Patents by Inventor Troy W. Adcock

Troy W. Adcock has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for controlling flatness of polished semiconductor wafer
    Patent number: 5787595
    Abstract: Apparatus for determining the flatness of a generally circular polishing pad through direct measurement of the pad for use in maintaining the flatness of the pad and the flatness of surfaces of articles polished on the polishing pad of a polisher. The apparatus includes a measuring device, a frame mounting the measuring device being capable of measuring a distance between an upper surface of the polishing pad and a reference plane at plural locations along the polishing pad. The apparatus further includes a controller for controlling the measuring device. The controller is configured to indicate whether the flatness of the pad falls outside a predetermined specification.
    Type: Grant
    Filed: August 9, 1996
    Date of Patent: August 4, 1998
    Assignee: MEMC Electric Materials, Inc.
    Inventors: Ankur H. Desai, Troy W. Adcock, Michael S. Wisnieski, Harold E. Hall, Jr.