Abstract: A film adhesion detection device comprises: a testing member, which comprises: a carrier, which is on the testing member and is capable of vacuum suction to adsorb a testing sample, the carrier can raise, move, rotate, and position; a testing cutting tool, which is on the testing member and is capable of dismantling from the testing member; a counterpoise, which is on the testing cutting tool to provide a suitable weight to the testing cutting tool according to the strength and thickness of the testing sample; and a tape adhesion testing device, which is on the testing member and has a tape-outputting wheel, a counterpoise and a tape recovery wheel, the tape adhesion testing device provides a suitable adhesion force to the testing sample via the counterpoise, the tape recovery wheel tears off a tape after the tape is on a film.

Abstract: A film adhesion detection device comprises: a testing member, which comprises: a carrier, which is on the testing member and is capable of vacuum suction to adsorb a testing sample, the carrier can raise, move, rotate, and position; a testing cutting tool, which is on the testing member and is capable of dismantling from the testing member; a counterpoise, which is on the testing cutting tool to provide a suitable weight to the testing cutting tool according to the strength and thickness of the testing sample; and a tape adhesion testing device, which is on the testing member and has a tape-outputting wheel, a counterpoise and a tape recovery wheel, the tape adhesion testing device provides a suitable adhesion force to the testing sample via the counterpoise, the tape recovery wheel tears off a tape after the tape is on a film.

Abstract: An atomic layer deposition system with multiple flows comprises: a square vacuum chamber, which internally has four pairs of intakes and vents to control the flowing in-and-out of precursors and improve the quality of coating and the coating uniformity of an asymmetrical testing member; plural gas detection sensors, which monitor the states of the exhausting of the precursors in the chamber and automatically controls and alarms for the amount of the induction of the precursors to prevent the obstruction of the vents; and a discrete pyramidal cover, which has a precursor intake in the top of the cover, the pipelines of the induction of the precursors and the pipelines of the four pairs of the intakes and the vents are integrated in order to cooperate with the cover while coating a three-dimensional element, a vertical flow field of the precursors is then produced from top to bottom in the cover.