Abstract: An air filter system for installation within the air inlet duct for an air conditioning system has a pair of mandrels that establish sufficient friction force when a web of fresh filter fabric is drawn from a supply roll to eliminate most undesirable wrinkles and slackness in the web. The “pop-off” feature of the fresh filter fabric supply and contaminated filter fabric storage magazines with a removable side enable a fresh roll of filter fabric to be installed in the system with minimal disagreeable effort. A peripheral step that protrudes from the base of the system enables the system to be adaptable to many existing air conditioner ducting structures. A back-up secondary filter, preferably treated with the activated carbon, permits less-than-particulate contamination, e.g. odors and noxious gases to be removed from the incoming air stream.

Abstract: A method and system to locate and detect voids in films that are involved in critical dimension (CD) structures and non-critical dimension structures in semiconductor devices are presented. One or more test structures (resolution devices) are formed on a semiconductor wafer. A scanning electron microscope is operated in voltage contrast mode to obtain a digital representation of the test structure. The voltage contrast image of the test structure is then analyzed with a system which automates the location, identification, and categorization of voids in the test structure. Additionally, the method is more sensitive to electrical marginalities caused by voids than other wafer electrical testing methods. The method is suitable inline monitoring during a manufacturing process by utilizing the automation of void identification, location, and categorization as a process monitoring parameter.