Patents by Inventor Toyoyasu Tauchi

Toyoyasu Tauchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing system and processing method
    Patent number: 9199805
    Abstract: According to one embodiment, a processing system includes a storage section, a processing section, a mounting section, a first transport section, and a second transport section. The mounting section includes a plurality of holding sections with a first spacing in a stacking direction. The first transport section is configured to transport the workpiece between the storage section and the mounting section and to enter the mounting section at a first position in the stacking direction. The second transport section is configured to transport the workpiece between the processing section and the mounting section and to enter the mounting section at a second position different from the first position in the stacking direction. The first position is provided at two sites in the stacking direction across the second position. The first transport section and the second transport section are enabled to enter the mounting section around a same time.
    Type: Grant
    Filed: August 9, 2012
    Date of Patent: December 1, 2015
    Assignee: SHIBAURA MECHATRONICS CORPORATION
    Inventors: Masaaki Furuya, Toyoyasu Tauchi
  • SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
    Publication number: 20150090296
    Abstract: A substrate processing device 100 includes a solvent replacing unit (organic solvent supply unit 15 and solvent supply unit 34) replacing a cleaning liquid with a volatile solvent of a low concentration, and thereafter further performing replacement with a volatile solvent of a high concentration.
    Type: Application
    Filed: September 24, 2014
    Publication date: April 2, 2015
    Applicant: SHIBAURA MECHATRONICS CORPORATION
    Inventors: Yuji NAGASHIMA, Jun MATSUSHITA, Konosuke HAYASHI, Kunihiro MIYAZAKI, Masaaki FURUYA, Hidehito AZUMANO, Toyoyasu TAUCHI
  • PROCESSING SYSTEM AND PROCESSING METHOD
    Publication number: 20130209212
    Abstract: According to one embodiment, a processing system includes a storage section, a processing section, a mounting section, a first transport section, and a second transport section. The mounting section includes a plurality of holding sections with a first spacing in a stacking direction. The first transport section is configured to transport the workpiece between the storage section and the mounting section and to enter the mounting section at a first position in the stacking direction. The second transport section is configured to transport the workpiece between the processing section and the mounting section and to enter the mounting section at a second position different from the first position in the stacking direction. The first position is provided at two sites in the stacking direction across the second position. The first transport section and the second transport section are enabled to enter the mounting section around a same time.
    Type: Application
    Filed: August 9, 2012
    Publication date: August 15, 2013
    Applicant: Shibaura Mechatronics Corporation
    Inventors: Masaaki Furuya, Toyoyasu Tauchi