Patents by Inventor Triratna P. Muneshwar

Triratna P. Muneshwar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to improve precursor utilization in pulsed atomic layer processes
    Patent number: 10619243
    Abstract: A method and system is provided to improve precursor utilization in pulsed atomic layer processes. The system integrates a chiller with a precursor ampoule to lower the temperature of the precursor ampoule, and thereby reduce the precursor vapor pressure. By lowering the ampoule temperature, the loss of excess unreacted precursor molecules is reduced, in order to improve precursor utilization efficiency in atomic layer processes.
    Type: Grant
    Filed: July 20, 2017
    Date of Patent: April 14, 2020
    Inventors: Triratna P. Muneshwar, Ken Cadien
  • METHOD TO IMPROVE PRECURSOR UTILIZATION IN PULSED ATOMIC LAYER PROCESSES
    Publication number: 20180023195
    Abstract: A method and system is provided to improve precursor utilization in pulsed atomic layer processes. The system integrates a chiller with a precursor ampoule to lower the temperature of the precursor ampoule, and thereby reduce the precursor vapor pressure. By lowering the ampoule temperature, the loss of excess unreacted precursor molecules is reduced, in order to improve precursor utilization efficiency in atomic layer processes.
    Type: Application
    Filed: July 20, 2017
    Publication date: January 25, 2018
    Inventors: Triratna P. Muneshwar, Ken Cadien