Abstract: Sensor systems and methods are disclosed, which generally incorporate isolation between the sensor's electronics and the sensed media. The sensor's electronic circuit can incorporate one or more application specific integrated circuit (ASIC) that processes and outputs the signal for both absolute and differential measurements. Such a sensor can be adapted for use in exhaust gas re-circulation (EGR) systems utilized with automotive gasoline engines. Such a sensor can also be utilized for measuring differential pressure across diesel particular filters and/or applications in which differential pressure is required for system control and/or monitoring purposes. The absolute pressure sensor disclosed herein can therefore sense the exhaust pressure on automotive engines and other mechanical and/or electromechanical devices and machines.

Abstract: An absolute pressure sensor is disclosed that includes a plurality of pressure sense die and a hermetically sealed cover located above the plurality of pressure sense die. A carrier can be provided to which the pressure sense die are mounted by a cured adhesive. The carrier and the pressure sense die can be attached to a circuit board populated with a plurality of surface mounted components for electrical connection to the absolute pressure sensor. An ASIC can also be provided for digitally calibrating the pressure sense die with temperature compensation, wherein the ASIC automatically controls a plurality of output modes thereof during calibration.