Patents by Inventor Tseh Lih Foo

Tseh Lih Foo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ISOLATION BETWEEN A BAFFLE PLATE AND A FOCUS ADAPTER
    Publication number: 20130240142
    Abstract: A device is provided for preventing contact between a baffle plate and a focus adapter in the upper chamber of an ashing system. The device includes a housing, a baffle plate including a plurality of holes, a focus adapter between the housing and the baffle plate, a plurality of spacers aligned with the holes, and a plurality of fasteners securing the spacers between the baffle plate and the housing, wherein the spacers isolate the focus adapter from contacting the baffle plate.
    Type: Application
    Filed: March 15, 2012
    Publication date: September 19, 2013
    Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Tseh Lih Foo, Kin Wei Chia