Patents by Inventor Tsukasa Hori

Tsukasa Hori has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11360391
    Abstract: A target supply device includes a tank body portion holding a target substance; a communication portion connected to the tank body portion and including a filter that filters the melted target substance and a nozzle that discharges the target substance having passed through the filter; a main heater that heats the tank body portion; a sub-heater that heats the communication portion; and a control unit, the control unit being configured to set the main heater to a temperature higher than a melting point of the target substance before the target substance is melted, to set the sub-heater to a temperature lower than the melting point of the target substance until the target substance in the tank body portion is melted, and to set the sub-heater to a temperature higher than the melting point of the target substance after the target substance in the tank body portion is melted.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: June 14, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Fumio Iwamoto, Yutaka Shiraishi, Tsukasa Hori
  • Patent number: 11363706
    Abstract: A target supply device may include a first containing member configured to contain a target substance; a second containing member configured to contain the target substance flowing from the first containing member; a ring-shaped sealing portion which is formed integrally with one of the first containing member and the second containing member, and is brought into close contact with the other containing member; and a fastening member which fastens the first containing member and the second containing member to each other so that the first containing member communicates with the second containing member through the communication portion, and presses the sealing portion against the other containing member. Here, the sealing portion being plastically deformed by being pressed against the other containing member by the fastening member to seal a gap between the first containing member and the second containing member around the communication portion due to the plastic deformation.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: June 14, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Yutaka Shiraishi, Toshihiro Nishisaka, Tsukasa Hori
  • Patent number: 11320740
    Abstract: A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: May 3, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Tsukasa Hori, Yutaka Shiraishi, Toshihiro Nishisaka, Hiroshi Someya, Yukio Watanabe
  • Patent number: 11310899
    Abstract: A target supply device may include a first container configured to contain a solid target substance; a second container including a first connection port connected to the first container, a second connection port connected to a first pressurized gas supply line, and a third connection port connected to a target substance lead-out path; a moving body including a first recessed portion configured to contain the solid target substance supplied from the first container and move the first recessed portion inside the second container to cause an opening of the first recessed portion to be overlapped sequentially with the first to third connection ports; a third container connected to both a second pressurized gas supply line and the target substance lead-out path and configured to melt the solid target substance supplied from the third connection port; and a nozzle configured to output the melted target substance supplied from the third container.
    Type: Grant
    Filed: May 5, 2021
    Date of Patent: April 19, 2022
    Assignee: Gigaphoton Inc.
    Inventors: Yutaka Shiraishi, Tsukasa Hori
  • Publication number: 20220015218
    Abstract: A target supply device may include a first containing member configured to contain a target substance; a second containing member configured to contain the target substance flowing from the first containing member; a ring-shaped sealing portion which is formed integrally with one of the first containing member and the second containing member, and is brought into close contact with the other containing member; and a fastening member which fastens the first containing member and the second containing member to each other so that the first containing member communicates with the second containing member through the communication portion, and presses the sealing portion against the other containing member. Here, the sealing portion being plastically deformed by being pressed against the other containing member by the fastening member to seal a gap between the first containing member and the second containing member around the communication portion due to the plastic deformation.
    Type: Application
    Filed: May 28, 2021
    Publication date: January 13, 2022
    Applicant: Gigaphoton Inc.
    Inventors: Yutaka SHIRAISHI, Toshihiro NISHISAKA, Tsukasa HORI
  • Publication number: 20210410261
    Abstract: A target supply device may include a first container configured to contain a solid target substance; a second container including a first connection port connected to the first container, a second connection port connected to a first pressurized gas supply line, and a third connection port connected to a target substance lead-out path; a moving body including a first recessed portion configured to contain the solid target substance supplied from the first container and move the first recessed portion inside the second container to cause an opening of the first recessed portion to be overlapped sequentially with the first to third connection ports; a third container connected to both a second pressurized gas supply line and the target substance lead-out path and configured to melt the solid target substance supplied from the third connection port; and a nozzle configured to output the melted target substance supplied from the third container.
    Type: Application
    Filed: May 5, 2021
    Publication date: December 30, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Yutaka SHIRAISHI, Tsukasa HORI
  • Publication number: 20210364927
    Abstract: A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.
    Type: Application
    Filed: April 12, 2021
    Publication date: November 25, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Tsukasa HORI, Yutaka SHIRAISHI, Toshihiro NISHISAKA, Hiroshi SOMEYA, Yukio WATANABE
  • Publication number: 20210333718
    Abstract: An extreme ultraviolet light generation system according to an aspect of the present disclosure includes a first actuator that changes a travel direction of prepulse laser light to be output from a first optical element arranged on an optical path of the prepulse laser light between a prepulse laser device and a beam combiner, and a second actuator that changes irradiation positions of the prepulse laser light and main pulse laser light to be output from a light concentrating optical system, a plurality of sensors that detect light radiated from a predetermined region by a target being irradiated with the main pulse laser light, and a controller. Here, the controller controls the first actuator so that an evaluation value calculated from output of the plurality of sensors approaches a target value, and thereafter, controls the second actuator so that the evaluation value approaches the target value.
    Type: Application
    Filed: July 2, 2021
    Publication date: October 28, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Yuichi NISHIMURA, Takayuki YABU, Tsukasa HORI
  • Patent number: 11043784
    Abstract: A laser apparatus includes: a plurality of envelope blocks each provided with an optical element and a first temperature sensor and covering part of a laser beam path, the optical element being disposed on the laser beam path, the first temperature sensor being configured to measure a first temperature of gas at a position away from the optical element; an envelope body including the envelope blocks and covering the laser beam path; and a control unit connected with each first temperature sensor and configured to specify an envelope block at which increase of the first temperature is measured in the envelope body as an envelope block at which anomaly is occurring.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: June 22, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Tsukasa Hori, Yoshifumi Ueno, Takayuki Yabu, Yoshiaki Kurosawa
  • Publication number: 20200341383
    Abstract: A target supply device includes a tank body portion holding a target substance; a communication portion connected to the tank body portion and including a filter that filters the melted target substance and a nozzle that discharges the target substance having passed through the filter; a main heater that heats the tank body portion; a sub-heater that heats the communication portion; and a control unit, the control unit being configured to set the main heater to a temperature higher than a melting point of the target substance before the target substance is melted, to set the sub-heater to a temperature lower than the melting point of the target substance until the target substance in the tank body portion is melted, and to set the sub-heater to a temperature higher than the melting point of the target substance after the target substance in the tank body portion is melted.
    Type: Application
    Filed: July 10, 2020
    Publication date: October 29, 2020
    Applicant: Gigaphoton Inc.
    Inventors: Fumio IWAMOTO, Yutaka SHIRAISHI, Tsukasa HORI
  • Patent number: 10631393
    Abstract: A chamber device according to one aspect of the present disclosure includes a chamber inside which plasma is generated, a light source, and an incidence window configured to transmit light emitted from the light source to the inside of the chamber. The incidence window includes a first surface facing the outside of the chamber, and a second surface facing the inside of the chamber. At least the second surface is not coated with an anti-reflection film. The second surface is disposed in a state of being inclined at a non-perpendicular angle against an optical axis of the light emitted from the light source.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: April 21, 2020
    Assignee: Gigaphoton Inc.
    Inventor: Tsukasa Hori
  • Patent number: 10629414
    Abstract: A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.
    Type: Grant
    Filed: April 9, 2019
    Date of Patent: April 21, 2020
    Assignee: Gigaphoton Inc.
    Inventors: Fumio Iwamoto, Yutaka Shiraishi, Tsukasa Hori, Osamu Wakabayashi
  • Publication number: 20200044407
    Abstract: A laser apparatus includes: a plurality of envelope blocks each provided with an optical element and a first temperature sensor and covering part of a laser beam path, the optical element being disposed on the laser beam path, the first temperature sensor being configured to measure a first temperature of gas at a position away from the optical element; an envelope body including the envelope blocks and covering the laser beam path; and a control unit connected with each first temperature sensor and configured to specify an envelope block at which increase of the first temperature is measured in the envelope body as an envelope block at which anomaly is occurring.
    Type: Application
    Filed: October 8, 2019
    Publication date: February 6, 2020
    Applicant: Gigaphoton Inc.
    Inventors: Tsukasa HORI, Yoshifumi UENO, Takayuki YABU, Yoshiaki KUROSAWA
  • Publication number: 20200033739
    Abstract: An extreme ultraviolet light generation device according to an aspect of the present disclosure includes: a chamber in which tin is irradiated with a laser beam to generate extreme ultraviolet light; a hydrogen gas supply path that connects the chamber and a hydrogen-gas output unit of a hydrogen gas supply device as a supply source of hydrogen gas to be supplied into the chamber, receives supply of the hydrogen gas from the hydrogen gas supply device, and supplies, to the chamber, the hydrogen gas supplied from the hydrogen gas supply device; a temperature adjustment unit connected with the hydrogen gas supply path and configured to adjust the temperature of the hydrogen gas to be equal to or lower than 16° C.; and a gas discharge unit connected with the chamber and configured to discharge gas including at least hydrogen gas inside the chamber to outside of the chamber.
    Type: Application
    Filed: October 4, 2019
    Publication date: January 30, 2020
    Applicant: Gigaphoton Inc.
    Inventors: Tsukasa HORI, Hirokazu HOSODA
  • Patent number: 10512149
    Abstract: An extreme UV light generation device may include: a chamber having a plasma generation region at an inside of the chamber, the chamber receiving a target substance externally supplied to the plasma generation region; an outlet port provided on the chamber; a magnetic field generating unit configured to generate a magnetic field to converge cations on the outlet port, the cations being generated from the target substance that has been turned into plasma in the plasma generation region; an electron emission unit configured to emit electrons neutralizing the cations; and an exhaust tube joined to the outlet port and through which a neutralized substance obtained by neutralizing the cations flows.
    Type: Grant
    Filed: December 10, 2018
    Date of Patent: December 17, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Tsukasa Hori, Shinji Okazaki
  • Patent number: 10506697
    Abstract: An extreme ultraviolet light generation device may include a chamber in which a target is irradiated with laser light and extreme ultraviolet light is generated, and a target supply unit configured to eject a target into the chamber. The target supply unit may be provided with a nozzle member including an ejection face having an ejection port configured to eject the target into the chamber. An angle ?1 defined by the ejection face and the gravity axis may satisfy a condition of “0 degrees<?1<90 degrees”.
    Type: Grant
    Filed: February 6, 2019
    Date of Patent: December 10, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Fumio Iwamoto, Tsukasa Hori, Toshiyuki Hirashita
  • Publication number: 20190237303
    Abstract: A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.
    Type: Application
    Filed: April 9, 2019
    Publication date: August 1, 2019
    Applicant: Gigaphoton Inc.
    Inventors: Fumio IWAMOTO, Yutaka SHIRAISHI, Tsukasa HORI, Osamu WAKABAYASHI
  • Publication number: 20190174614
    Abstract: An extreme ultraviolet light generation device may include a chamber in which a target is irradiated with laser light and extreme ultraviolet light is generated, and a target supply unit configured to eject a target into the chamber. The target supply unit may be provided with a nozzle member including an ejection face having an ejection port configured to eject the target into the chamber. An angle ?1 defined by the ejection face and the gravity axis may satisfy a condition of “0 degrees<?1<90 degrees”.
    Type: Application
    Filed: February 6, 2019
    Publication date: June 6, 2019
    Applicant: Gigaphoton Inc.
    Inventors: Fumio IWAMOTO, Tsukasa HORI, Toshiyuki HIRASHITA
  • Patent number: 10306743
    Abstract: A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: May 28, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Tsukasa Hori, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi
  • Publication number: 20190141826
    Abstract: A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.
    Type: Application
    Filed: December 17, 2018
    Publication date: May 9, 2019
    Applicant: Gigaphoton Inc.
    Inventors: Tsukasa HORI, Kouji KAKIZAKI, Tatsuya YANAGIDA, Osamu WAKABAYASHI, Hakaru MIZOGUCHI