Patents by Inventor Tracey Scherban

Tracey Scherban has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Enhancing adhesion of silicon nitride films to carbon-containing oxide films
    Patent number: 7071129
    Abstract: Adhesion between silicon nitride etch-stop layers and carbon doped oxide films may be improved by using plasma argon densification treatments of the carbon doped oxide films. The resulting surface layer of the carbon doped oxide films may be carbon-depleted and may include a relatively rough interface to improve the adhesion of deposited silicon nitride films.
    Type: Grant
    Filed: September 12, 2002
    Date of Patent: July 4, 2006
    Assignee: Intel Corporation
    Inventors: Chia-Hong Jan, Tracey Scherban, Ying Zhou, Adam Schafer, Brett Robert Schroeder
  • Enhancing adhesion of silicon nitride films to carbon-containing oxide films
    Publication number: 20040051176
    Abstract: Adhesion between silicon nitride etch-stop layers and carbon doped oxide films may be improved by using plasma argon densification treatments of the carbon doped oxide films. The resulting surface layer of the carbon doped oxide films may be carbon-depleted and may include a relatively rough interface to improve the adhesion of deposited silicon nitride films.
    Type: Application
    Filed: September 12, 2002
    Publication date: March 18, 2004
    Inventors: Chia-Hong Jan, Tracey Scherban, Ying Zhou, Adam Schafer, Brett Robert Schroeder