Patents by Inventor Tso-Fu Mark Chang

Tso-Fu Mark Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electroplating method and electroplating device
    Patent number: 10233557
    Abstract: An electroplating method according to an embodiment is a electroplating method of generating a metal film on a cathode surface by setting a negative potential to a cathode of an anode and the cathode provided in a reaction bath, including mixing and accommodating a plating solution containing at least plated metal ions, an electrolyte, and a surface active agent and a supercritical fluid in the reaction bath and applying a current in a concentration of the supercritical fluid and a cathode current density in which a polarization resistance obtained from a cathode polarization curve while the plated metal ions are reduced is larger than before the supercritical fluid is mixed.
    Type: Grant
    Filed: March 9, 2016
    Date of Patent: March 19, 2019
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOKYO INSTITUTE OF TECHNOLOGY
    Inventors: Kazuhito Higuchi, Yusaku Asano, Kyoko Honma, Kazuma Hiraguri, Yasunari Ukita, Masayuki Uchida, Toshiya Nakayama, Mayumi Machino, Masato Sone, Tso-Fu Mark Chang
  • ELECTROPLATING METHOD AND ELECTROPLATING DEVICE
    Publication number: 20160273121
    Abstract: An electroplating method according to an embodiment is a electroplating method of generating a metal film on a cathode surface by setting a negative potential to a cathode of an anode and the cathode provided in a reaction bath, including mixing and accommodating a plating solution containing at least plated metal ions, an electrolyte, and a surface active agent and a supercritical fluid in the reaction bath and applying a current in a concentration of the supercritical fluid and a cathode current density in which a polarization resistance obtained from a cathode polarization curve while the plated metal ions are reduced is larger than before the supercritical fluid is mixed.
    Type: Application
    Filed: March 9, 2016
    Publication date: September 22, 2016
    Applicants: KABUSHIKI KAISHA TOSHIBA, TOKYO INSTITUTE OF TECHNOLOGY
    Inventors: Kazuhito HIGUCHI, Yusaku Asano, Kyoko Honma, Kazuma Hiraguri, Yasunari Ukita, Masayuki Uchida, Toshiya Nakayama, Mayumi Machino, Masato Sone, Tso-Fu Mark Chang