Abstract: A simple imaging XPS (X-ray photoelectron spectrometry) system using a coaxial spherical sector electron energy analyzer. The system can obtain a two-dimensional photoelectron image of the analyzed sample surface. The energy analyzer (1) includes an input slit (11) extending in the y-direction. An image representing the distribution of the energies of photoelectrons ejected from the sample (S) is focused onto the input slit (11) by an input lens system (5). Only photoelectrons passed through the slit (11) are analyzed by the analyzer (1) and detected by a multichannel detector (12) disposed at least in the y-direction in the focal plane of the analyzer. A pair of deflection plates (10) capable of deflecting the image representing the distribution in the x-direction are mounted within the input lens system (5). Photoelectrons distributed in the y-direction are detected simultaneously by the detector (12).