Patents by Inventor Toyoaki Nakajima
Toyoaki Nakajima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20200191677Abstract: Pressure measurement system has inside a main body to be mounted on an object to be measured: a sensor section; a control section processing an input from the sensor section and outputting a predetermined signal; a vacuum gauge provided with power supply circuit sections for providing the control section and the sensor section with power; and a terminal device being connectable to the control section, through a communication line, in a manner to be freely communicated with each other and being capable of supplying the power circuit section with power. The vacuum gauge is arranged to be able to judge the power supply from the terminal device to the control section. When power is supplied from the terminal device to the control section, the control section and the terminal device are connected together through the communication line so as to be freely communicated with each other.Type: ApplicationFiled: December 11, 2019Publication date: June 18, 2020Applicant: ULVAC, INC.Inventors: Takanobu Sato, Toyoaki Nakajima, Takeshi Miyashita, Masahiro Fukuhara, Hideki Yoshizawa
-
Patent number: 10670486Abstract: Pressure measurement system has inside a main body to be mounted on an object to be measured: a sensor section; a control section processing an input from the sensor section and outputting a predetermined signal; a vacuum gauge provided with power supply circuit sections for providing the control section and the sensor section with power; and a terminal device being connectable to the control section, through a communication line, in a manner to be freely communicated with each other and being capable of supplying the power circuit section with power. The vacuum gauge is arranged to be able to judge the power supply from the terminal device to the control section. When power is supplied from the terminal device to the control section, the control section and the terminal device are connected together through the communication line so as to be freely communicated with each other.Type: GrantFiled: December 11, 2019Date of Patent: June 2, 2020Assignee: ULVAC, INC.Inventors: Takanobu Sato, Toyoaki Nakajima, Takeshi Miyashita, Masahiro Fukuhara, Hideki Yoshizawa
-
Patent number: 8674298Abstract: A quadrupole mass spectrometer for use in analyzing gas components in a test piece is made in a constitution in which resistance heating of a grid is materialized, and in which a high-accuracy analysis of the gas components is possible at a low cost while preventing the sensitivity from lowering. A quadrupole mass spectrometer is provided with a sensor section which can be detachably fitted to the test piece.Type: GrantFiled: February 15, 2011Date of Patent: March 18, 2014Assignee: Ulvac, Inc.Inventors: Toyoaki Nakajima, Yuujirou Kurokawa, Tsutomu Yuri, Ryota Tanaka
-
Publication number: 20120280122Abstract: A quadrupole mass spectrometer for use in analyzing gas components in a test piece is made in a constitution in which resistance heating of a grid is materialized, and in which a high-accuracy analysis of the gas components is possible at a low cost while preventing the sensitivity from lowering. A quadrupole mass spectrometer is provided with a sensor section which can be detachably fitted to the test piece.Type: ApplicationFiled: February 15, 2011Publication date: November 8, 2012Inventors: Toyoaki Nakajima, Yuujirou Kurokawa, Tsutomu Yuri, Ryota Tanaka
-
Patent number: 8288715Abstract: An oxygen detection method, includes: preparing a grid, an ion collector, and a filament in which an oxide are formed on a surface of metal; controlling a filament current flowing to the filament so that an emission current becomes constant; discharging thermionic electrons which are caused by heat generation by applying the filament current, and generating ions by ionizing a gas; capturing the ions with the ion collector; and detecting oxygen being present in a vacuum processing chamber by measuring a filament current value.Type: GrantFiled: March 16, 2010Date of Patent: October 16, 2012Assignee: Ulvac, Inc.Inventors: Toyoaki Nakajima, Takeshi Miyashita, Yasushi Nagata, Yasufumi Uchida, Hideki Yoshizawa
-
Patent number: 8138473Abstract: A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.Type: GrantFiled: April 14, 2008Date of Patent: March 20, 2012Assignee: Ulvac, Inc.Inventors: Toyoaki Nakajima, Yujirou Kurokawa, Tsutomu Yuri, Ryota Tanaka, Shuji Yoshida
-
Patent number: 8115166Abstract: A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.Type: GrantFiled: April 14, 2008Date of Patent: February 14, 2012Assignee: ULVAC, Inc.Inventors: Toyoaki Nakajima, Yujirou Kurokawa, Tsutomu Yuri, Ryota Tanaka, Jiro Endo, Hitomi Obise
-
Publication number: 20110315872Abstract: An oxygen detection method, includes: preparing a grid, an ion collector, and a filament in which an oxide are formed on a surface of metal; controlling a filament current flowing to the filament so that an emission current becomes constant; discharging thermionic electrons which are caused by heat generation by applying the filament current, and generating ions by ionizing a gas; capturing the ions with the ion collector; and detecting oxygen being present in a vacuum processing chamber by measuring a filament current value.Type: ApplicationFiled: March 16, 2010Publication date: December 29, 2011Applicant: ULVAC, INC.Inventors: Toyoaki Nakajima, Takeshi Miyashita, Yasushi Nagata, Yasufumi Uchida, Hideki Yoshizawa
-
Patent number: 8013291Abstract: A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.Type: GrantFiled: April 14, 2008Date of Patent: September 6, 2011Assignee: Ulvac, Inc.Inventors: Toyoaki Nakajima, Yujirou Kurokawa, Tsutomu Yuri, Ryota Tanaka, Jiro Endo, Hitomi Obise
-
Publication number: 20100213363Abstract: A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.Type: ApplicationFiled: April 14, 2008Publication date: August 26, 2010Applicant: ULVAC, INC.Inventors: Toyoaki Nakajima, Yujirou Kurokawa, Tsutomu Yuri, Ryota Tanaka, Shuji Yoshida
-
Publication number: 20100133429Abstract: A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.Type: ApplicationFiled: April 14, 2008Publication date: June 3, 2010Applicant: ULVAC, INC.Inventors: Toyoaki Nakajima, Yujirou Kurokawa, Tsutomu Yuri, Ryota Tanaka, Jiro Endo, Hitomi Obise
-
Publication number: 20090090854Abstract: A mass spectrometer is provided which is mounted on a wall portion of a chamber and analyzes a gas to be analyzed existing in the chamber. The mass spectrometer includes: a measurement unit which is inserted into the chamber at the time of mounting the mass spectrometer to the chamber and measures each partial pressure of gaseous components in the gas to be analyzed with respect to mass-to-charge ratios; a control unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and is used to manipulate the measurement unit; and a display unit which is disposed outside of the wall portion at the time of mounting the mass spectrometer on the chamber and displays the measurement result of the measurement unit. Here, the measurement unit, the control unit, and the display unit are disposed close to each other.Type: ApplicationFiled: May 17, 2006Publication date: April 9, 2009Applicant: ULVAC, INC.Inventors: Toyoaki Nakajima, Hideki Yoshizawa