Patents by Inventor Toyotaro Horiuchi

Toyotaro Horiuchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In-situ coat, bake and cure of dielectric material processing system for semiconductor manufacturing
    Patent number: 5705232
    Abstract: This is a system and method of in-situ coating, baking and curing of dielectric material. The system may include: dispensing apparatus for dispensing spin-on material; a lamp module 50; a window 54 connected to the lamp module 50; an environmental control chamber 56 connected to the window 54; an access gate 60 for wafers 58 in the environmental control chamber 56; a spin chuck 62 inside the environmental control chamber 56; and an exhaust pipe 64 connected to the environmental control chamber 56. The lamp module 50 may contains infra red and ultra violet lamps. In addition, the coating chamber may process dielectric material such as spin-on glass, silicon dioxide and various other spin-on material.
    Type: Grant
    Filed: September 20, 1994
    Date of Patent: January 6, 1998
    Assignee: Texas Instruments Incorporated
    Inventors: Ming Hwang, Toyotaro Horiuchi, Peter Ying, Jing Shu