Abstract: According to the present disclosure, there is provided a technique capable of substantially uniformizing the quality of each substrate by setting the position of the substrate in accordance with the process conditions for each step of the substrate processing. According to one aspect thereof, there is provided a substrate processing apparatus including: a support structure capable of supporting at least a substrate; and a controller provided with a memory in which a recipe capable of setting a support position of the substrate is stored, wherein the controller is configured to be capable of controlling an operation of elevating and lowering the support structure such that the support position set in the recipe is located at a predetermined reference position.

Abstract: There is provided a technique capable of stably form the film on a substrate regardless of machine difference or processing conditions. According to an aspect of the present disclosure, there is provided a technique that includes: (a) setting correction coefficients for correcting an output level of microwave; (b) storing correction tables containing the correction coefficients set in (a); (c) acquiring one or more correction coefficients from at least one correction table periodically from a start of outputting of the microwave; (d) calculating a correction value for an output preset level of the microwave from the one or more correction coefficients acquired in (c); (e) correcting the output preset level of the microwave by using the correction value calculated in (d); and (f) processing a substrate by supplying the microwave into a process chamber with the output preset level of the microwave corrected in (e).

Abstract: A configuration that maintains productivity and can automatically execute and control recipes includes a process chamber that processes a substrate, a first transfer chamber in which the substrate is transferred in a vacuum state, a second transfer chamber in which the substrate is transferred in an atmospheric pressure state, a depressurizable preparatory chamber connecting the first transfer chamber and the second transfer chamber, and a controller that executes a maintenance recipe in the preparatory chamber and a production recipe in the process chamber, respectively, in which, when the controller receives an instruction for executing the production recipe during execution of the maintenance recipe, the controller temporarily stops the maintenance recipe and preferentially executes the production recipe, and continuously executes the temporarily stopped maintenance recipe, after completion of the production recipe.

Abstract: A configuration that maintains productivity and can automatically execute and control recipes includes a process chamber that processes a substrate, a first transfer chamber in which the substrate is transferred in a vacuum state, a second transfer chamber in which the substrate is transferred in an atmospheric pressure state, a depressurizable preparatory chamber connecting the first transfer chamber and the second transfer chamber, and a controller that executes a maintenance recipe in the preparatory chamber and a production recipe in the process chamber, respectively, in which, when the controller receives an instruction for executing the production recipe during execution of the maintenance recipe, the controller temporarily stops the maintenance recipe and preferentially executes the production recipe, and continuously executes the temporarily stopped maintenance recipe, after completion of the production recipe.

Abstract: To provide a substrate processing apparatus which can prevent a reduction in quality of a product, and damage to the apparatus. In a control program which operates on a substrate processing apparatus, a recipe storage portion and a parameter storage portion configure a data storage device which stores data relating to a control. On a user who has an authority being authenticated by an authentication process, the user carries out a data editing operation via an editing screen. A setting portion receives, via a UI device, operations for editing data stored by the data storage device. A timing portion measures a time between the operations received by the setting portion, and transmits the time to an operation control portion. In the event that the time measured by the timing portion has exceeded a prescribed time, the operation control portion prohibits the reception of the operations for editing the data.

Abstract: To eliminate unrequited maintenance by re-executing the sequence that is the cause of an error in a substrate processing apparatus. The system is provided with a processing chamber that processes a substrate, a carrier that carries the substrate, and a first controller that controls the carrier in accordance with a predetermined carrying sequence composed of a plurality of sequences, wherein if an error occurs while the carrier is carrying the substrate, after the first controller temporarily suspends an execution of the carrying sequence, it suspends the processing upon receipt of the stop processing and re-executes the sequence that is the cause of the error occurrence out of the carrying sequence upon receipt of the retry processing.

Abstract: A substrate processing method that achieves enhancement in productivity by making it possible to confirm the end point in the ashing process precisely is provided. The substrate processing method includes: detecting emission intensity; calculating an amount of variance in emission intensity that has been detected; detecting an end point from the calculated amount of variance in emission intensity; making a comparison between the detected end point and a predetermined time; and displaying a result of the comparison.

Abstract: To provide a substrate processing apparatus which can prevent a reduction in quality of a product, and damage to the apparatus. In a control program which operates on a substrate processing apparatus, a recipe storage portion and a parameter storage portion configure a data storage device which stores data relating to a control. On a user who has an authority being authenticated by an authentication process, the user carries out a data editing operation via an editing screen. A setting portion receives, via a UI device, operations for editing data stored by the data storage device. A timing portion measures a time between the operations received by the setting portion, and transmits the time to an operation control portion. In the event that the time measured by the timing portion has exceeded a prescribed time, the operation control portion prohibits the reception of the operations for editing the data.