Patents by Inventor Troy B. Morrison

Troy B. Morrison has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selective cleaning process for fabricating a semiconductor device
    Patent number: 5478436
    Abstract: A selective cleaning process for fabricating a semiconductor device includes the steps of processing a semiconductor substrate (10) and introducing metal contaminants (22) by contacting the semiconductor substrate (10) with a polishing slurry during a polished planarization process. The metal contaminants (22) are removed by applying a cleaning solution including an organic solvent and a compound containing fluorine. The chemical constituents of the cleaning solution are substantially unreactive with metal interconnect material (12) underlying dielectric layers (18) present on the semiconductor substrate (10). The preferred cleaning solution comprises an aqueous solution of ethylene glycol and ammonium fluoride.
    Type: Grant
    Filed: December 27, 1994
    Date of Patent: December 26, 1995
    Assignee: Motorola, Inc.
    Inventors: Paul M. Winebarger, Mark A. Zaleski, Troy B. Morrison, Jeffrey J. Sultemeier