Abstract: An experiment support apparatus includes: one or more non-transitory computer-readable media that include an instruction; and one or more processors that execute the instruction. The instruction is configured to cause the one or more processors to execute an operation, the operation includes: causing a display device to display a condition table TB that indicates an experiment condition for measurement, in response to an input of the experiment condition; and causing the display device to display at least one of a measurement result based on measurement data, or an analysis result of the measurement data, in a cell of the condition table TB, in response to an input of the measurement data, the measurement data being obtained using a measurement apparatus under the experiment condition corresponding to the cell.

Abstract: A measurement system includes: an optical measurement instrument that measures a surface of a specimen; and a control apparatus that controls the measurement instrument. The control apparatus includes: one or more non-transitory computer-readable media that include an instruction; and one or more processors that execute the instruction. The instruction is configured to cause the one or more processors to execute an operation. The operation includes: causing the measurement instrument to repetitively measure the surface of the specimen without changing the setting; and evaluating appropriateness of the setting for measuring surface texture of the specimen, based on comparison between a measurement value of the surface texture of the specimen calculated from a measurement data item output from the measurement instrument, and a degree of variation in measurement by the measurement instrument calculated from a plurality of measurement data items output from the measurement instrument.

Abstract: An experiment support apparatus includes: one or more non-transitory computer-readable media that include an instruction; and one or more processors that execute the instruction. The instruction is configured to cause the one or more processors to execute an operation, the operation includes: causing a display device to display a condition table TB that indicates an experiment condition for measurement, in response to an input of the experiment condition; and causing the display device to display at least one of a measurement result based on measurement data, or an analysis result of the measurement data, in a cell of the condition table TB, in response to an input of the measurement data, the measurement data being obtained using a measurement apparatus under the experiment condition corresponding to the cell.

Abstract: A measurement system includes: an optical measurement instrument that measures a surface of a specimen; and a control apparatus that controls the measurement instrument. The control apparatus includes: one or more non-transitory computer-readable media that include an instruction; and one or more processors that execute the instruction. The instruction is configured to cause the one or more processors to execute an operation. The operation includes: causing the measurement instrument to repetitively measure the surface of the specimen without changing the setting; and evaluating appropriateness of the setting for measuring surface texture of the specimen, based on comparison between a measurement value of the surface texture of the specimen calculated from a measurement data item output from the measurement instrument, and a degree of variation in measurement by the measurement instrument calculated from a plurality of measurement data items output from the measurement instrument.

Abstract: A confocal microscope includes an objective lens for converging light which is emitted from a light source to a sample, a scanning mechanism for relatively scanning the sample with the light converged to the sample, and a plurality of confocal diaphragm apertures that are arranged at positions optically conjugate to the light-gathering position of the objective lens and have different diaphragm diameters. The confocal microscope further includes a plurality of photodetectors for detecting the intensities of lights respectively transmitting through the confocal diaphragm apertures, and a weighting/combining arithmetic processing unit for combining signals output from the photodetectors after weighting the signals.

Abstract: A confocal microscope having an objective lens for converging light, which is emitted from a light source, to a sample, a scanning mechanism for relatively scanning the sample with the light converged to the sample, a plurality of confocal diaphragm apertures that are arranged at positions optically conjugate to the light-gathering position of the objective lens and have different diaphragm diameters, and a plurality of photodetectors for detecting the intensities of lights respectively transmitting through the confocal diaphragm apertures comprises a weighting/combining arithmetic processing unit for combining signals output from the photodetectors after weighting the signals.