Abstract: An optical deflection apparatus includes a movable member configured to deflect incident light from a light emitter, and a lid member configured to cover the movable member. The lid member includes an opening through which the incident light and deflected light of the incident light pass. The deflected light is deflected by the movable member. The lid member includes a light attenuation portion configured to attenuate reflected light of the incident light or of the deflected light. The reflected light is reflected by the lid member.

Abstract: An optical deflection apparatus includes an optical deflection part configured to deflect light incident on a reflection surface by swinging the reflection surface about a swing axis, and a light transmission plate configured to transmit the light deflected by the optical deflection part, wherein an inclination angle of the light transmission plate with reference to a reference surface is equal to or greater than twice a maximum swing angle of the reflection surface with reference to the reference surface.

Abstract: An optical deflection apparatus includes a first optical deflection part configured to deflect light incident on a first reflection surface, by swinging the first reflection surface about a first swing axis, and a second optical deflection part configured to deflect the light deflected by the first reflection surface, by swinging a second reflection surface about a second swing axis crossing the first swing axis. The first swing axis crosses a first incidence plane including a central axis of the light incident on the first reflection surface and a central axis of the light deflected by the first reflection surface, and the second swing axis crosses a second incidence plane including a central axis of the light incident on the second reflection surface and a central axis of the light deflected by the second reflection surface.

Abstract: The present invention is to provide an optical scanner module. An optical scanner apparatus scans laser light by oscillating a mirror with a piezoelectric element. A package that mounts the optical scanner apparatus and electrically is connected to a substrate via a connector. A package cover that is fixed to the package and seals the optical scanner apparatus so that the optical scanner apparatus is not visually recognized from an outside. The package and the package cover are bonded by a heat curing adhesive agent. A vent for releasing gas in a space where the optical scanner apparatus is sealed is formed in the package cover, and the vent is blocked by ultraviolet curing resin.

Abstract: An actuator includes: a first drive beam provided to swing and drive a target object around a first axis and having a first drive source on a front surface; a second drive beam that has a zigzag shape, in which a plurality of beams extending in a direction vertical to a second axis orthogonal to the first axis are included and in which end portions of the beams adjacent with each other are connected at turn portions, and that is provided to swing and drive the object around the second axis, and having a second drive source on a front surface; a fixed frame connected to and support the second drive beam; and a rib formed on a back surface of the second drive beam and at a position away from a connection position of the beams with the turn portions toward the second axis.

Abstract: An optical scanning device includes a drive beam configured to support a mirror, and a drive source provided on the drive beam and configured to oscillate the mirror about a predetermined axis passing through the center of the light reflecting surface of the mirror. The drive beam includes multiple beams each extending in a direction perpendicular to the predetermined axis and one or more turn-back parts each connecting ends of adjacent beams, and has a zigzag shape as a whole. The multiple beams include a first beam, a second beam adjacent to the first beam, and a third beam adjacent to the second beam, the one or more turn-back parts include a first turn-back part connecting the first and second beams and a second turn-back part connecting the second and third beams, and the first and second turn-back parts are different in weight.

Abstract: An optical scanning device includes a mirror including a light reflection surface, a mirror support structure that supports the mirror, a pair of first driving beams connected to the mirror support structure and disposed on the corresponding sides of the mirror support structure, first driving sources disposed on the first driving beams and configured to cause the mirror to rotate around a first axis that passes through the center of the light reflection surface, and a fixed frame that supports the first driving beams. The center of gravity of the mirror and the mirror support structure is located on the first axis.

Abstract: An actuator includes a torsion beam configured to support a target object, a first drive beam having a first drive source, and a connection beam configured to connect the torsion beam with the first drive beam, and a frame body configured to fix the first drive beam, wherein the actuator applies force of rotating the torsion beam in a direction around a first axis by a resonant drive of the first drive beam so as to cause the target object to swing, and when a structural non-linear constant of the actuator is ? [Nm/rad3] and a spring constant of the actuator is k [Nm/rad], [Equation 1] is satisfied: [Equation 1] ?=0.05×k?A×106??(1), where 3.5?A?15.5.

Abstract: The present invention is to provide an optical scanner module. An optical scanner apparatus scans laser light by oscillating a mirror with a piezoelectric element. A package that mounts the optical scanner apparatus and electrically is connected to a substrate via a connector. A package cover that is fixed to the package and seals the optical scanner apparatus so that the optical scanner apparatus is not visually recognized from an outside. The package and the package cover are bonded by a heat curing adhesive agent. A vent for releasing gas in a space where the optical scanner apparatus is sealed is formed in the package cover, and the vent is blocked by ultraviolet curing resin.

Abstract: The present invention is to provide an optical scanner module capable of reducing cross-talk generated between a sensor interconnect and a drive interconnect.

Abstract: An optical scanning device is provided. The optical scanning device includes a mirror having an optical reflection surface, a movable frame supporting the mirror, a pair of drive beams supporting the movable frame from both sides, a drive source, disposed on the drive beams, that causes the movable frame to be swung around a predetermined axis, a fixed frame supporting the drive beams. Each of the drive source includes a lower electrode formed on the drive beams, a piezoelectric thin film formed on the lower electrode, an upper electrode formed on the piezoelectric thin film, and a stress counter film, formed on the upper electrode or formed between the piezoelectric thin film and the upper electrode, that generates a compressive stress on the drive beams.

Abstract: An actuator includes a torsion beam configured to support a target object, a first drive beam having a first drive source, and a connection beam configured to connect the torsion beam with the first drive beam, and a frame body configured to fix the first drive beam, wherein the actuator applies force of rotating the torsion beam in a direction around a first axis by a resonant drive of the first drive beam so as to cause the target object to swing, and when a structural non-linear constant of the actuator is ? [Nm/rad3] and a spring constant of the actuator is k [Nm/rad], [Equation 1] is satisfied: [Equation 1] ?=0.05×k?A×106??(1), where 3.5?A?15.5.

Abstract: An actuator includes: a first drive beam provided to swing and drive a target object around a first axis and having a first drive source on a front surface; a second drive beam that has a zigzag shape, in which a plurality of beams extending in a direction vertical to a second axis orthogonal to the first axis are included and in which end portions of the beams adjacent with each other are connected at turn portions, and that is provided to swing and drive the object around the second axis, and having a second drive source on a front surface; a fixed frame connected to and support the second drive beam; and a rib formed on a back surface of the second drive beam and at a position away from a connection position of the beams with the turn portions toward the second axis.

Abstract: An optical scanning device according to an embodiment of the present invention includes a mirror that has an optical reflection surface; a movable frame that supports the mirror; a pair of drive beams that support the movable frame from both sides; drive sources that are disposed on the drive beams and cause the movable frame to be swung around a predetermined axis that passes through the center of the optical reflection surface; and a fixed frame that supports the drive beams. A movable frame connection part, via which the movable frame and one of the drive beams are connected, is substantially arranged on a side opposite to a side on which a fixed frame connection part, via which the fixed frame and the one of the drive beams are connected, is arranged, with respect to the predetermined axis.

Abstract: An optical scanning device includes a mirror including a light reflection surface, a mirror support structure that supports the mirror, a pair of first driving beams connected to the mirror support structure and disposed on the corresponding sides of the mirror support structure, first driving sources disposed on the first driving beams and configured to cause the mirror to rotate around a first axis that passes through the center of the light reflection surface, and a fixed frame that supports the first driving beams. The center of gravity of the mirror and the mirror support structure is located on the first axis.

Abstract: An optical scanning device includes a drive beam configured to support a mirror, and a drive source provided on the drive beam and configured to oscillate the mirror about a predetermined axis passing through the center of the light reflecting surface of the mirror. The drive beam includes multiple beams each extending in a direction perpendicular to the predetermined axis and one or more turn-back parts each connecting ends of adjacent beams, and has a zigzag shape as a whole. The multiple beams include a first beam, a second beam adjacent to the first beam, and a third beam adjacent to the second beam, the one or more turn-back parts include a first turn-back part connecting the first and second beams and a second turn-back part connecting the second and third beams, and the first and second turn-back parts are different in weight.

Abstract: The present invention is to provide an optical scanner module capable of reducing cross-talk generated between a sensor interconnect and a drive interconnect.

Abstract: An optical scanning device is provided. The optical scanning device includes a mirror having an optical reflection surface, a movable frame supporting the mirror, a pair of drive beams supporting the movable frame from both sides, a drive source, disposed on the drive beams, that causes the movable frame to be swung around a predetermined axis, a fixed frame supporting the drive beams. Each of the drive source includes a lower electrode formed on the drive beams, a piezoelectric thin film formed on the lower electrode, an upper electrode formed on the piezoelectric thin film, and a stress counter film, formed on the upper electrode or formed between the piezoelectric thin film and the upper electrode, that generates a compressive stress on the drive beams.

Abstract: An optical scanning device according to an embodiment of the present invention includes a mirror that has an optical reflection surface; a movable frame that supports the mirror; a pair of drive beams that support the movable frame from both sides; drive sources that are disposed on the drive beams and cause the movable frame to be swung around a predetermined axis that passes through the center of the optical reflection surface; and a fixed frame that supports the drive beams. A movable frame connection part, via which the movable frame and one of the drive beams are connected, is substantially arranged on a side opposite to a side on which a fixed frame connection part, via which the fixed frame and the one of the drive beams are connected, is arranged, with respect to the predetermined axis.

Abstract: An optical scanner apparatus that oscillates a mirror to scan incident light, includes an optical scanner unit that includes a sensor that detects an oscillation angle of the mirror, and an interconnect connected to the sensor; and a shading unit that shades the sensor and the interconnect from stray light of the incident light and ambient light.