Abstract: Provided is a cleaning method of reducing the power consumption. The cleaning method including: generating a jet of a cleaning liquid from a nozzle; moving the nozzle so that the jet collides with a target portion of a workpiece; acquiring a current position of the nozzle; determining whether the current position is within a target region corresponding to the target portion; ejecting the jet having an ejection pressure of a first pressure when the current position is within the target region; and ejecting the jet having the ejection pressure lower than the first pressure when the current position is other than the target region.

Abstract: Provided is a pump apparatus capable of suppressing an unintentional ejection of a high-pressure liquid from a nozzle. A pump apparatus including: an injection chamber having a door; a nozzle arranged in the injection chamber; a pump connected to the nozzle for discharging liquid; a motor for driving the pump; a door sensor for detecting that the door is closed; and a control device capable of communicating with the door sensor, the control device having a motor rotation unit for supplying driving power to the motor only when the door sensor detects that the door is closed.

Abstract: Provided is a cleaning method of reducing the power consumption. The cleaning method including: generating a jet of a cleaning liquid from a nozzle; moving the nozzle so that the jet collides with a target portion of a workpiece; acquiring a current position of the nozzle; determining whether the current position is within a target region corresponding to the target portion; ejecting the jet having an ejection pressure of a first pressure when the current position is within the target region; and ejecting the jet having the ejection pressure lower than the first pressure when the current position is other than the target region.

Abstract: A compact versatile cell-type cleaning device and cell-type drying device is provided. A cleaning apparatus includes: a cover having a loading port formed on a wall surface of a cleaning chamber, and an unloading port formed on a wall surface of a drying chamber; a partition plate having an intermediate transfer port for dividing into the cleaning chamber and the drying chamber; an intermediate door that opens and closes the intermediate transfer port; a turntable disposed inside the drying chamber and having a first gripping device that grips an object, and a moving device having a gripping device that grips the object through a loading port, cleans the object inside the cleaning chamber while gripping the object, and moves the object to the turntable.

Abstract: Provided is a pump apparatus capable of suppressing an unintentional ejection of a high-pressure liquid from a nozzle. A pump apparatus including: an injection chamber having a door; a nozzle arranged in the injection chamber; a pump connected to the nozzle for discharging liquid; a motor for driving the pump; a door sensor for detecting that the door is closed; and a control device capable of communicating with the door sensor, the control device having a motor rotation unit for supplying driving power to the motor only when the door sensor detects that the door is closed.

Abstract: A compact versatile cell-type cleaning device and cell-type drying device is provided. A cleaning apparatus includes: a cover having a loading port formed on a wall surface of a cleaning chamber, and an unloading port formed on a wall surface of a drying chamber; a partition plate having an intermediate transfer port for dividing into the cleaning chamber and the drying chamber; an intermediate door that opens and closes the intermediate transfer port; a turntable disposed inside the drying chamber and having a first gripping device that grips an object, and a moving device having a gripping device that grips the object through a loading port, cleans the object inside the cleaning chamber while gripping the object, and moves the object to the turntable.