Patents by Inventor Tseng Te Lun

Tseng Te Lun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for preventing particle contamination in a process chamber
    Patent number: 5888579
    Abstract: The present invention is concerned with a method and apparatus for preventing particle contamination in a semiconductor process chamber wherein a contaminant purge system is utilized which has a first end connected in fluid communication with a conduit connecting between a pressure sensor and a manifold, and a second end connected in fluid communication with an exhaust system such that a purge gas carries contaminant particles from the conduit to the exhaust system and away from the process chamber.
    Type: Grant
    Filed: July 29, 1996
    Date of Patent: March 30, 1999
    Assignee: Texas Instruments-Acer Incorporated
    Inventor: Tseng Te Lun