Patents by Inventor Tsunehiko KITAMURA

Tsunehiko KITAMURA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exchange and flip chamber design for heterojunction solar cell formation
    Patent number: 10453728
    Abstract: In one embodiment, a chamber is provided that includes a chamber body and a lid defining an interior volume, a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation, and a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation.
    Type: Grant
    Filed: November 14, 2017
    Date of Patent: October 22, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Kyung-Tae Kim, Su Ho Cho, Tsunehiko Kitamura, Shinobu Abe, Shuran Sheng
  • EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORMATION
    Publication number: 20180144966
    Abstract: In one embodiment, a chamber is provided that includes a chamber body and a lid defining an interior volume, a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation, and a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation.
    Type: Application
    Filed: November 14, 2017
    Publication date: May 24, 2018
    Inventors: Kyung-Tae KIM, Su Ho CHO, Tsunehiko KITAMURA, Shinobu ABE, Shuran SHENG