swivel shaft (61) arranged inside the first swivel housing, and a first flange (62). The first flow path includes a first annular path (63a˜63e), a first upstream flow path (64a˜64e), and a first downstream flow path (65a˜65e) arranged inside the first swivel shaft and connected to the first upstream flow path via the first annular path.

Abstract: The present disclosure provides a cleaning machine, including: a cleaning chamber; a turn table having a plurality of areas arranged around a rotary axis, configured to turn one area of the plurality of areas to the cleaning station and another area to the transport station, each of the plurality of areas having: a cleaning tank including a closable opening, a rotating device arranged at the cleaning tank, and a cleaning table on which the object is placed, and which is arranged on the rotating device and rotatably arranged in the cleaning tank; a nozzle moving device arranged in the cleaning station; a cleaning nozzle arranged on the nozzle moving device; a shutter arranged in the cleaning station and closing the closable opening; and a shutter moving device configured to move the shutter toward the closable opening.

Abstract: A compact cleaning apparatus including a robot with a narrow range of motion is provided. The cleaning apparatus includes: a cleaning chamber; a cleaning station; a drying station; a separation wall; a single axis robot including a column arranged adjacent to a side surface, a linear guide extending vertically, and a vertical moving saddle movable vertically; an arm portion including a first rotation saddle rotatable about a second axis extending vertically, a first arm swingable about a third axis extending horizontally and extending orthogonal to the third axis, a second arm rotatable about a fourth axis orthogonal to the third axis, a second rotation saddle rotatable about a fifth axis orthogonal to the fourth axis, a third rotation saddle rotatable about a sixth axis orthogonal to the fifth axis; and a hand for gripping a workpiece.

Abstract: A cleaning apparatus capable of clamping an axially extending workpiece on a center axis and cleaning an end portion and a shaft portion of the workpiece is provided. The cleaning apparatus includes a cleaning chamber having a first side wall and a second side wall, a top plate, a lifter configured to move the top plate upward or downward between a cleaning position and a retracted position, a first slide shaft reciprocable along a cleaning axis, a first clamp shaft that abuts a workpiece, a first clamp drive device that reciprocates the first slide shaft, a motor that rotates the first clamp shaft, a second slide shaft reciprocable along the cleaning axis, a second clamp shaft that abuts the workpiece, a second clamp drive device that reciprocates the second slide shaft, and a cleaning nozzle.