Patents by Inventor Tsai-Cheng Gau

Tsai-Cheng Gau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for photolithography in semiconductor manufacturing
    Patent number: 7723014
    Abstract: A method for photolithography in semiconductor manufacturing includes providing a substrate for a wafer and providing a mask for exposing the wafer. The wafer is exposed by utilizing a combination of high angle illumination and focus drift exposure methods.
    Type: Grant
    Filed: October 26, 2005
    Date of Patent: May 25, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuei Shun Chen, Chin-Hsiang Lin, Tsai-Cheng Gau, Chun-Kung Chen, Hsiao-Tzu Lu, Fu-Jye Liang