Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode.

Abstract: An ultrasonic transducer device includes an ultrasonic transducer element array, a first signal terminal, and a second signal terminal. The ultrasonic transducer element array has a 1st element group to a kth element group (where k is a natural number such that k?2). The first signal terminal is connected with a control section configured and arranged to perform at least one of receiving and transmitting of signals. The second signal terminal is connected with the first signal terminal via the ultrasonic transducer element array. Each of the 1st element group to the kth element group includes a plurality of ultrasonic transducer elements electrically connected in series. The 1st element group to the kth element group are electrically connected in parallel between the first signal terminal and the second signal terminal.

Abstract: An optical filter includes a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, a second mirror formed on the concave portion and facing the first mirror, and an electrode formed on the second substrate and around the second mirror. The first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.

Abstract: A piezoelectric element includes a vibrating film, a piezoelectric body, a first electrode, a second electrode, and a groove. The piezoelectric body is arranged upon the vibrating film. The first electrode is arranged upon the piezoelectric body. The second electrode is arranged upon the piezoelectric body and at a position that is separated from the first electrode. The groove is located between the first electrode and the second electrode and splits a surface of the piezoelectric body in two, as seen in plan view from a thickness direction of the vibrating film.

Abstract: An optical filter includes: a first substrate and a second substrate that are disposed to face each other; a first mirror and a first electrode that are disposed on the second substrate side of the first substrate; and a second mirror and a second electrode that are disposed on the first substrate side of the second substrate, wherein the first mirror and the second mirror are connected via a wire.

Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode.

Abstract: An optical filter includes first and second substrates, first and second mirrors and first and second electrodes. The second substrate includes first, second and third surfaces. The second surface surrounds the first surface in a plan view, and the third surface surrounds the second surface in a plan view. A second height of the second surface is lower than a first height of the first surface, and a third height of the third surface is higher than the first height of the first surface. The first, second and third surfaces face a single flat surface of the first substrate. The first mirror is disposed on the first substrate. The second mirror is disposed on the first surface of the second substrate. The first electrode is disposed on the first substrate. The second electrode is disposed on the second surface of the second substrate and faces the first electrode.

Abstract: An ultrasonic transducer device includes an ultrasonic transducer element array, a first signal terminal, and a second signal terminal. The ultrasonic transducer element array has a 1st element group to a kth element group (where k is a natural number such that k?2). The first signal terminal is connected with a control section configured and arranged to perform at least one of receiving and transmitting of signals. The second signal terminal is connected with the first signal terminal via the ultrasonic transducer element array. Each of the 1st element group to the kth element group includes a plurality of ultrasonic transducer elements electrically connected in series. The 1st element group to the kth element group are electrically connected in parallel between the first signal terminal and the second signal terminal.

Abstract: An optical filter includes a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, a second mirror formed on the concave portion and facing the first mirror, and an electrode formed on the second substrate and around the second mirror. The first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.

Abstract: An optical filter comprising a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, and a second mirror formed on the concave portion and facing the first mirror, wherein the first substrate includes a first portion located on the first mirror, a second portion located around the first portion, a third portion located around the second portion, and a fourth portion located around the third portion, wherein both a thickness of the second portion and a thickness of the fourth portion are equal to or smaller than a thickness of the first portion.

Abstract: An optical filter includes first and second substrates, first and second mirrors and first and second electrodes. The second substrate includes first, second and third surfaces. The second surface surrounds the first surface in a plan view, and the third surface surrounds the second surface in a plan view. A second height of the second surface is lower than a first height of the first surface, and a third height of the third surface is higher than the first height of the first surface. The first, second and third surfaces face a single flat surface of the first substrate. The first mirror is disposed on the first surface. The second mirror is disposed on the first substrate and faces the first mirror. The first electrode is disposed on the first substrate. The second electrode is disposed on the second surface of the second substrate and faces the first electrode.

Abstract: An ultrasonic device is configured to transmit ultrasonic waves and includes a substrate, a diaphragm, a piezoelectric member and a control unit. The substrate has an opening. The diaphragm covers the opening of the substrate. The piezoelectric member is coupled to the diaphragm, and includes a first piezoelectric part and a second piezoelectric part. The control unit controls a voltage applied to the first piezoelectric part to be a vibration voltage and controls a voltage applied to the second piezoelectric part to be a constant voltage when the ultrasonic device transmits the ultrasonic waves.

Abstract: An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The second substrate faces the first substrate. The second substrate includes a first surface and a second surface. The second surface surrounds the first surface in a plan view and a second height of the second surface is lower than a first height of the first surface. The first mirror is formed on the first surface of the second substrate. The second mirror is formed on the first substrate, the second mirror facing the first mirror. The first electrode is formed on the first substrate. The second electrode is formed on the second surface of the second substrate. The second electrode faces the first electrode.

Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.

Abstract: An ultrasonic transducer is configured to transmit and receive ultrasonic waves. The ultrasonic transducer includes a vibrating member and a piezoelectric member coupled to the vibrating member. The piezoelectric member includes a first piezoelectric part configured and arranged to be deformed by applied voltage to vibrate the vibrating member or configured and arranged to be deformed by vibration of the vibrating member to produce a potential difference, and a second piezoelectric part configured and arranged to be deformed by applied voltage to statically deflect the vibrating member.

Abstract: An optical filter comprising: a first substrate; a second substrate facing the first substrate, the second substrate including a first surface and a second surface, a first height of the first surface being different from a second height of the second surface; a first mirror formed on the first surface of the second substrate; a second mirror formed on the second surface of the second substrate; a third mirror formed on the first substrate, the third mirror facing the first mirror; a fourth mirror formed on the first substrate, the fourth mirror facing the second mirror; a first electrode formed on the first substrate; and a second electrode formed on the second substrate, the second electrode facing the first electrode.

Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.

Abstract: A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.

Abstract: An ultrasonic transducer is configured to transmit and receive ultrasonic waves. The ultrasonic transducer includes a vibrating member and a piezoelectric member coupled to the vibrating member. The piezoelectric member includes a first piezoelectric part configured and arranged to be deformed by applied voltage to vibrate the vibrating member or configured and arranged to be deformed by vibration of the vibrating member to produce a potential difference, and a second piezoelectric part configured and arranged to be deformed by applied voltage to statically deflect the vibrating member.

Abstract: An ultrasonic transducer is configured to transmit or receive ultrasonic waves. The ultrasonic transducer includes a vibrating member and a piezoelectric member coupled to the vibrating member. The piezoelectric member includes a first piezoelectric part configured and arranged to be deformed by applied voltage to vibrate the vibrating member or configured and arranged to be deformed by vibration of the vibrating member to produce a potential difference, and a second piezoelectric part configured and arranged to be deformed by applied voltage to statically deflect the vibrating member.