Patents by Inventor Tseng-Kui Tseng

Tseng-Kui Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for processing substrates and method therefor
    Patent number: 7371023
    Abstract: An apparatus (100) for processing substrates includes: a substrate cleaning device (20), which cleans the substrates with treating liquid; a developing device (40); and a treating liquid recovery system (30), which is connected with the cleaning device and the developing device. The treating liquid recovery system can convey the treating liquid from the cleaning device to the developing device. Thus the treating liquid that has been used in the cleaning device can be reused in the developing device. Therefore the apparatus can economize on treating liquid and reduce costs.
    Type: Grant
    Filed: June 13, 2005
    Date of Patent: May 13, 2008
    Assignee: Innolux Display Corp.
    Inventors: Yu-Ying Chan, Ching-Lung Wang, Wen-Cheng Hsu, Tseng-Kui Tseng, Chen Kun Teng, Ho-Li Hsieh
  • Apparatus for processing substrates and method therefor
    Publication number: 20050274400
    Abstract: An apparatus (100) for processing substrates includes: a substrate cleaning device (20), which cleans the substrates with treating liquid; a developing device (40); and a treating liquid recovery system (30), which is connected with the cleaning device and the developing device. The treating liquid recovery system can convey the treating liquid from the cleaning device to the developing device. Thus the treating liquid that has been used in the cleaning device can be reused in the developing device. Therefore the apparatus can economize on treating liquid and reduce costs.
    Type: Application
    Filed: June 13, 2005
    Publication date: December 15, 2005
    Inventors: Yu-Ying Chan, Ching-Lung Wang, Wen-Cheng Hsu, Tseng-Kui Tseng, Chen Teng, Ho-Li Hsieh