Patents by Inventor Toyoaki Sugimoto

Toyoaki Sugimoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Imprint apparatus, information processing apparatus, imprint method, and method of manufacturing article
    Patent number: 11619879
    Abstract: The preset invention provides an imprint apparatus including a supplying unit including a plurality of orifices which discharge droplets of an imprint material, and configured to supply the imprint material onto a substrate via the plurality of the orifices, and a processing unit configured to perform processing to determine positions where the droplets of the imprint material are to be supplied on the substrate based on information, which indicates a relationship between an elapsed time since the supplying unit has supplied the imprint material on the substrate and a spread of the droplets of the imprint material on the substrate corresponding to the elapsed time, and a predicted time since the supplying unit has supplied the imprint material onto the substrate until a mold is brought into contact with imprint material.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: April 4, 2023
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Toyoaki Sugimoto
  • IMPRINT APPARATUS, INFORMATION PROCESSING APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE
    Publication number: 20210181623
    Abstract: The preset invention provides an imprint apparatus including a supplying unit including a plurality of orifices which discharge droplets of an imprint material, and configured to supply the imprint material onto a substrate via the plurality of the orifices, and a processing unit configured to perform processing to determine positions where the droplets of the imprint material are to be supplied on the substrate based on information, which indicates a relationship between an elapsed time since the supplying unit has supplied the imprint material on the substrate and a spread of the droplets of the imprint material on the substrate corresponding to the elapsed time, and a predicted time since the supplying unit has supplied the imprint material onto the substrate until a mold is brought into contact with imprint material.
    Type: Application
    Filed: November 6, 2020
    Publication date: June 17, 2021
    Inventor: Toyoaki Sugimoto